JP2014034493A5 - - Google Patents

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Publication number
JP2014034493A5
JP2014034493A5 JP2012176848A JP2012176848A JP2014034493A5 JP 2014034493 A5 JP2014034493 A5 JP 2014034493A5 JP 2012176848 A JP2012176848 A JP 2012176848A JP 2012176848 A JP2012176848 A JP 2012176848A JP 2014034493 A5 JP2014034493 A5 JP 2014034493A5
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JP
Japan
Prior art keywords
hydrogen
argon gas
reaction
amount
oxygen
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JP2012176848A
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English (en)
Japanese (ja)
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JP5896467B2 (ja
JP2014034493A (ja
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Priority to JP2012176848A priority Critical patent/JP5896467B2/ja
Priority claimed from JP2012176848A external-priority patent/JP5896467B2/ja
Priority to KR1020130053013A priority patent/KR102035870B1/ko
Priority to CN201310183012.8A priority patent/CN103569979B/zh
Priority to TW102117621A priority patent/TWI569864B/zh
Publication of JP2014034493A publication Critical patent/JP2014034493A/ja
Publication of JP2014034493A5 publication Critical patent/JP2014034493A5/ja
Application granted granted Critical
Publication of JP5896467B2 publication Critical patent/JP5896467B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012176848A 2012-08-09 2012-08-09 アルゴンガスの精製方法および精製装置 Expired - Fee Related JP5896467B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012176848A JP5896467B2 (ja) 2012-08-09 2012-08-09 アルゴンガスの精製方法および精製装置
KR1020130053013A KR102035870B1 (ko) 2012-08-09 2013-05-10 아르곤 가스의 정제 방법 및 정제 장치
CN201310183012.8A CN103569979B (zh) 2012-08-09 2013-05-16 氩气的纯化方法及纯化装置
TW102117621A TWI569864B (zh) 2012-08-09 2013-05-17 氬氣之純化方法及純化裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012176848A JP5896467B2 (ja) 2012-08-09 2012-08-09 アルゴンガスの精製方法および精製装置

Publications (3)

Publication Number Publication Date
JP2014034493A JP2014034493A (ja) 2014-02-24
JP2014034493A5 true JP2014034493A5 (enExample) 2015-08-27
JP5896467B2 JP5896467B2 (ja) 2016-03-30

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ID=50042791

Family Applications (1)

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JP2012176848A Expired - Fee Related JP5896467B2 (ja) 2012-08-09 2012-08-09 アルゴンガスの精製方法および精製装置

Country Status (4)

Country Link
JP (1) JP5896467B2 (enExample)
KR (1) KR102035870B1 (enExample)
CN (1) CN103569979B (enExample)
TW (1) TWI569864B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015159094A (ja) 2014-02-25 2015-09-03 矢崎総業株式会社 接続端子
JP6304089B2 (ja) * 2015-03-24 2018-04-04 信越半導体株式会社 アルゴンガスの精製方法及びアルゴンガスの回収精製装置
KR101954809B1 (ko) * 2018-04-30 2019-06-11 티이엠씨 주식회사 혼합가스로부터 고순도 네온 회수 방법 및 장치
CN108557787A (zh) * 2018-06-29 2018-09-21 上海联风能源科技有限公司 一种回收粗氩气再提纯方法
JP7453781B2 (ja) * 2019-12-13 2024-03-21 三菱重工業株式会社 製造装置用ガス供給装置、アトマイズ装置、３ｄ積層造形装置、及び積層造形システム
CN115432678B (zh) * 2021-04-21 2023-12-29 上海联风能源科技有限公司 一种高纯度氩气的制备方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5488893A (en) * 1977-12-26 1979-07-14 Nippon Oxygen Co Ltd Method of purifying inert gas
JPS61163106A (ja) * 1985-01-11 1986-07-23 Hitachi Ltd 不活性ガスの回収方法および装置
KR910001996B1 (ko) * 1985-02-09 1991-03-30 가부시기가이샤 히다찌 세이사꾸쇼 불활성 가스의 회수방법 및 장치
JP3496079B2 (ja) * 1993-11-17 2004-02-09 日本酸素株式会社 アルゴンガスの精製方法及び装置
JPH1183309A (ja) * 1997-09-04 1999-03-26 Nippon Air Rikiide Kk アルゴン精製方法及び装置
JP3737900B2 (ja) * 1999-02-10 2006-01-25 エア・ウォーター株式会社 単結晶製造炉からの排ガスアルゴンの精製方法
US7645431B2 (en) * 2007-10-23 2010-01-12 Air Products And Chemicals, Inc. Purification of noble gases using online regeneration of getter beds
US7862645B2 (en) * 2008-02-01 2011-01-04 Air Products And Chemicals, Inc. Removal of gaseous contaminants from argon
JP2009234868A (ja) * 2008-03-27 2009-10-15 Nippon Steel Corp アルゴンガスの精製装置およびその精製方法
TWI476038B (zh) * 2010-02-10 2015-03-11 Sumitomo Seika Chemicals 氬氣之純化方法及純化裝置
TWI478761B (zh) * 2010-02-25 2015-04-01 Sumitomo Seika Chemicals 氬氣之純化方法及純化裝置
JP2012106904A (ja) * 2010-10-29 2012-06-07 Sumitomo Seika Chem Co Ltd アルゴンガスの精製方法および精製装置
JP5500650B2 (ja) * 2010-11-10 2014-05-21 住友精化株式会社 アルゴンガスの精製方法および精製装置

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