JP2014503121A5 - - Google Patents

Download PDF

Info

Publication number
JP2014503121A5
JP2014503121A5 JP2013548532A JP2013548532A JP2014503121A5 JP 2014503121 A5 JP2014503121 A5 JP 2014503121A5 JP 2013548532 A JP2013548532 A JP 2013548532A JP 2013548532 A JP2013548532 A JP 2013548532A JP 2014503121 A5 JP2014503121 A5 JP 2014503121A5
Authority
JP
Japan
Prior art keywords
grip
grip member
movement
gripper
effector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2013548532A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014503121A (ja
Filing date
Publication date
Priority claimed from US13/343,506 external-priority patent/US8702142B2/en
Application filed filed Critical
Publication of JP2014503121A publication Critical patent/JP2014503121A/ja
Publication of JP2014503121A5 publication Critical patent/JP2014503121A5/ja
Ceased legal-status Critical Current

Links

Images

JP2013548532A 2011-01-05 2012-01-05 基板操作装置及び方法 Ceased JP2014503121A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161430029P 2011-01-05 2011-01-05
US61/430,029 2011-01-05
US13/343,506 2012-01-04
US13/343,506 US8702142B2 (en) 2011-01-05 2012-01-04 Apparatus and method for handling a substrate
PCT/US2012/020293 WO2012094470A2 (en) 2011-01-05 2012-01-05 Apparatus and method for handling a substrate

Publications (2)

Publication Number Publication Date
JP2014503121A JP2014503121A (ja) 2014-02-06
JP2014503121A5 true JP2014503121A5 (enExample) 2015-02-12

Family

ID=46380100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013548532A Ceased JP2014503121A (ja) 2011-01-05 2012-01-05 基板操作装置及び方法

Country Status (6)

Country Link
US (1) US8702142B2 (enExample)
JP (1) JP2014503121A (enExample)
KR (1) KR20140039137A (enExample)
CN (1) CN103380493B (enExample)
TW (1) TWI546888B (enExample)
WO (1) WO2012094470A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9859141B2 (en) 2010-04-15 2018-01-02 Suss Microtec Lithography Gmbh Apparatus and method for aligning and centering wafers
US9837295B2 (en) 2010-04-15 2017-12-05 Suss Microtec Lithography Gmbh Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing
DE112012006186B4 (de) * 2012-04-06 2020-12-24 Fuji Seiko Co., Ltd. Greifvorrichtung für Wulstring
JP6013824B2 (ja) * 2012-07-27 2016-10-25 株式会社荏原製作所 ワーク搬送装置
CN104108605B (zh) * 2014-07-08 2016-08-17 深圳市华星光电技术有限公司 一种玻璃基板的取放装置
JP6534210B2 (ja) * 2015-10-14 2019-06-26 ローツェ株式会社 テープフレーム搬送のためのエンドエフェクタ、及びこれを備える搬送ロボット
KR102020294B1 (ko) * 2017-09-15 2019-09-11 (주)상아프론테크 슬롯 구조체 및 이를 포함하는 웨이퍼 보관 용기
SE544090C2 (en) * 2018-04-22 2021-12-21 Zenrobotics Oy Waste Sorting Gantry Robot
EP3657537A1 (en) * 2018-11-23 2020-05-27 ATOTECH Deutschland GmbH End effector for slab formed substrates
CN211208421U (zh) * 2020-03-05 2020-08-07 福建北电新材料科技有限公司 一种可拆卸蚀刻多片碳化硅蚀刻工装治具

