JP2014158025A5 - - Google Patents
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- Publication number
- JP2014158025A5 JP2014158025A5 JP2014025396A JP2014025396A JP2014158025A5 JP 2014158025 A5 JP2014158025 A5 JP 2014158025A5 JP 2014025396 A JP2014025396 A JP 2014025396A JP 2014025396 A JP2014025396 A JP 2014025396A JP 2014158025 A5 JP2014158025 A5 JP 2014158025A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- heat dissipation
- heat dissipating
- dissipation layer
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 18
- 230000017525 heat dissipation Effects 0.000 claims 8
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims 3
- 229910002601 GaN Inorganic materials 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 229910003460 diamond Inorganic materials 0.000 claims 2
- 239000010432 diamond Substances 0.000 claims 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 239000012790 adhesive layer Substances 0.000 claims 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 230000003321 amplification Effects 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/769,729 | 2013-02-18 | ||
| US13/769,729 US8946894B2 (en) | 2013-02-18 | 2013-02-18 | Package for high-power semiconductor devices |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014158025A JP2014158025A (ja) | 2014-08-28 |
| JP2014158025A5 true JP2014158025A5 (enExample) | 2017-03-16 |
| JP6527666B2 JP6527666B2 (ja) | 2019-06-05 |
Family
ID=51263970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014025396A Active JP6527666B2 (ja) | 2013-02-18 | 2014-02-13 | ハイパワー半導体素子用パッケージ |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8946894B2 (enExample) |
| JP (1) | JP6527666B2 (enExample) |
| DE (1) | DE102014001217A1 (enExample) |
| TW (1) | TWI620288B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1973190A1 (en) | 2007-03-20 | 2008-09-24 | Rohm and Haas Electronic Materials LLC | Integrated electronic components and methods of formation thereof |
| US10186458B2 (en) * | 2012-07-05 | 2019-01-22 | Infineon Technologies Ag | Component and method of manufacturing a component using an ultrathin carrier |
| US10003149B2 (en) | 2014-10-25 | 2018-06-19 | ComponentZee, LLC | Fluid pressure activated electrical contact devices and methods |
| US10847469B2 (en) * | 2016-04-26 | 2020-11-24 | Cubic Corporation | CTE compensation for wafer-level and chip-scale packages and assemblies |
| WO2017082926A1 (en) * | 2015-11-13 | 2017-05-18 | Intel Corporation | Apparatus and method for mitigating surface imperfections on die backside film |
| US10499461B2 (en) * | 2015-12-21 | 2019-12-03 | Intel Corporation | Thermal head with a thermal barrier for integrated circuit die processing |
| EP3208841B1 (de) * | 2016-02-19 | 2020-12-09 | Heraeus Deutschland GmbH & Co. KG | Verfahren zur herstellung einer wärmespreizplatte, wärmespreizplatte, verfahren zur herstellung eines halbleitermoduls und halbleitermodul |
| EP3208842A1 (de) * | 2016-02-19 | 2017-08-23 | Heraeus Deutschland GmbH & Co. KG | Verfahren zur herstellung einer substratplatte, substratplatte, verfahren zur herstellung eines halbleitermoduls und halbleitermodul |
| US9984951B2 (en) * | 2016-07-29 | 2018-05-29 | Nxp Usa, Inc. | Sintered multilayer heat sinks for microelectronic packages and methods for the production thereof |
| US20200368804A1 (en) * | 2019-05-24 | 2020-11-26 | Trusval Technology Co., Ltd. | Manufacturing process for heat sink composite having heat dissipation function and manufacturing method for its finished product |
| US11862718B2 (en) | 2020-10-12 | 2024-01-02 | Bae Systems Information And Electronic Systems Integration Inc. | III-nitride thermal management based on aluminum nitride substrates |
| US12224337B2 (en) * | 2020-12-23 | 2025-02-11 | Intel Corporation | PGaN enhancement mode HEMTs with dopant diffusion spacer |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6027188B2 (ja) * | 1981-12-15 | 1985-06-27 | 住友電気工業株式会社 | 半導体素子塔載用基板 |
| JPH04213863A (ja) * | 1990-12-11 | 1992-08-04 | Fujitsu Ltd | Ic実装用パッケージ/キャリア |
| US6127724A (en) * | 1996-10-31 | 2000-10-03 | Tessera, Inc. | Packaged microelectronic elements with enhanced thermal conduction |
| US6635514B1 (en) * | 1996-12-12 | 2003-10-21 | Tessera, Inc. | Compliant package with conductive elastomeric posts |
| JP3144387B2 (ja) * | 1998-08-17 | 2001-03-12 | 日本電気株式会社 | 半導体装置の製造方法 |
| US7078109B2 (en) * | 2000-02-25 | 2006-07-18 | Thermagon Inc. | Heat spreading thermal interface structure |
| TWI288435B (en) * | 2000-11-21 | 2007-10-11 | Matsushita Electric Industrial Co Ltd | Semiconductor device and equipment for communication system |
| US6617683B2 (en) * | 2001-09-28 | 2003-09-09 | Intel Corporation | Thermal performance in flip chip/integral heat spreader packages using low modulus thermal interface material |
| AU2003284065A1 (en) * | 2002-10-11 | 2005-05-05 | Chien-Min Sung | Carbonaceous heat spreader and associated methods |
| US7067903B2 (en) * | 2002-11-07 | 2006-06-27 | Kabushiki Kaisha Kobe Seiko Sho | Heat spreader and semiconductor device and package using the same |
| JP2004172406A (ja) * | 2002-11-20 | 2004-06-17 | Kobe Steel Ltd | セラミックス付き半導体基板、セラミックス付き半導体ウエハ及びその製造方法 |
| JP2005056967A (ja) * | 2003-08-01 | 2005-03-03 | Olympus Corp | 半導体コンポーネント |
| US7579687B2 (en) * | 2004-09-03 | 2009-08-25 | Entorian Technologies, Lp | Circuit module turbulence enhancement systems and methods |
| US7446410B2 (en) * | 2004-09-03 | 2008-11-04 | Entorian Technologies, Lp | Circuit module with thermal casing systems |
| JP2006202938A (ja) * | 2005-01-20 | 2006-08-03 | Kojiro Kobayashi | 半導体装置及びその製造方法 |
| JP4914900B2 (ja) * | 2005-11-18 | 2012-04-11 | クリー インコーポレイテッド | 固体照明パネル用タイル |
| US7719816B2 (en) * | 2007-05-22 | 2010-05-18 | Centipede Systems, Inc. | Compliant thermal contactor |
| JP5520861B2 (ja) * | 2010-03-26 | 2014-06-11 | 古河電気工業株式会社 | 銅合金微粒子分散液、焼結導電体の製造方法、及び焼結導電体、並びに導電接続部材 |
| JP5525335B2 (ja) * | 2010-05-31 | 2014-06-18 | 株式会社日立製作所 | 焼結銀ペースト材料及び半導体チップ接合方法 |
-
2013
- 2013-02-18 US US13/769,729 patent/US8946894B2/en active Active
-
2014
- 2014-01-30 DE DE201410001217 patent/DE102014001217A1/de not_active Withdrawn
- 2014-02-13 TW TW103104655A patent/TWI620288B/zh not_active IP Right Cessation
- 2014-02-13 JP JP2014025396A patent/JP6527666B2/ja active Active
- 2014-12-22 US US14/580,147 patent/US9559034B2/en active Active
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