JP2014081234A5 - - Google Patents

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Publication number
JP2014081234A5
JP2014081234A5 JP2012228005A JP2012228005A JP2014081234A5 JP 2014081234 A5 JP2014081234 A5 JP 2014081234A5 JP 2012228005 A JP2012228005 A JP 2012228005A JP 2012228005 A JP2012228005 A JP 2012228005A JP 2014081234 A5 JP2014081234 A5 JP 2014081234A5
Authority
JP
Japan
Prior art keywords
probe unit
inspection apparatus
mechanisms
inspection
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012228005A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014081234A (ja
JP6084426B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012228005A priority Critical patent/JP6084426B2/ja
Priority claimed from JP2012228005A external-priority patent/JP6084426B2/ja
Priority to CN201310481443.2A priority patent/CN103728505B/zh
Publication of JP2014081234A publication Critical patent/JP2014081234A/ja
Publication of JP2014081234A5 publication Critical patent/JP2014081234A5/ja
Application granted granted Critical
Publication of JP6084426B2 publication Critical patent/JP6084426B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012228005A 2012-10-15 2012-10-15 検査装置 Active JP6084426B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012228005A JP6084426B2 (ja) 2012-10-15 2012-10-15 検査装置
CN201310481443.2A CN103728505B (zh) 2012-10-15 2013-10-15 检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012228005A JP6084426B2 (ja) 2012-10-15 2012-10-15 検査装置

Publications (3)

Publication Number Publication Date
JP2014081234A JP2014081234A (ja) 2014-05-08
JP2014081234A5 true JP2014081234A5 (enExample) 2015-09-17
JP6084426B2 JP6084426B2 (ja) 2017-02-22

Family

ID=50452666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012228005A Active JP6084426B2 (ja) 2012-10-15 2012-10-15 検査装置

Country Status (2)

Country Link
JP (1) JP6084426B2 (enExample)
CN (1) CN103728505B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104393837A (zh) * 2014-11-28 2015-03-04 苏州晟成光伏设备有限公司 高位el检查机放电触头连接机构
JP6422376B2 (ja) * 2015-03-06 2018-11-14 三菱電機株式会社 半導体装置検査用治具
KR102614075B1 (ko) * 2017-12-26 2023-12-14 주식회사 탑 엔지니어링 기판 검사 장치
KR102202033B1 (ko) * 2020-09-03 2021-01-12 주식회사 프로이천 캠승강식 오토 프로브장치
KR102202035B1 (ko) * 2020-09-03 2021-01-12 주식회사 프로이천 오토 프로브장치

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100600A (ja) * 1982-11-30 1984-06-09 九州日本電気株式会社 半導体素子製造用自動選別装置
JPS59100599A (ja) * 1982-11-30 1984-06-09 九州日本電気株式会社 半導体素子製造用自動選別装置
JPS61272946A (ja) * 1985-05-28 1986-12-03 Nec Corp 半導体検査装置
JPH03252571A (ja) * 1990-03-01 1991-11-11 Tokyo Electron Ltd 基板の検査装置
JPH04177849A (ja) * 1990-11-13 1992-06-25 Nec Kyushu Ltd プロービング装置
JP2000180807A (ja) * 1998-12-15 2000-06-30 Micronics Japan Co Ltd 液晶基板の検査装置
JP3480925B2 (ja) * 2000-09-12 2003-12-22 株式会社双晶テック ディスプレイパネル又はプローブブロックの支持枠体
JP3457938B2 (ja) * 2000-10-16 2003-10-20 株式会社双晶テック 表示基板又は回路基板の検査装置における表示基板又は回路基板の交換方法
JP2002222839A (ja) * 2001-01-29 2002-08-09 Advantest Corp プローブカード
TWI231964B (en) * 2003-03-10 2005-05-01 Phicom Corp LCD panel auto gripping apparatus and method for use in a panel carrier for an automatic probe unit
JP4490066B2 (ja) * 2003-09-18 2010-06-23 株式会社日本マイクロニクス 表示用パネルの検査装置
CN1731203A (zh) * 2005-03-09 2006-02-08 飞而康公司 液晶显示器面板的检查装置及其检查方法
KR20060109194A (ko) * 2005-04-15 2006-10-19 삼성전자주식회사 액정표시패널의 검사방법
KR100611608B1 (ko) * 2005-11-15 2006-08-11 주식회사 코디에스 평판형 디스플레이 검사 방법 및 평판형 디스플레이 검사용유닛
JP2007285727A (ja) * 2006-04-12 2007-11-01 Tokyo Cathode Laboratory Co Ltd プローブカード配置ユニット及びプローブカードを有する測定装置
JP4808135B2 (ja) * 2006-11-09 2011-11-02 株式会社日本マイクロニクス プローブ位置合わせ方法及び可動式プローブユニット機構並びに検査装置
JP2010122092A (ja) * 2008-11-20 2010-06-03 Toshiba Corp プローブカード
JP5631114B2 (ja) * 2010-08-24 2014-11-26 株式会社日本マイクロニクス 平板状被検査体の検査装置

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