JP2014190958A - Icp発光分光分析装置 - Google Patents
Icp発光分光分析装置 Download PDFInfo
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- JP2014190958A JP2014190958A JP2013069440A JP2013069440A JP2014190958A JP 2014190958 A JP2014190958 A JP 2014190958A JP 2013069440 A JP2013069440 A JP 2013069440A JP 2013069440 A JP2013069440 A JP 2013069440A JP 2014190958 A JP2014190958 A JP 2014190958A
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- 239000013307 optical fiber Substances 0.000 claims abstract description 64
- 230000005540 biological transmission Effects 0.000 claims abstract description 11
- 238000009616 inductively coupled plasma Methods 0.000 claims description 45
- 238000004611 spectroscopical analysis Methods 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims 1
- 238000004458 analytical method Methods 0.000 abstract description 7
- 230000003287 optical effect Effects 0.000 abstract description 6
- 230000008878 coupling Effects 0.000 abstract 2
- 238000010168 coupling process Methods 0.000 abstract 2
- 238000005859 coupling reaction Methods 0.000 abstract 2
- 230000006698 induction Effects 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000011247 coating layer Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000006199 nebulizer Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000004445 quantitative analysis Methods 0.000 description 2
- 238000010183 spectrum analysis Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/024—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using means for illuminating a slit efficiently (e.g. entrance slit of a spectrometer or entrance face of fiber)
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/443—Emission spectrometry
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- General Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
【課題】光ファイバーを利用して原子発光線を分光器内に導き光学特性の優れたICP発光分光分析装置を提供する。
【解決手段】ICP分析装置1は、誘導結合プラズマ装置10と、光ファイバー20と、分光器30と、取り付け部材40と、光出射穴41と、からなる。光ファイバー20は、誘導結合プラズマ18と分光器30との間に配置され、分光器30とは取り付け部材40により連結される。原子発光線は、光ファイバー20を介して光出射穴41を通過して分光器30内に入射する。取り付け部材40は分光器30に取り付けられ、キャップ45が光ファイバー20の露出した光透過部21を挿入固定し、光透過部21の端面23とキャップ45に設けられた光出射穴41が隣接する。
【選択図】図1
Description
10:誘導結合プラズマ装置
18:誘導結合プラズマ(プラズマ)
20:光ファイバー
21:光透過部
23:端面
30:分光器
31:入射窓
32:凹面鏡
33:回折格子
34:検出器
40:取り付け部材
41:光出射穴
45:キャップ
Claims (5)
- 分析対象の元素を誘導結合プラズマにより原子化またはイオン化し、原子発光線を得る誘導結合プラズマ装置と、
前記原子発光線を取り入れた後、分光して検出する分光器と、
前記誘導結合プラズマ装置と前記分光器とを接続する光ファイバーと、を備えるICP発光分光分析装置であって、
前記光ファイバーから原子発光線を前記分光器に向けて出射する光出射穴を前記光ファイバーの端面に隣接して設けた、ICP発光分光分析装置。 - 請求項1に記載のICP発光分光分析装置であって、
前記光ファイバーの端部において露出し、前記端面を含む光透過部を覆うキャップと、
前記キャップを覆うとともに、前記分光器に取り付けられる取り付け部材と、をさらに備え、
前記露出した光透過部に隣接するように、前記光出射穴が前記キャップに設けられる、ICP発光分光分析装置。 - 請求項1に記載のICP発光分光分析装置であって、
前記光ファイバーの端部において露出し、前記端面を含む光透過部を覆うとともに、前記分光器に取り付けられる取り付け部材をさらに備え、
前記露出した光透過部に隣接するように、前記光出射穴が前記取り付け部材に設けられる、ICP発光分光分析装置。 - 請求項1から3のいずれか1項に記載のICP発光分光分析装置であって、
前記光出射穴が拡がり形状を呈する、ICP発光分光分析装置。 - 請求項1から4のいずれか1項に記載のICP発光分光分析装置であって、
前記光出射穴と前記光ファイバーの端面の距離がゼロである、ICP発光分光分析装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013069440A JP6335433B2 (ja) | 2013-03-28 | 2013-03-28 | Icp発光分光分析装置 |
CN201410119634.9A CN104076024B (zh) | 2013-03-28 | 2014-03-27 | Icp发光分光分析装置 |
KR1020140035830A KR20140118887A (ko) | 2013-03-28 | 2014-03-27 | Icp 발광 분광 분석 장치 |
EP14162220.9A EP2784457A1 (en) | 2013-03-28 | 2014-03-28 | Fiber-based ICP optical emission spectrometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013069440A JP6335433B2 (ja) | 2013-03-28 | 2013-03-28 | Icp発光分光分析装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014190958A true JP2014190958A (ja) | 2014-10-06 |
JP6335433B2 JP6335433B2 (ja) | 2018-05-30 |
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Application Number | Title | Priority Date | Filing Date |
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JP2013069440A Active JP6335433B2 (ja) | 2013-03-28 | 2013-03-28 | Icp発光分光分析装置 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP2784457A1 (ja) |
JP (1) | JP6335433B2 (ja) |
KR (1) | KR20140118887A (ja) |
