KR100942617B1 - 구동기구 및 광학요소구동장치 - Google Patents

구동기구 및 광학요소구동장치 Download PDF

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Publication number
KR100942617B1
KR100942617B1 KR1020080015170A KR20080015170A KR100942617B1 KR 100942617 B1 KR100942617 B1 KR 100942617B1 KR 1020080015170 A KR1020080015170 A KR 1020080015170A KR 20080015170 A KR20080015170 A KR 20080015170A KR 100942617 B1 KR100942617 B1 KR 100942617B1
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KR
South Korea
Prior art keywords
drive mechanism
optical element
actuator
displacement
barrel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020080015170A
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English (en)
Korean (ko)
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KR20080077578A (ko
Inventor
마코토 미즈노
이치로 오누키
Original Assignee
캐논 가부시끼가이샤
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Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20080077578A publication Critical patent/KR20080077578A/ko
Application granted granted Critical
Publication of KR100942617B1 publication Critical patent/KR100942617B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/005—Motorised alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Lens Barrels (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020080015170A 2007-02-20 2008-02-20 구동기구 및 광학요소구동장치 Expired - Fee Related KR100942617B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00040005 2007-02-20
JP2007040005A JP5171061B2 (ja) 2007-02-20 2007-02-20 駆動機構

Publications (2)

Publication Number Publication Date
KR20080077578A KR20080077578A (ko) 2008-08-25
KR100942617B1 true KR100942617B1 (ko) 2010-02-17

Family

ID=39715577

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080015170A Expired - Fee Related KR100942617B1 (ko) 2007-02-20 2008-02-20 구동기구 및 광학요소구동장치

Country Status (4)

Country Link
US (1) US7859773B2 (enExample)
JP (1) JP5171061B2 (enExample)
KR (1) KR100942617B1 (enExample)
TW (1) TWI363190B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010051056A (ja) * 2008-08-19 2010-03-04 Fujinon Corp 駆動装置及び光学装置
JP2010135492A (ja) * 2008-12-03 2010-06-17 Canon Inc 露光装置およびデバイス製造方法
PT2676767E (pt) * 2008-12-19 2015-11-13 Etp Transmission Ab Sistema de retenção de ferramenta e método para regular uma posição axial de uma ferramenta ou parte de ferramenta
US8038066B2 (en) * 2009-04-29 2011-10-18 Hand Held Products, Inc. Laser scanner with deformable lens
US8226009B2 (en) * 2009-04-29 2012-07-24 Hand Held Products, Inc. Laser scanner with improved decoding
US8305691B2 (en) 2009-04-29 2012-11-06 Hand Held Products, Inc. Fluid lens element for use in changing thermal operating environment
US8282004B2 (en) * 2009-04-29 2012-10-09 Hand Held Products, Inc. Focusing apparatus and terminal comprising variable focus lens assembly
TWI413850B (zh) * 2010-06-08 2013-11-01 Asia Optical Co Inc 夾爪模組
CN102375345B (zh) * 2010-08-18 2013-09-11 上海微电子装备有限公司 可动光学元件调节驱动装置
CN105403154B (zh) * 2015-12-21 2018-04-06 中国科学院长春光学精密机械与物理研究所 可实现光学元件主动面形控制的支撑装置
CN106526833B (zh) * 2016-12-29 2019-02-19 大族激光科技产业集团股份有限公司 无应力压电驱动激光振镜系统
CN108646372A (zh) * 2018-03-28 2018-10-12 中国科学院光电技术研究所 一种单点驱动的轴向调节机构
TWI697704B (zh) * 2019-12-27 2020-07-01 致能機電工業股份有限公司 薄型位移驅動裝置
TWI711874B (zh) * 2019-12-30 2020-12-01 中強光電股份有限公司 調整裝置及包括調整裝置的投影機
DE102023208047A1 (de) * 2023-08-23 2025-02-27 Carl Zeiss Smt Gmbh Optisches System für die Mikrolithographie und Sensoradapter

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001343575A (ja) * 2000-03-31 2001-12-14 Nikon Corp 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法。
KR20060054053A (ko) * 2004-10-18 2006-05-22 캐논 가부시끼가이샤 광학 소자 유지 장치, 경통, 노광 장치 및 디바이스의 제조방법
WO2006120927A1 (ja) * 2005-05-02 2006-11-16 Nikon Corporation 光学要素駆動装置、投影光学系、露光装置、及びデバイスの製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5383168A (en) * 1993-04-01 1995-01-17 Eastman Kodak Company Actively athermalized optical head assembly
US5724122A (en) * 1995-05-24 1998-03-03 Svg Lithography Systems, Inc. Illumination system having spatially separate vertical and horizontal image planes for use in photolithography
JP2000039546A (ja) * 1998-05-21 2000-02-08 Toshiba Corp 位置調整装置及び位置調整方法
US5986827A (en) * 1998-06-17 1999-11-16 The Regents Of The University Of California Precision tip-tilt-piston actuator that provides exact constraint
JP2000171845A (ja) * 1998-12-02 2000-06-23 Mitsubishi Electric Corp 撮像装置
DE19859634A1 (de) 1998-12-23 2000-06-29 Zeiss Carl Fa Optisches System, insbesondere Projektionsbelichtungsanlage der Mikrolithographie
JP2004281644A (ja) * 2003-03-14 2004-10-07 Canon Inc 駆動機構及びそれを用いた露光装置、デバイスの製造方法
JP4654915B2 (ja) * 2003-12-25 2011-03-23 株式会社ニコン 光学素子の保持装置、鏡筒、露光装置、及びデバイスの製造方法
WO2005101131A1 (en) * 2004-04-14 2005-10-27 Carl Zeiss Smt Ag Support device for positioning an optical element
JP4582306B2 (ja) * 2004-11-30 2010-11-17 株式会社ニコン 光学系及び露光装置
JP4994598B2 (ja) * 2005-03-18 2012-08-08 キヤノン株式会社 駆動装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001343575A (ja) * 2000-03-31 2001-12-14 Nikon Corp 光学素子保持装置、鏡筒及び露光装置並びにマイクロデバイスの製造方法。
KR20060054053A (ko) * 2004-10-18 2006-05-22 캐논 가부시끼가이샤 광학 소자 유지 장치, 경통, 노광 장치 및 디바이스의 제조방법
WO2006120927A1 (ja) * 2005-05-02 2006-11-16 Nikon Corporation 光学要素駆動装置、投影光学系、露光装置、及びデバイスの製造方法

Also Published As

Publication number Publication date
JP2008203563A (ja) 2008-09-04
TWI363190B (en) 2012-05-01
US7859773B2 (en) 2010-12-28
TW200841041A (en) 2008-10-16
US20080204905A1 (en) 2008-08-28
KR20080077578A (ko) 2008-08-25
JP5171061B2 (ja) 2013-03-27

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