JP2014093369A - エピタキシャルウェハ及びその製造方法 - Google Patents
エピタキシャルウェハ及びその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 63
- 239000004065 semiconductor Substances 0.000 claims abstract description 266
- 150000004767 nitrides Chemical class 0.000 claims abstract description 208
- 239000013078 crystal Substances 0.000 claims abstract description 44
- 238000000034 method Methods 0.000 claims description 112
- 230000002093 peripheral effect Effects 0.000 claims description 81
- 230000007717 exclusion Effects 0.000 claims description 37
- 229910052594 sapphire Inorganic materials 0.000 claims description 30
- 239000010980 sapphire Substances 0.000 claims description 30
- 230000008569 process Effects 0.000 claims description 22
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical group Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 19
- 238000005121 nitriding Methods 0.000 claims description 12
- 230000003647 oxidation Effects 0.000 claims description 9
- 238000007254 oxidation reaction Methods 0.000 claims description 9
- 238000013459 approach Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 349
- 239000000758 substrate Substances 0.000 description 48
- 239000000463 material Substances 0.000 description 44
- 239000010408 film Substances 0.000 description 27
- 239000007789 gas Substances 0.000 description 22
- 238000011156 evaluation Methods 0.000 description 17
- 230000003287 optical effect Effects 0.000 description 15
- 230000004075 alteration Effects 0.000 description 13
- 238000012545 processing Methods 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 238000002441 X-ray diffraction Methods 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 230000004888 barrier function Effects 0.000 description 9
- 239000012159 carrier gas Substances 0.000 description 9
- 238000005530 etching Methods 0.000 description 9
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 238000000137 annealing Methods 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000001451 molecular beam epitaxy Methods 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 5
- 229910002704 AlGaN Inorganic materials 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910017109 AlON Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910020068 MgAl Inorganic materials 0.000 description 1
- 240000004050 Pentaglottis sempervirens Species 0.000 description 1
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02021—Edge treatment, chamfering
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
- C30B25/186—Epitaxial-layer growth characterised by the substrate being specially pre-treated by, e.g. chemical or physical means
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/0242—Crystalline insulating materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
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- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
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- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Led Devices (AREA)
Abstract
【解決手段】エピタキシャルウェハ1は、ウェハ10と、ウェハ10の一表面側の全面に形成された単結晶のIII族窒化物半導体層20とを備えている。III族窒化物半導体層20は、ウェハ10の周辺部からなる除外領域12に形成された外周部22と、ウェハ10における除外領域12よりも内側の適用領域11に形成された中央部21とを有している。適用領域11は、ウェハ10の除外領域12を除いた領域である。外周部22は、中央部21よりも、空隙もしくはウェハ10の上記一表面側の界面を起点として成長した突起を多く含んでいる。そして、中央部21は、外周部22よりも結晶性が高い。
【選択図】図1
Description
以下では、本実施形態のエピタキシャルウェハ1について図1〜4に基づいて説明する。
本実施例では、上述の実施形態で説明したエピタキシャルウェハ1の製造方法に基いてエピタキシャルウェハ1を製造した。
本実施例では、上述の実施形態で説明したエピタキシャルウェハ1の製造方法に基いてエピタキシャルウェハ1を製造した。
本実施例では、上述の実施形態で説明したエピタキシャルウェハ1の製造方法に基いてエピタキシャルウェハ1を製造した。