CN (1) | CN104076024B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112782106A (zh) * | 2020-12-23 | 2021-05-11 | 山西大学 | 一种获得窄线宽里德堡原子光谱的装置和方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106290313B (zh) * | 2016-07-25 | 2019-03-05 | 钢研纳克检测技术股份有限公司 | 一种应用于icp光谱的入射光观测位置调节结构 |
CN113130280B (zh) * | 2019-12-31 | 2024-03-12 | 中微半导体设备(上海)股份有限公司 | 光强度监测调节机构、调节方法及等离子体处理装置 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US621230A (en) * | 1899-03-14 | Acetylene-generating lamp | ||
JPS58104957U (ja) * | 1982-01-12 | 1983-07-16 | 住友金属工業株式会社 | 分光分析装置 |
JPS5994042A (ja) * | 1982-11-22 | 1984-05-30 | Dainichi Nippon Cables Ltd | 発光分光分析装置 |
JPS63141912U (ja) * | 1987-03-11 | 1988-09-19 | ||
US4789239A (en) * | 1983-06-10 | 1988-12-06 | Mitsubishi Cable Industries, Ltd. | Emission spectroscopic analyzer |
US4986621A (en) * | 1988-08-20 | 1991-01-22 | Wandel & Goltermann Gmbh & Co. | Optical head adapted to receive a light guide plug |
US4995695A (en) * | 1989-08-17 | 1991-02-26 | At&T Bell Laboratories | Optical assembly comprising optical fiber coupling means |
JPH06123825A (ja) * | 1992-10-12 | 1994-05-06 | Sumitomo Electric Ind Ltd | 光コネクタアダプタ |
JPH1195066A (ja) * | 1997-09-25 | 1999-04-09 | Yazaki Corp | 光コネクタ |
JP2006153763A (ja) * | 2004-11-30 | 2006-06-15 | Nikon Corp | ファイバ入射型分光器、それを用いた分光システム |
WO2011084528A1 (en) * | 2009-12-15 | 2011-07-14 | Emory University Office Of Technology Transfer | System and method for providing real-time anatomical guidance in a diagnostic or therapeutic procedure |
JP2012083163A (ja) * | 2010-10-08 | 2012-04-26 | Yokogawa Electric Corp | 分光装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56137247A (en) * | 1980-03-31 | 1981-10-27 | Japan Atom Energy Res Inst | Multipoint simultaneous measuring instrument |
JPS6347622A (ja) | 1986-08-14 | 1988-02-29 | Shimadzu Corp | 分光装置 |
JPH10142156A (ja) * | 1996-11-12 | 1998-05-29 | Shimadzu Corp | 発光分光分析装置 |
JP2001305059A (ja) * | 2000-04-26 | 2001-10-31 | Seiko Instruments Inc | 誘導結合プラズマ発光分光分析装置と方法 |
WO2003004982A1 (fr) * | 2001-07-05 | 2003-01-16 | Hamamatsu Photonics K.K. | Dispositif spectroscopique |
CN102235977B (zh) * | 2010-03-29 | 2016-06-08 | 日本株式会社日立高新技术科学 | Icp分析装置及其分析方法 |
-
2013
- 2013-03-28 JP JP2013069440A patent/JP6335433B2/ja active Active
-
2014
- 2014-03-27 CN CN201410119634.9A patent/CN104076024B/zh active Active
- 2014-03-27 KR KR1020140035830A patent/KR20140118887A/ko active Search and Examination
- 2014-03-28 EP EP14162220.9A patent/EP2784457A1/en not_active Withdrawn
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US621230A (en) * | 1899-03-14 | Acetylene-generating lamp | ||
JPS58104957U (ja) * | 1982-01-12 | 1983-07-16 | 住友金属工業株式会社 | 分光分析装置 |
JPS5994042A (ja) * | 1982-11-22 | 1984-05-30 | Dainichi Nippon Cables Ltd | 発光分光分析装置 |
US4789239A (en) * | 1983-06-10 | 1988-12-06 | Mitsubishi Cable Industries, Ltd. | Emission spectroscopic analyzer |
JPS63141912U (ja) * | 1987-03-11 | 1988-09-19 | ||
US4986621A (en) * | 1988-08-20 | 1991-01-22 | Wandel & Goltermann Gmbh & Co. | Optical head adapted to receive a light guide plug |
US4995695A (en) * | 1989-08-17 | 1991-02-26 | At&T Bell Laboratories | Optical assembly comprising optical fiber coupling means |
JPH06123825A (ja) * | 1992-10-12 | 1994-05-06 | Sumitomo Electric Ind Ltd | 光コネクタアダプタ |
JPH1195066A (ja) * | 1997-09-25 | 1999-04-09 | Yazaki Corp | 光コネクタ |
JP2006153763A (ja) * | 2004-11-30 | 2006-06-15 | Nikon Corp | ファイバ入射型分光器、それを用いた分光システム |
WO2011084528A1 (en) * | 2009-12-15 | 2011-07-14 | Emory University Office Of Technology Transfer | System and method for providing real-time anatomical guidance in a diagnostic or therapeutic procedure |
JP2012083163A (ja) * | 2010-10-08 | 2012-04-26 | Yokogawa Electric Corp | 分光装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112782106A (zh) * | 2020-12-23 | 2021-05-11 | 山西大学 | 一种获得窄线宽里德堡原子光谱的装置和方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20140118887A (ko) | 2014-10-08 |
CN104076024A (zh) | 2014-10-01 |
CN104076024B (zh) | 2018-12-04 |
JP6335433B2 (ja) | 2018-05-30 |
EP2784457A1 (en) | 2014-10-01 |
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