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6357190A (ja) * 1986-08-29 1988-03-11 キヤノン株式会社 物体移動用関節ア−ム装置
KR900006017B1 (ko) * 1987-12-18 1990-08-20 한국전기통신공사 가변직경형 웨이퍼운송장치
US5230599A (en) * 1991-09-27 1993-07-27 Orr Bobby J Trailer chassis handling apparatus
JP3173918B2 (ja) * 1993-05-18 2001-06-04 キヤノン株式会社 基板搬送ハンドおよびこれを備えた基板搬送装置
JPH0722502A (ja) 1993-06-30 1995-01-24 Hitachi Ltd 半導体ウエハのハンドリング装置
CH697146A5 (de) * 1996-10-09 2008-05-15 Tec Sem Ag Greifvorrichtung zur Handhabung von Wafern.
US6109677A (en) 1998-05-28 2000-08-29 Sez North America, Inc. Apparatus for handling and transporting plate like substrates
US6167322A (en) * 1998-07-10 2000-12-26 Holbrooks; Orville Ray Intelligent wafer handling system and method
US6540468B1 (en) * 1998-09-02 2003-04-01 Tec-Sem Ag Device and method for handling individual wafers
JP2002170862A (ja) 2000-12-01 2002-06-14 Yaskawa Electric Corp ウェハー把持装置
JP4190161B2 (ja) * 2001-05-08 2008-12-03 株式会社新川 ウェーハリングの供給返送装置
US20040102858A1 (en) 2001-09-04 2004-05-27 Boris Kesil Soft-touch gripping mechanism for flat objects
US7140655B2 (en) 2001-09-04 2006-11-28 Multimetrixs Llc Precision soft-touch gripping mechanism for flat objects
DE10259836A1 (de) * 2002-12-19 2004-07-15 Siemens Ag Greifer und Betriebsverfahren
US7300082B2 (en) 2003-07-21 2007-11-27 Asyst Technologies, Inc. Active edge gripping and effector
JP3944485B2 (ja) * 2004-01-19 2007-07-11 島田理化工業株式会社 基板チャッキング装置
JP4230973B2 (ja) * 2004-08-23 2009-02-25 株式会社東芝 基板搬送装置
US20060157998A1 (en) 2005-01-18 2006-07-20 Elik Gershenzon Contamination-free edge gripping mechanism and method for loading/unloading and transferring flat objects
US7318612B2 (en) * 2005-05-27 2008-01-15 Delbridge Wallace K Gravity actuated retrieval device
US20070018469A1 (en) 2005-07-25 2007-01-25 Multimetrixs, Llc Contamination-free edge gripping mechanism with withdrawable pads and method for loading/unloading and transferring flat objects
JP2007157996A (ja) * 2005-12-05 2007-06-21 Tokyo Seimitsu Co Ltd ワーク搬送装置及びワーク搬送方法
US20080213076A1 (en) 2007-03-02 2008-09-04 Stephen Hanson Edge grip end effector
JP4883017B2 (ja) 2008-01-24 2012-02-22 株式会社安川電機 基板把持装置およびそれを備えた基板搬送ロボット、半導体製造装置
JP5551878B2 (ja) * 2009-01-16 2014-07-16 リンテック株式会社 半導体ウエハの搬送装置
US8485413B2 (en) 2009-02-05 2013-07-16 Ethicon Endo-Surgery, Inc. Surgical stapling instrument comprising an articulation joint

Similar Documents

Publication Publication Date Title
JP2014503121A5 (enExample)
JP2015502650A5 (enExample)
JP2005521869A5 (enExample)
JP2014503121A (ja) 基板操作装置及び方法
EP2977176A1 (en) Linkage mechanism between uniaxial die opening and closing and bottom die positioning
RU2017119448A (ru) Зажимной захват для крепления к направляющему рельсу операционного стола
JP2010502989A5 (enExample)
JP2013213581A5 (enExample)
WO2015029540A1 (ja) 工作機械
CN105339288A (zh) 用于拾取并定位部件的操纵器
JP2011005628A5 (enExample)
JP2009248194A (ja) 電動グリッパ装置
JP6745877B2 (ja) 扉開閉装置及びそれを備えた冷蔵庫
JP2017515627A5 (enExample)
JP2015143141A5 (enExample)
US9360060B2 (en) Ratchet wrench with a direction switching device
EP2977180A1 (en) Link mechanism for opening and closing die and positioning bottom die by single shaft
KR20130115790A (ko) 그리퍼
JP6643880B2 (ja) ワーク把持装置
JP2014039988A (ja) ロボットハンド
JP2019058456A5 (enExample)
JP5447056B2 (ja) ロボット
JP2012206215A (ja) グリッパ
JP2012008692A (ja) 位置決め機構
JP6829542B2 (ja) ワーク移送装置