JP2014230426A - 発電装置 - Google Patents
発電装置 Download PDFInfo
- Publication number
- JP2014230426A JP2014230426A JP2013109370A JP2013109370A JP2014230426A JP 2014230426 A JP2014230426 A JP 2014230426A JP 2013109370 A JP2013109370 A JP 2013109370A JP 2013109370 A JP2013109370 A JP 2013109370A JP 2014230426 A JP2014230426 A JP 2014230426A
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- power generation
- generation device
- flow path
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010248 power generation Methods 0.000 claims abstract description 164
- 238000006243 chemical reaction Methods 0.000 claims description 66
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 239000012530 fluid Substances 0.000 abstract description 31
- 230000005284 excitation Effects 0.000 abstract description 14
- 239000010410 layer Substances 0.000 description 59
- 239000000758 substrate Substances 0.000 description 50
- 239000010408 film Substances 0.000 description 44
- 238000000034 method Methods 0.000 description 44
- 230000004048 modification Effects 0.000 description 34
- 238000012986 modification Methods 0.000 description 34
- 239000000463 material Substances 0.000 description 20
- 238000000059 patterning Methods 0.000 description 18
- 238000004519 manufacturing process Methods 0.000 description 17
- 238000005530 etching Methods 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 229910052814 silicon oxide Inorganic materials 0.000 description 11
- 230000008569 process Effects 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000001459 lithography Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 239000000395 magnesium oxide Substances 0.000 description 4
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910052741 iridium Inorganic materials 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910004121 SrRuO Inorganic materials 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000011151 fibre-reinforced plastic Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920000307 polymer substrate Polymers 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 241000877463 Lanio Species 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/185—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators using fluid streams
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/304—Beam type
- H10N30/306—Cantilevers
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013109370A JP2014230426A (ja) | 2013-05-23 | 2013-05-23 | 発電装置 |
| PCT/JP2014/002019 WO2014188649A1 (fr) | 2013-05-23 | 2014-04-09 | Appareil générateur d'énergie |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013109370A JP2014230426A (ja) | 2013-05-23 | 2013-05-23 | 発電装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2014230426A true JP2014230426A (ja) | 2014-12-08 |
Family
ID=51933222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013109370A Pending JP2014230426A (ja) | 2013-05-23 | 2013-05-23 | 発電装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2014230426A (fr) |
| WO (1) | WO2014188649A1 (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101748222B1 (ko) * | 2016-05-02 | 2017-06-16 | 연세대학교 산학협력단 | 바람 에너지 하베스터 |
| CN108111058A (zh) * | 2018-01-08 | 2018-06-01 | 河海大学 | 一种改进型压电悬臂梁涡激振动发电装置 |
| JP2019169612A (ja) * | 2018-03-23 | 2019-10-03 | 国立大学法人東北大学 | 圧電体薄膜、圧電素子および圧電発電装置 |
| US11751478B2 (en) | 2017-10-12 | 2023-09-05 | Fujifilm Corporation | Method of manufacturing power generation element, power generation element, and power generation apparatus |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106329995B (zh) * | 2016-09-14 | 2018-03-30 | 长春工业大学 | 用于物联网节点供能的环隙射流激励的拨动式压电俘能器 |
| CN106329994B (zh) * | 2016-09-14 | 2018-03-06 | 长春工业大学 | 环形微孔增流式菱形压电俘能装置 |
| CN106230314B (zh) * | 2016-09-14 | 2017-12-29 | 长春工业大学 | 用于物联网节点供能的转动拨动式压电发电装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07103996A (ja) * | 1993-10-06 | 1995-04-21 | Oki Electric Ind Co Ltd | ガスフローセンサ及びその形成方法 |
| US7241420B2 (en) * | 2002-08-05 | 2007-07-10 | Palo Alto Research Center Incorporated | Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal |
| JP5649913B2 (ja) * | 2010-11-02 | 2015-01-07 | オイレス工業株式会社 | 発電装置 |
-
2013
- 2013-05-23 JP JP2013109370A patent/JP2014230426A/ja active Pending
-
2014
- 2014-04-09 WO PCT/JP2014/002019 patent/WO2014188649A1/fr active Application Filing
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101748222B1 (ko) * | 2016-05-02 | 2017-06-16 | 연세대학교 산학협력단 | 바람 에너지 하베스터 |
| US11751478B2 (en) | 2017-10-12 | 2023-09-05 | Fujifilm Corporation | Method of manufacturing power generation element, power generation element, and power generation apparatus |
| CN108111058A (zh) * | 2018-01-08 | 2018-06-01 | 河海大学 | 一种改进型压电悬臂梁涡激振动发电装置 |
| CN108111058B (zh) * | 2018-01-08 | 2019-04-16 | 河海大学 | 一种改进型压电悬臂梁涡激振动发电装置 |
| JP2019169612A (ja) * | 2018-03-23 | 2019-10-03 | 国立大学法人東北大学 | 圧電体薄膜、圧電素子および圧電発電装置 |
| JP6994247B2 (ja) | 2018-03-23 | 2022-02-04 | 国立大学法人東北大学 | 圧電体薄膜、圧電素子および圧電発電装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014188649A1 (fr) | 2014-11-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2014188649A1 (fr) | Appareil générateur d'énergie | |
| US8120178B2 (en) | Tuning fork vibration device and method for manufacturing the same | |
| JPWO2016175013A1 (ja) | 圧電デバイス、圧電トランスおよび圧電デバイスの製造方法 | |
| JP5609244B2 (ja) | 振動発電デバイス | |
| JP4767369B1 (ja) | 圧電発電素子および圧電発電素子を用いた発電方法 | |
| JP2016086599A (ja) | 発電装置 | |
| US20120240672A1 (en) | Miniaturized energy generation system | |
| JP2008153944A (ja) | 圧電振動子およびその製造方法、並びに、ｍｅｍｓデバイスおよびその製造方法 | |
| TW201436447A (zh) | 壓電轉換裝置及使用該壓電轉換裝置的流量感測器 | |
| JP2015019434A (ja) | 発電デバイス | |
| WO2013186965A1 (fr) | Appareil de génération de puissance et module de génération de puissance | |
| TW201406039A (zh) | 發電模組及利用此發電模組之空調管理系統 | |
| JP5627279B2 (ja) | 振動発電デバイスおよびその製造方法 | |
| US20230013976A1 (en) | Movable piezo element and method for producing a movable piezo element | |
| TW201405103A (zh) | 流量感測器及利用此感測器之空調管理系統 | |
| JP2013135596A (ja) | 振動発電素子 | |
| WO2015136864A1 (fr) | Appareil de génération d'énergie électrique | |
| JP2014007798A (ja) | 振動発電装置 | |
| JP2015220921A (ja) | 発電装置 | |
| JPWO2018012443A1 (ja) | 圧電トランス | |
| JP2016058534A (ja) | 発電装置 | |
| JP2013039016A (ja) | エネルギー転換モジュール | |
| JP2015161229A (ja) | 発電装置 | |
| Yeh et al. | Recent progress on micro-piezoelectric energy harvesters fabricated with aerosol deposition method and the interfacing circuits | |
| JP2014171838A (ja) | 排熱靴 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20141006 |