JP2015191897A5 - - Google Patents

Download PDF

Info

Publication number
JP2015191897A5
JP2015191897A5 JP2014065621A JP2014065621A JP2015191897A5 JP 2015191897 A5 JP2015191897 A5 JP 2015191897A5 JP 2014065621 A JP2014065621 A JP 2014065621A JP 2014065621 A JP2014065621 A JP 2014065621A JP 2015191897 A5 JP2015191897 A5 JP 2015191897A5
Authority
JP
Japan
Prior art keywords
cleaning
processing
liquid
unit
processing liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014065621A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015191897A (ja
JP6186298B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2014065621A external-priority patent/JP6186298B2/ja
Priority to JP2014065621A priority Critical patent/JP6186298B2/ja
Priority to KR1020187037875A priority patent/KR102049193B1/ko
Priority to CN201580012432.7A priority patent/CN106104762B/zh
Priority to CN201811416745.0A priority patent/CN109285800B/zh
Priority to US15/124,252 priority patent/US20170014873A1/en
Priority to KR1020187007915A priority patent/KR20180033594A/ko
Priority to PCT/JP2015/001010 priority patent/WO2015136872A1/ja
Priority to KR1020167028100A priority patent/KR101842824B1/ko
Priority to TW107118516A priority patent/TWI709443B/zh
Priority to TW109134990A priority patent/TWI760883B/zh
Priority to TW104107388A priority patent/TWI628007B/zh
Publication of JP2015191897A publication Critical patent/JP2015191897A/ja
Publication of JP2015191897A5 publication Critical patent/JP2015191897A5/ja
Publication of JP6186298B2 publication Critical patent/JP6186298B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014065621A 2014-03-10 2014-03-27 基板処理システムおよび配管洗浄方法 Active JP6186298B2 (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP2014065621A JP6186298B2 (ja) 2014-03-27 2014-03-27 基板処理システムおよび配管洗浄方法
PCT/JP2015/001010 WO2015136872A1 (ja) 2014-03-10 2015-02-26 基板処理システムおよび配管洗浄方法
CN201580012432.7A CN106104762B (zh) 2014-03-10 2015-02-26 基板处理系统以及管道清洗方法
CN201811416745.0A CN109285800B (zh) 2014-03-10 2015-02-26 基板处理系统以及管道清洗方法
US15/124,252 US20170014873A1 (en) 2014-03-10 2015-02-26 Substrate processing system and pipe cleaning method
KR1020187007915A KR20180033594A (ko) 2014-03-10 2015-02-26 기판 처리 시스템 및 배관 세정 방법
KR1020187037875A KR102049193B1 (ko) 2014-03-10 2015-02-26 기판 처리 시스템 및 배관 세정 방법
KR1020167028100A KR101842824B1 (ko) 2014-03-10 2015-02-26 기판 처리 시스템 및 배관 세정 방법
TW107118516A TWI709443B (zh) 2014-03-10 2015-03-09 基板處理裝置
TW109134990A TWI760883B (zh) 2014-03-10 2015-03-09 基板處理系統及配管洗淨方法
TW104107388A TWI628007B (zh) 2014-03-10 2015-03-09 基板處理系統及配管洗淨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014065621A JP6186298B2 (ja) 2014-03-27 2014-03-27 基板処理システムおよび配管洗浄方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017148044A Division JP6347875B2 (ja) 2017-07-31 2017-07-31 基板処理システムおよび配管洗浄方法

Publications (3)

Publication Number Publication Date
JP2015191897A JP2015191897A (ja) 2015-11-02
JP2015191897A5 true JP2015191897A5 (enExample) 2017-02-09
JP6186298B2 JP6186298B2 (ja) 2017-08-23

Family

ID=54426199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014065621A Active JP6186298B2 (ja) 2014-03-10 2014-03-27 基板処理システムおよび配管洗浄方法

Country Status (1)

Country Link
JP (1) JP6186298B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6535649B2 (ja) * 2016-12-12 2019-06-26 株式会社荏原製作所 基板処理装置、排出方法およびプログラム
JP6984431B2 (ja) * 2018-01-19 2021-12-22 東京エレクトロン株式会社 流路洗浄方法及び流路洗浄装置
JP2024101853A (ja) 2023-01-18 2024-07-30 株式会社Ｓｃｒｅｅｎホールディングス 基板処理システムおよび洗浄方法
KR20250170067A (ko) * 2023-03-30 2025-12-04 도쿄엘렉트론가부시키가이샤 배관 세정 방법 및 기판 처리 시스템

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004267965A (ja) * 2003-03-11 2004-09-30 Dainippon Screen Mfg Co Ltd 基板処理装置及び処理液切替方法
JP2012200712A (ja) * 2011-03-28 2012-10-22 Kuraray Co Ltd 配管の洗浄方法

Similar Documents

Publication Publication Date Title
KR101842824B1 (ko) 기판 처리 시스템 및 배관 세정 방법
US9278768B2 (en) Process liquid changing method and substrate processing apparatus
WO2015065658A8 (en) Methods and compositions for the treatment and recovery of purge solvent
TWI533946B (zh) 噴頭清潔的方法與設備
HK1225340A1 (zh) 船舶废气清洁系统
JP2012044204A5 (ja) メンテナンス方法、露光装置、及びデバイス製造方法
JP2015191897A5 (enExample)
EP2528088A3 (en) Broken wafer recovery system
JP2016512163A5 (enExample)
JP6009836B2 (ja) 物品の洗浄方法
JP6256443B2 (ja) 製品洗浄方法
CN109153047A (zh) 超纯水制造装置的启动方法
JP6186298B2 (ja) 基板処理システムおよび配管洗浄方法
TW200833430A (en) Methods and apparatus for cleaning chamber components
CN203265135U (zh) 一种食品罐头清洗机
JP2016083641A5 (enExample)
JP2017025346A (ja) 電着塗装システム、及び、電着塗装方法
US20170203340A1 (en) Rapid cleaning method for ultrapure water piping system
JP6535493B2 (ja) 基板処理装置
CN204353166U (zh) 一种预清洗机
KR101900801B1 (ko) 전기집진기 세정시스템 및 세정방법
JP6347875B2 (ja) 基板処理システムおよび配管洗浄方法
WO2014118862A1 (ja) オゾン水を用いた洗浄方法及び洗浄装置
CN107230651B (zh) 用于湿式制程的整合式药液槽
JP2013128912A5 (ja) 洗浄処理装置及び洗浄処理方法