JP2014225517A - 研磨用組成物 - Google Patents
研磨用組成物 Download PDFInfo
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- JP2014225517A JP2014225517A JP2013103244A JP2013103244A JP2014225517A JP 2014225517 A JP2014225517 A JP 2014225517A JP 2013103244 A JP2013103244 A JP 2013103244A JP 2013103244 A JP2013103244 A JP 2013103244A JP 2014225517 A JP2014225517 A JP 2014225517A
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- Prior art keywords
- acid
- polishing
- compound
- phase change
- polishing composition
- Prior art date
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- PZDOWFGHCNHPQD-VNNZMYODSA-N sophorose Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@H](C=O)O[C@@H]1O[C@H](CO)[C@@H](O)[C@H](O)[C@H]1O PZDOWFGHCNHPQD-VNNZMYODSA-N 0.000 description 1
- 229940032147 starch Drugs 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 150000005846 sugar alcohols Chemical class 0.000 description 1
- 150000008163 sugars Chemical class 0.000 description 1
- OKQKDCXVLPGWPO-UHFFFAOYSA-N sulfanylidenephosphane Chemical compound S=P OKQKDCXVLPGWPO-UHFFFAOYSA-N 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- MDDUHVRJJAFRAU-YZNNVMRBSA-N tert-butyl-[(1r,3s,5z)-3-[tert-butyl(dimethyl)silyl]oxy-5-(2-diphenylphosphorylethylidene)-4-methylidenecyclohexyl]oxy-dimethylsilane Chemical compound C1[C@@H](O[Si](C)(C)C(C)(C)C)C[C@H](O[Si](C)(C)C(C)(C)C)C(=C)\C1=C/CP(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 MDDUHVRJJAFRAU-YZNNVMRBSA-N 0.000 description 1
- YBRBMKDOPFTVDT-UHFFFAOYSA-N tert-butylamine Chemical compound CC(C)(C)N YBRBMKDOPFTVDT-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 229960002898 threonine Drugs 0.000 description 1
- 229940034208 thyroxine Drugs 0.000 description 1
- XUIIKFGFIJCVMT-UHFFFAOYSA-N thyroxine-binding globulin Natural products IC1=CC(CC([NH3+])C([O-])=O)=CC(I)=C1OC1=CC(I)=C(O)C(I)=C1 XUIIKFGFIJCVMT-UHFFFAOYSA-N 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- 229960004799 tryptophan Drugs 0.000 description 1
- CMPGARWFYBADJI-UHFFFAOYSA-L tungstic acid Chemical compound O[W](O)(=O)=O CMPGARWFYBADJI-UHFFFAOYSA-L 0.000 description 1
- OUYCCCASQSFEME-UHFFFAOYSA-N tyrosine Natural products OC(=O)C(N)CC1=CC=C(O)C=C1 OUYCCCASQSFEME-UHFFFAOYSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 150000004798 β-ketoamides Chemical class 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Abstract
Description
本発明の研磨用組成物は、相変化化合物を含む研磨対象物を研磨する用途で使用される。相変化化合物は、PRAM(相変化ランダムアクセスメモリ)デバイス(オボニックメモリデバイスまたはPCRAMデバイスとしても知られている)において、電子記憶用途のための絶縁性非晶質相と導電性結晶性相とを電気的に切り換えることができる材料として利用されるものである。このような用途に適した相変化化合物としては、長周期型周期表の第16族元素(カルコゲニド、例えば、テルル(Te)またはポロニウム(Po))、および第15族元素(例えば、アンチモン(Sb))と、インジウム(In)、ゲルマニウム(Ge)、ガリウム(Ga)、スズ(Sn)、および銀(Ag)などの1種または複数種の金属元素との組合せが利用される。特に有用な相変化化合物は、ゲルマニウム(Ge)−アンチモン(Sb)−テルル(Te)合金(GST合金)である。
本発明に係る研磨用組成物は、3個以上のヒドロキシ基を有する有機化合物(以下、単に有機化合物とも称する)を含む。該有機化合物は、相変化化合物の表面に形成されるヒドロキシ基と脱水縮合することにより結合し、相変化化合物の表面の研磨性を向上させる。
本発明の研磨用組成物は、相変化化合物に含まれる少なくとも1つの成分に対してキレート作用を有する剤および脆性膜形成剤の少なくとも一方を含む。これらの剤は、相変化化合物の表面に作用することにより、研磨速度をより高める働きをする。