本実施例では、上述の実施形態で説明したエピタキシャルウェハ1の製造方法に基いてエピタキシャルウェハ1を製造した。
10 ウェハ
11 適用領域
12 除外領域
13 凹部
14 テーパ面
15 変質層
20 III族窒化物半導体層
21 中央部
22 外周部
24 突起
Claims (9)
- ウェハと、前記ウェハの一表面側の全面に形成された単結晶のIII族窒化物半導体層とを備え、前記III族窒化物半導体層は、前記ウェハの周辺部からなる除外領域に形成された外周部と、前記ウェハにおける前記除外領域よりも内側の適用領域に形成された中央部とを有し、前記外周部は、前記中央部よりも、空隙もしくは前記ウェハの前記一表面側の界面を起点として成長した突起を多く含んでいることを特徴とするエピタキシャルウェハ。
- 前記ウェハは、サファイアウェハであり、前記III族窒化物半導体層は、窒化アルミニウム層であることを特徴とする請求項1記載のエピタキシャルウェハ。
- ウェハと、前記ウェハの一表面側の全面に形成された単結晶のIII族窒化物半導体層とを備えるエピタキシャルウェハの製造方法であって、前記ウェハの前記一表面側に前記III族窒化物半導体層を成長させるにあたって、前記III族窒化物半導体層が、前記ウェハの周辺部からなる除外領域に形成された外周部と、前記ウェハにおける前記除外領域よりも内側の適用領域に形成された中央部とを有し、前記外周部が前記中央部よりも空隙もしくは前記ウェハの前記一表面側を起点として成長した突起を多く含むように、前記III族窒化物半導体層を成長させることを特徴とするエピタキシャルウェハの製造方法。
- 前記III族窒化物半導体層を成長させる前に、前記ウェハの前記除外領域において前記ウェハの他表面側に凹部を形成することを特徴とする請求項3記載のエピタキシャルウェハの製造方法。
- 前記III族窒化物半導体層を成長させる前に、前記ウェハの前記除外領域において前記ウェハの他表面側に前記ウェハのエッジに近づくにつれて前記除外領域の厚み寸法を小さくするテーパ面を形成することを特徴とする請求項3記載のエピタキシャルウェハの製造方法。
- 前記III族窒化物半導体層を成長させる前に、前記ウェハの前記除外領域における前記ウェハの前記一表面側を変質化する処理を行うことを特徴とする請求項3記載のエピタキシャルウェハの製造方法。
- 前記処理は、酸化処理であることを特徴とする請求項6記載のエピタキシャルウェハの製造方法。
- 前記処理は、窒化処理であることを特徴とする請求項6記載のエピタキシャルウェハの製造方法。
- 前記ウェハは、サファイアウェハであり、前記III族窒化物半導体層は、窒化アルミニウム層であることを特徴とする請求項3乃至8のいずれか1項に記載のエピタキシャルウェハの製造方法。
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JP2012242047A JP5979547B2 (ja) | 2012-11-01 | 2012-11-01 | エピタキシャルウェハ及びその製造方法 |
PCT/JP2013/005651 WO2014068838A1 (ja) | 2012-11-01 | 2013-09-25 | エピタキシャルウェハ及びその製造方法 |
TW102134758A TW201421543A (zh) | 2012-11-01 | 2013-09-26 | 磊晶晶圓及其製造方法 |
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TW (1) | TW201421543A (ja) |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018533840A (ja) * | 2015-10-15 | 2018-11-15 | ヴィシェイ ジェネラル セミコンダクター,エルエルシーVishay General Semiconductor,Llc | 局所的な半導体ウエハの薄膜化 |
WO2019130805A1 (ja) * | 2017-12-28 | 2019-07-04 | 日機装株式会社 | 窒化物半導体素子及び窒化物半導体素子の製造方法 |
JP2022082182A (ja) * | 2020-11-20 | 2022-06-01 | 日機装株式会社 | 窒化物半導体発光素子及び窒化物半導体発光素子の製造方法 |
US20220208694A1 (en) * | 2020-12-31 | 2022-06-30 | United Microelectronics Corp. | Semiconductor structure |
US11626301B2 (en) | 2019-09-24 | 2023-04-11 | Nichia Corporation | Method for manufacturing semiconductor element |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6916719B2 (ja) * | 2017-11-17 | 2021-08-11 | 株式会社トクヤマ | Iii族窒化物単結晶積層体の製造方法及びiii族窒化物単結晶積層体 |
WO2022205469A1 (en) * | 2021-04-02 | 2022-10-06 | Innoscience (Suzhou) Technology Co., Ltd. | Iii nitride semiconductor wafers |
JP7361990B1 (ja) | 2022-02-17 | 2023-10-16 | 日本碍子株式会社 | Iii族元素窒化物基板およびiii族元素窒化物基板の製造方法 |
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JP2007184352A (ja) * | 2006-01-05 | 2007-07-19 | Matsushita Electric Ind Co Ltd | 窒化物系化合物半導体素子用ウェハーの製造方法及び窒化物系化合物半導体素子用ウェハー |
WO2011161975A1 (ja) * | 2010-06-25 | 2011-12-29 | Dowaエレクトロニクス株式会社 | エピタキシャル成長基板及び半導体装置、エピタキシャル成長方法 |
JP2012036030A (ja) * | 2010-08-05 | 2012-02-23 | Sanken Electric Co Ltd | 半導体ウェハの製造方法 |
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2012
- 2012-11-01 JP JP2012242047A patent/JP5979547B2/ja not_active Expired - Fee Related
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2013
- 2013-09-25 WO PCT/JP2013/005651 patent/WO2014068838A1/ja active Application Filing
- 2013-09-26 TW TW102134758A patent/TW201421543A/zh unknown
Patent Citations (3)
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JP2007184352A (ja) * | 2006-01-05 | 2007-07-19 | Matsushita Electric Ind Co Ltd | 窒化物系化合物半導体素子用ウェハーの製造方法及び窒化物系化合物半導体素子用ウェハー |
WO2011161975A1 (ja) * | 2010-06-25 | 2011-12-29 | Dowaエレクトロニクス株式会社 | エピタキシャル成長基板及び半導体装置、エピタキシャル成長方法 |
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