JP2008203563A5 - - Google Patents

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Publication number
JP2008203563A5
JP2008203563A5 JP2007040005A JP2007040005A JP2008203563A5 JP 2008203563 A5 JP2008203563 A5 JP 2008203563A5 JP 2007040005 A JP2007040005 A JP 2007040005A JP 2007040005 A JP2007040005 A JP 2007040005A JP 2008203563 A5 JP2008203563 A5 JP 2008203563A5
Authority
JP
Japan
Prior art keywords
optical element
driving mechanism
axis
optical
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007040005A
Other languages
English (en)
Japanese (ja)
Other versions
JP5171061B2 (ja
JP2008203563A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007040005A priority Critical patent/JP5171061B2/ja
Priority claimed from JP2007040005A external-priority patent/JP5171061B2/ja
Priority to TW097103736A priority patent/TWI363190B/zh
Priority to US12/029,539 priority patent/US7859773B2/en
Priority to KR1020080015170A priority patent/KR100942617B1/ko
Publication of JP2008203563A publication Critical patent/JP2008203563A/ja
Publication of JP2008203563A5 publication Critical patent/JP2008203563A5/ja
Application granted granted Critical
Publication of JP5171061B2 publication Critical patent/JP5171061B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007040005A 2007-02-20 2007-02-20 駆動機構 Expired - Fee Related JP5171061B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007040005A JP5171061B2 (ja) 2007-02-20 2007-02-20 駆動機構
TW097103736A TWI363190B (en) 2007-02-20 2008-01-31 Driving mechanism and optical element driving apparatus
US12/029,539 US7859773B2 (en) 2007-02-20 2008-02-12 Driving mechanism and optical element driving apparatus
KR1020080015170A KR100942617B1 (ko) 2007-02-20 2008-02-20 구동기구 및 광학요소구동장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007040005A JP5171061B2 (ja) 2007-02-20 2007-02-20 駆動機構

Publications (3)

Publication Number Publication Date
JP2008203563A JP2008203563A (ja) 2008-09-04
JP2008203563A5 true JP2008203563A5 (enExample) 2010-04-08
JP5171061B2 JP5171061B2 (ja) 2013-03-27

Family

ID=39715577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007040005A Expired - Fee Related JP5171061B2 (ja) 2007-02-20 2007-02-20 駆動機構

Country Status (4)

Country Link
US (1) US7859773B2 (enExample)
JP (1) JP5171061B2 (enExample)
KR (1) KR100942617B1 (enExample)
TW (1) TWI363190B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010051056A (ja) * 2008-08-19 2010-03-04 Fujinon Corp 駆動装置及び光学装置
JP2010135492A (ja) * 2008-12-03 2010-06-17 Canon Inc 露光装置およびデバイス製造方法
EP2379277A1 (en) 2008-12-19 2011-10-26 Etp Transmission Ab Setting device, setting system, tool holding system and method for setting an axial position of a component
US8226009B2 (en) * 2009-04-29 2012-07-24 Hand Held Products, Inc. Laser scanner with improved decoding
US8305691B2 (en) 2009-04-29 2012-11-06 Hand Held Products, Inc. Fluid lens element for use in changing thermal operating environment
US8282004B2 (en) * 2009-04-29 2012-10-09 Hand Held Products, Inc. Focusing apparatus and terminal comprising variable focus lens assembly
US8038066B2 (en) * 2009-04-29 2011-10-18 Hand Held Products, Inc. Laser scanner with deformable lens
TWI413850B (zh) * 2010-06-08 2013-11-01 Asia Optical Co Inc 夾爪模組
CN102375345B (zh) * 2010-08-18 2013-09-11 上海微电子装备有限公司 可动光学元件调节驱动装置
CN105403154B (zh) * 2015-12-21 2018-04-06 中国科学院长春光学精密机械与物理研究所 可实现光学元件主动面形控制的支撑装置
CN106526833B (zh) * 2016-12-29 2019-02-19 大族激光科技产业集团股份有限公司 无应力压电驱动激光振镜系统
CN108646372A (zh) * 2018-03-28 2018-10-12 中国科学院光电技术研究所 一种单点驱动的轴向调节机构
TWI697704B (zh) * 2019-12-27 2020-07-01 致能機電工業股份有限公司 薄型位移驅動裝置
TWI711874B (zh) * 2019-12-30 2020-12-01 中強光電股份有限公司 調整裝置及包括調整裝置的投影機
DE102023208047A1 (de) * 2023-08-23 2025-02-27 Carl Zeiss Smt Gmbh Optisches System für die Mikrolithographie und Sensoradapter

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5383168A (en) * 1993-04-01 1995-01-17 Eastman Kodak Company Actively athermalized optical head assembly
US5724122A (en) * 1995-05-24 1998-03-03 Svg Lithography Systems, Inc. Illumination system having spatially separate vertical and horizontal image planes for use in photolithography
JP2000039546A (ja) * 1998-05-21 2000-02-08 Toshiba Corp 位置調整装置及び位置調整方法
US5986827A (en) * 1998-06-17 1999-11-16 The Regents Of The University Of California Precision tip-tilt-piston actuator that provides exact constraint
JP2000171845A (ja) * 1998-12-02 2000-06-23 Mitsubishi Electric Corp 撮像装置
DE19859634A1 (de) 1998-12-23 2000-06-29 Zeiss Carl Fa Optisches System, insbesondere Projektionsbelichtungsanlage der Mikrolithographie
JP4945845B2 (ja) * 2000-03-31 2012-06-06 株式会社ニコン 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法。
JP2004281644A (ja) * 2003-03-14 2004-10-07 Canon Inc 駆動機構及びそれを用いた露光装置、デバイスの製造方法
US7697222B2 (en) * 2003-12-25 2010-04-13 Nikon Corporation Apparatus for holding optical element, barrel, exposure apparatus, and device producing method
WO2005101131A1 (en) * 2004-04-14 2005-10-27 Carl Zeiss Smt Ag Support device for positioning an optical element
JP2006113414A (ja) * 2004-10-18 2006-04-27 Canon Inc 光学素子保持装置、鏡筒、露光装置及びマイクロデバイスの製造方法
JP4582306B2 (ja) * 2004-11-30 2010-11-17 株式会社ニコン 光学系及び露光装置
JP4994598B2 (ja) * 2005-03-18 2012-08-08 キヤノン株式会社 駆動装置
KR101266566B1 (ko) * 2005-05-02 2013-05-22 가부시키가이샤 니콘 광학 요소 구동장치, 투영 광학계, 노광 장치, 및디바이스의 제조 방법

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