JP2014197728A5 - - Google Patents

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Publication number
JP2014197728A5
JP2014197728A5 JP2013071571A JP2013071571A JP2014197728A5 JP 2014197728 A5 JP2014197728 A5 JP 2014197728A5 JP 2013071571 A JP2013071571 A JP 2013071571A JP 2013071571 A JP2013071571 A JP 2013071571A JP 2014197728 A5 JP2014197728 A5 JP 2014197728A5
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JP
Japan
Prior art keywords
axis
resonator element
outer edge
manufacturing
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2013071571A
Other languages
English (en)
Japanese (ja)
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JP2014197728A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013071571A priority Critical patent/JP2014197728A/ja
Priority claimed from JP2013071571A external-priority patent/JP2014197728A/ja
Publication of JP2014197728A publication Critical patent/JP2014197728A/ja
Publication of JP2014197728A5 publication Critical patent/JP2014197728A5/ja
Withdrawn legal-status Critical Current

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JP2013071571A 2013-03-29 2013-03-29 振動片の製造方法 Withdrawn JP2014197728A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013071571A JP2014197728A (ja) 2013-03-29 2013-03-29 振動片の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013071571A JP2014197728A (ja) 2013-03-29 2013-03-29 振動片の製造方法

Publications (2)

Publication Number Publication Date
JP2014197728A JP2014197728A (ja) 2014-10-16
JP2014197728A5 true JP2014197728A5 (enExample) 2016-04-21

Family

ID=52358269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013071571A Withdrawn JP2014197728A (ja) 2013-03-29 2013-03-29 振動片の製造方法

Country Status (1)

Country Link
JP (1) JP2014197728A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117378143A (zh) * 2021-06-25 2024-01-09 株式会社大真空 压电振动片及压电振动器件

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5282193A (en) * 1975-12-29 1977-07-09 Seiko Epson Corp Manufacture of piezoelectric oscillator
JPS5760719A (en) * 1980-09-27 1982-04-12 Citizen Watch Co Ltd Tuning fork type quartz vibrator
US20070247032A1 (en) * 2004-06-21 2007-10-25 Tomoo Ikeda Crystal Device and Method for Manufacturing Crystal Device
JP4415389B2 (ja) * 2005-04-27 2010-02-17 セイコーエプソン株式会社 圧電デバイス
JP5045054B2 (ja) * 2006-10-11 2012-10-10 セイコーエプソン株式会社 圧電デバイス
JP4609586B2 (ja) * 2009-06-10 2011-01-12 セイコーエプソン株式会社 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器
JP4908614B2 (ja) * 2009-06-12 2012-04-04 日本電波工業株式会社 水晶振動子の製造方法
JP2011223228A (ja) * 2010-04-08 2011-11-04 Seiko Epson Corp 振動片、振動子及び発振器

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