JP2011232751A5 - - Google Patents

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Publication number
JP2011232751A5
JP2011232751A5 JP2011096245A JP2011096245A JP2011232751A5 JP 2011232751 A5 JP2011232751 A5 JP 2011232751A5 JP 2011096245 A JP2011096245 A JP 2011096245A JP 2011096245 A JP2011096245 A JP 2011096245A JP 2011232751 A5 JP2011232751 A5 JP 2011232751A5
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JP
Japan
Prior art keywords
support
pivot
axis
optical module
module according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011096245A
Other languages
English (en)
Japanese (ja)
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JP2011232751A (ja
JP6008468B2 (ja
Filing date
Publication date
Priority claimed from DE102010018224A external-priority patent/DE102010018224A1/de
Application filed filed Critical
Publication of JP2011232751A publication Critical patent/JP2011232751A/ja
Publication of JP2011232751A5 publication Critical patent/JP2011232751A5/ja
Application granted granted Critical
Publication of JP6008468B2 publication Critical patent/JP6008468B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011096245A 2010-04-23 2011-04-22 調整可能な光学素子を有する光学モジュール Active JP6008468B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010018224A DE102010018224A1 (de) 2010-04-23 2010-04-23 Optisches Modul mit einem verstellbaren optischen Element
DE102010018224.9 2010-04-23

Publications (3)

Publication Number Publication Date
JP2011232751A JP2011232751A (ja) 2011-11-17
JP2011232751A5 true JP2011232751A5 (enExample) 2014-06-05
JP6008468B2 JP6008468B2 (ja) 2016-10-19

Family

ID=44815562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011096245A Active JP6008468B2 (ja) 2010-04-23 2011-04-22 調整可能な光学素子を有する光学モジュール

Country Status (4)

Country Link
US (1) US10274845B2 (enExample)
JP (1) JP6008468B2 (enExample)
KR (1) KR101808860B1 (enExample)
DE (1) DE102010018224A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9254538B2 (en) 2013-04-16 2016-02-09 Corning Incorporated Method of minimizing stacking element distortions in optical assemblies
DE102019112224A1 (de) * 2019-05-10 2020-11-12 Carl Zeiss Smt Gmbh Abstützung eines optischen Elements
DE102019218609A1 (de) * 2019-11-29 2021-06-02 Carl Zeiss Smt Gmbh Abstützung einer optischen einheit

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000066075A (ja) 1998-08-17 2000-03-03 Nikon Corp 光学系及びその製造方法、並びに前記光学系を備えた露光装置
JP2002083766A (ja) 2000-06-19 2002-03-22 Nikon Corp 投影光学系、該光学系の製造方法、及び前記光学系を備えた投影露光装置
US7154684B2 (en) 2000-08-18 2006-12-26 Nikon Corporation Optical element holding apparatus
DE10115914A1 (de) * 2001-03-30 2002-10-02 Zeiss Carl Vorrichtung zur Lagerung eines optischen Elementes in einer Optik
DE10344178B4 (de) * 2003-09-24 2006-08-10 Carl Zeiss Smt Ag Halte- und Positioniervorrichtung für ein optisches Element
WO2005101131A1 (en) 2004-04-14 2005-10-27 Carl Zeiss Smt Ag Support device for positioning an optical element
JP2008111891A (ja) 2006-10-30 2008-05-15 Canon Inc 光学要素の保持装置及びそれを備えた露光装置
US7573659B2 (en) * 2006-10-27 2009-08-11 Canon Kabushiki Kaisha Optical element holding apparatus and exposure apparatus
EP1995534A1 (de) * 2007-05-19 2008-11-26 Fritz Brinkmann Steuerung und Antrieb eines kippbaren Solarreflektors zur Leistungssteigerung und zum Schutz von flächigen Sonnenkollektoren
DE102009044957A1 (de) * 2008-09-30 2010-04-08 Carl Zeiss Smt Ag Stützelemente für ein optisches Element
US9664982B2 (en) * 2015-03-12 2017-05-30 Panasonic Intellectual Property Management Co., Ltd. Optical system driving device, lens barrel, and optical device

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