JP2014068014A5 - - Google Patents

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Publication number
JP2014068014A5
JP2014068014A5 JP2013197964A JP2013197964A JP2014068014A5 JP 2014068014 A5 JP2014068014 A5 JP 2014068014A5 JP 2013197964 A JP2013197964 A JP 2013197964A JP 2013197964 A JP2013197964 A JP 2013197964A JP 2014068014 A5 JP2014068014 A5 JP 2014068014A5
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JP
Japan
Prior art keywords
semiconductor device
electrode
layer
interlayer insulating
insulating film
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JP2013197964A
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English (en)
Japanese (ja)
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JP2014068014A (ja
JP5865881B2 (ja
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Priority claimed from KR1020120106707A external-priority patent/KR101992352B1/ko
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Publication of JP2014068014A publication Critical patent/JP2014068014A/ja
Publication of JP2014068014A5 publication Critical patent/JP2014068014A5/ja
Application granted granted Critical
Publication of JP5865881B2 publication Critical patent/JP5865881B2/ja
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JP2013197964A 2012-09-25 2013-09-25 半導体装置及びその製造方法 Active JP5865881B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2012-0106707 2012-09-25
KR1020120106707A KR101992352B1 (ko) 2012-09-25 2012-09-25 반도체 장치

Publications (3)

Publication Number Publication Date
JP2014068014A JP2014068014A (ja) 2014-04-17
JP2014068014A5 true JP2014068014A5 (enExample) 2015-11-12
JP5865881B2 JP5865881B2 (ja) 2016-02-17

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ID=50338075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013197964A Active JP5865881B2 (ja) 2012-09-25 2013-09-25 半導体装置及びその製造方法

Country Status (3)

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US (2) US9153522B2 (enExample)
JP (1) JP5865881B2 (enExample)
KR (1) KR101992352B1 (enExample)

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