JP2014053540A5 - - Google Patents
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- JP2014053540A5 JP2014053540A5 JP2012198403A JP2012198403A JP2014053540A5 JP 2014053540 A5 JP2014053540 A5 JP 2014053540A5 JP 2012198403 A JP2012198403 A JP 2012198403A JP 2012198403 A JP2012198403 A JP 2012198403A JP 2014053540 A5 JP2014053540 A5 JP 2014053540A5
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- 239000007788 liquid Substances 0.000 description 15
- 239000002699 waste material Substances 0.000 description 12
- 230000007704 transition Effects 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 6
- 101150075071 TRS1 gene Proteins 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- UJFBVNPYHVIYBF-UHFFFAOYSA-N 5-o-(2-bromoethyl) 3-o-methyl 2,6-dimethyl-4-(3-nitrophenyl)-1,4-dihydropyridine-3,5-dicarboxylate Chemical compound COC(=O)C1=C(C)NC(C)=C(C(=O)OCCBr)C1C1=CC=CC([N+]([O-])=O)=C1 UJFBVNPYHVIYBF-UHFFFAOYSA-N 0.000 description 2
- 102100029824 ADP-ribosyl cyclase/cyclic ADP-ribose hydrolase 2 Human genes 0.000 description 2
- 102100026413 Branched-chain-amino-acid aminotransferase, mitochondrial Human genes 0.000 description 2
- 101000794082 Homo sapiens ADP-ribosyl cyclase/cyclic ADP-ribose hydrolase 2 Proteins 0.000 description 2
- 101000766294 Homo sapiens Branched-chain-amino-acid aminotransferase, mitochondrial Proteins 0.000 description 2
- 101001099051 Homo sapiens GPI inositol-deacylase Proteins 0.000 description 2
- 101100384866 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) COT1 gene Proteins 0.000 description 2
- 101100233693 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) ITC1 gene Proteins 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 102100037086 Bone marrow stromal antigen 2 Human genes 0.000 description 1
- 101000740785 Homo sapiens Bone marrow stromal antigen 2 Proteins 0.000 description 1
- 101000679575 Homo sapiens Trafficking protein particle complex subunit 2 Proteins 0.000 description 1
- 102100022613 Trafficking protein particle complex subunit 2 Human genes 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
Images
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012198403A JP5901477B2 (ja) | 2012-09-10 | 2012-09-10 | 塗布、現像装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012198403A JP5901477B2 (ja) | 2012-09-10 | 2012-09-10 | 塗布、現像装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014053540A JP2014053540A (ja) | 2014-03-20 |
| JP2014053540A5 true JP2014053540A5 (enExample) | 2014-10-23 |
| JP5901477B2 JP5901477B2 (ja) | 2016-04-13 |
Family
ID=50611713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012198403A Active JP5901477B2 (ja) | 2012-09-10 | 2012-09-10 | 塗布、現像装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5901477B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5894623B2 (ja) | 2014-03-17 | 2016-03-30 | 株式会社フジキカイ | 包装機におけるフィルム処理方法及びその装置 |
| JP7300935B2 (ja) * | 2019-09-02 | 2023-06-30 | 東京エレクトロン株式会社 | 塗布、現像装置 |
| JP7521391B2 (ja) * | 2020-11-25 | 2024-07-24 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
| CN113539937B (zh) * | 2021-07-09 | 2023-03-03 | 江西龙芯微科技有限公司 | 一种晶圆承载装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3320622B2 (ja) * | 1996-11-08 | 2002-09-03 | 東京エレクトロン株式会社 | 処理装置および処理方法 |
| JP4291096B2 (ja) * | 2003-09-22 | 2009-07-08 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理装置のための機能ブロック組合せシステム |
| JP4106017B2 (ja) * | 2003-12-19 | 2008-06-25 | 東京エレクトロン株式会社 | 現像装置及び現像方法 |
| JP5348083B2 (ja) * | 2010-07-16 | 2013-11-20 | 東京エレクトロン株式会社 | 塗布、現像装置、塗布、現像方法及び記憶媒体 |
| JP5338777B2 (ja) * | 2010-09-02 | 2013-11-13 | 東京エレクトロン株式会社 | 塗布、現像装置、塗布、現像方法及び記憶媒体 |
| JP2012080077A (ja) * | 2010-09-06 | 2012-04-19 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
| JP5212443B2 (ja) * | 2010-09-13 | 2013-06-19 | 東京エレクトロン株式会社 | 塗布、現像装置、塗布、現像方法及び記憶媒体 |
| JP5572666B2 (ja) * | 2012-05-24 | 2014-08-13 | 株式会社Ｓｏｋｕｄｏ | 基板処理装置 |
-
2012
- 2012-09-10 JP JP2012198403A patent/JP5901477B2/ja active Active
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