本発明の研磨用組成物には、相変化化合物に含まれる少なくとも1つの成分に対してキレート作用を有する剤を含有させることができる。当該キレート作用を有する剤は、相変化化合物表面と錯形成して、水溶性錯体を形成することにより、相変化化合物の表面を化学的にエッチングする作用を有し、研磨用組成物による研磨速度を向上させる働きをする。
本発明の研磨用組成物に含まれうる脆性膜形成剤は、相変化化合物表面と化学結合して不溶性の脆性膜を形成する。当該脆性膜とは、相変化化合物と脆性膜形成剤とが化学結合することによって生成する不溶性の膜を指し、相変化化合物自体よりも脆くなった膜のことである。ここでいう化学結合とは、共有結合、イオン結合、水素結合、分子間力による結合等である。その脆性膜を砥粒で機械的に研磨することで、高い研磨速度が得られる。脆性膜形成剤の例としては、飽和モノカルボン酸、リン酸化合物、アミン、アンモニウム化合物等が挙げられる。
本発明に係る研磨用組成物は、酸化剤を含む。研磨用組成物中に含まれる酸化剤は、相変化化合物の表面を酸化する作用を有し、研磨速度を向上させる。
本発明の研磨用組成物は、必要に応じてさらに、水、砥粒、金属防食剤、研磨促進剤、界面活性剤、オキソ酸、防腐剤、防カビ剤、還元剤、水溶性高分子、難溶性の有機物を溶解するための有機溶媒等の他の成分をさらに含んでもよい。以下、好ましい他の成分である水、砥粒、金属防食剤、界面活性剤、防腐剤、および防カビ剤について説明する。
本発明の研磨用組成物は、砥粒を分散または溶解するための分散媒または溶媒として水を含むことが好ましい。他の成分の作用を阻害することを抑制するという観点から、不純物をできる限り含有しない水が好ましく、具体的には、イオン交換樹脂にて不純物イオンを除去した後、フィルタを通して異物を除去した純水や超純水、または蒸留水が好ましい。
本発明の研磨用組成物は、砥粒を含有してもよい。砥粒は、無機粒子、有機粒子、および有機無機複合粒子のいずれであってもよい。無機粒子の具体例としては、例えば、シリカ、アルミナ、セリア、チタニアなどの金属酸化物からなる粒子、ならびに窒化ケイ素粒子、炭化ケイ素粒子及び窒化ホウ素粒子が挙げられる。有機粒子の具体例としては、例えばポリメタクリル酸メチル(PMMA)粒子が挙げられる。これらの中でもシリカ粒子が好ましく、特に好ましいのはコロイダルシリカである。
本発明に係る研磨用組成物は、金属防食剤を含むことができる。研磨用組成物中に金属防食剤を加えることにより、研磨用組成物を用いて研磨した後の相変化化合物にディッシング等の表面欠陥がより生じにくくなる。また、その金属防食剤は、酸化剤による相変化化合物表面の酸化を緩和するとともに、酸化剤による相変化化合物表面の金属の酸化により生じる金属イオンと反応して不溶性の錯体を生成する働きをする。その結果、キレート作用を有する剤による相変化化合物へのエッチングを抑制することができ、過度な研磨を抑制することができる。
本発明に係る研磨用組成物は、界面活性剤を含むことができる。研磨用組成物中に界面活性剤を加えることにより、研磨した後の相変化化合物のディッシングをより抑制することができる。
本発明に係る研磨用組成物は、オキソ酸を含むことができる。
本発明で用いられる防腐剤および防カビ剤としては、例えば、2−メチル−4−イソチアゾリン−3−オンや5−クロロ−2−メチル−4−イソチアゾリン−3−オン等のイソチアゾリン系防腐剤、パラオキシ安息香酸エステル類、及びフェノキシエタノール等が挙げられる。これら防腐剤および防カビ剤は、単独でもまたは2種以上組み合わせて用いてもよい。
本発明の研磨用組成物のpHの下限は、特に制限されないが、1以上であることが好ましく、2以上であることがより好ましい。研磨用組成物のpHが大きくなるにつれて、取扱い性がより向上する。
本発明の研磨用組成物の製造方法は、特に制限されず、例えば、有機化合物、キレート作用を有する剤、脆性膜形成剤、酸化剤、および必要に応じて他の成分を、水中で攪拌混合することにより得ることができる。
上述のように、本発明の研磨用組成物は、上記で説明した相変化化合物を有する研磨対象物の研磨に好適に用いられる。よって、本発明は、相変化化合物を有する研磨対象物を本発明の研磨用組成物を用いて研磨する研磨方法を提供する。また、本発明は、相変化化合物を有する研磨対象物を前記研磨方法で研磨する工程を含む、基板の製造方法を提供する。
Claims (5)
- 3個以上のヒドロキシ基を有する有機化合物と、
相変化化合物の少なくとも1つの成分に対してキレート作用を有する剤および脆性膜形成剤の少なくとも一方と、
酸化剤と、
を含む、研磨用組成物。 - 相変化化合物を含む層を有する研磨対象物を研磨する用途で使用される、請求項1に記載の研磨用組成物。
- 前記相変化化合物がゲルマニウム(Ge)−アンチモン(Sb)−テルル(Te)合金である、請求項1または2に記載の研磨用組成物。
- 請求項1〜3のいずれか1項に記載の研磨用組成物を用いて、相変化化合物を含む研磨対象物の表面を研磨する、研磨方法。
- 請求項4に記載の研磨方法で研磨する工程を含む、相変化化合物を含む基板の製造方法。
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KR1020157032065A KR102234104B1 (ko) | 2013-05-15 | 2014-05-01 | 연마용 조성물 |
PCT/JP2014/062099 WO2014185285A1 (ja) | 2013-05-15 | 2014-05-01 | 研磨用組成物 |
TW103116371A TWI628248B (zh) | 2013-05-15 | 2014-05-08 | Grinding composition |
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Publication number | Publication date |
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JP6139975B2 (ja) | 2017-05-31 |
US20160108284A1 (en) | 2016-04-21 |
KR102234104B1 (ko) | 2021-04-01 |
WO2014185285A1 (ja) | 2014-11-20 |
TW201506100A (zh) | 2015-02-16 |
TWI628248B (zh) | 2018-07-01 |
KR20160010445A (ko) | 2016-01-27 |
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