JP2014197728A - 振動片の製造方法 - Google Patents

振動片の製造方法 Download PDF

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Publication number
JP2014197728A
JP2014197728A JP2013071571A JP2013071571A JP2014197728A JP 2014197728 A JP2014197728 A JP 2014197728A JP 2013071571 A JP2013071571 A JP 2013071571A JP 2013071571 A JP2013071571 A JP 2013071571A JP 2014197728 A JP2014197728 A JP 2014197728A
Authority
JP
Japan
Prior art keywords
axis
resonator element
mask
manufacturing
positive direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2013071571A
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English (en)
Japanese (ja)
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JP2014197728A5 (enExample
Inventor
明法 山田
Akinori Yamada
明法 山田
周平 吉田
Shuhei Yoshida
周平 吉田
良伊 小林
Yoshitada Kobayashi
良伊 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2013071571A priority Critical patent/JP2014197728A/ja
Publication of JP2014197728A publication Critical patent/JP2014197728A/ja
Publication of JP2014197728A5 publication Critical patent/JP2014197728A5/ja
Withdrawn legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2013071571A 2013-03-29 2013-03-29 振動片の製造方法 Withdrawn JP2014197728A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013071571A JP2014197728A (ja) 2013-03-29 2013-03-29 振動片の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013071571A JP2014197728A (ja) 2013-03-29 2013-03-29 振動片の製造方法

Publications (2)

Publication Number Publication Date
JP2014197728A true JP2014197728A (ja) 2014-10-16
JP2014197728A5 JP2014197728A5 (enExample) 2016-04-21

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ID=52358269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013071571A Withdrawn JP2014197728A (ja) 2013-03-29 2013-03-29 振動片の製造方法

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JP (1) JP2014197728A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022270543A1 (ja) * 2021-06-25 2022-12-29 株式会社大真空 圧電振動板および圧電振動デバイス

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5282193A (en) * 1975-12-29 1977-07-09 Seiko Epson Corp Manufacture of piezoelectric oscillator
JPS5760719A (en) * 1980-09-27 1982-04-12 Citizen Watch Co Ltd Tuning fork type quartz vibrator
WO2005125006A1 (ja) * 2004-06-21 2005-12-29 Citizen Watch Co., Ltd. 水晶デバイス及び水晶デバイスの製造方法
JP2006311088A (ja) * 2005-04-27 2006-11-09 Seiko Epson Corp 圧電振動片および圧電デバイス
JP2008098909A (ja) * 2006-10-11 2008-04-24 Epson Toyocom Corp 圧電振動片および圧電デバイス
JP2009201162A (ja) * 2009-06-10 2009-09-03 Seiko Epson Corp 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器
JP2011019213A (ja) * 2009-06-12 2011-01-27 Nippon Dempa Kogyo Co Ltd 水晶振動子の製造方法
JP2011223228A (ja) * 2010-04-08 2011-11-04 Seiko Epson Corp 振動片、振動子及び発振器

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5282193A (en) * 1975-12-29 1977-07-09 Seiko Epson Corp Manufacture of piezoelectric oscillator
JPS5760719A (en) * 1980-09-27 1982-04-12 Citizen Watch Co Ltd Tuning fork type quartz vibrator
WO2005125006A1 (ja) * 2004-06-21 2005-12-29 Citizen Watch Co., Ltd. 水晶デバイス及び水晶デバイスの製造方法
JP2006311088A (ja) * 2005-04-27 2006-11-09 Seiko Epson Corp 圧電振動片および圧電デバイス
JP2008098909A (ja) * 2006-10-11 2008-04-24 Epson Toyocom Corp 圧電振動片および圧電デバイス
JP2009201162A (ja) * 2009-06-10 2009-09-03 Seiko Epson Corp 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器
JP2011019213A (ja) * 2009-06-12 2011-01-27 Nippon Dempa Kogyo Co Ltd 水晶振動子の製造方法
JP2011223228A (ja) * 2010-04-08 2011-11-04 Seiko Epson Corp 振動片、振動子及び発振器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022270543A1 (ja) * 2021-06-25 2022-12-29 株式会社大真空 圧電振動板および圧電振動デバイス
JP7568099B2 (ja) 2021-06-25 2024-10-16 株式会社大真空 圧電振動板および圧電振動デバイス

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