JP2013541816A5 - - Google Patents
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- Publication number
- JP2013541816A5 JP2013541816A5 JP2013531778A JP2013531778A JP2013541816A5 JP 2013541816 A5 JP2013541816 A5 JP 2013541816A5 JP 2013531778 A JP2013531778 A JP 2013531778A JP 2013531778 A JP2013531778 A JP 2013531778A JP 2013541816 A5 JP2013541816 A5 JP 2013541816A5
- Authority
- JP
- Japan
- Prior art keywords
- excimer
- electrodes
- ultraviolet
- excimer lamp
- sealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 26
- 238000000034 method Methods 0.000 claims 8
- 239000012530 fluid Substances 0.000 claims 6
- 229910016036 BaF 2 Inorganic materials 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
- JWNBYUSSORDWOT-UHFFFAOYSA-N [Kr]Cl Chemical compound [Kr]Cl JWNBYUSSORDWOT-UHFFFAOYSA-N 0.000 claims 2
- VZPPHXVFMVZRTE-UHFFFAOYSA-N [Kr]F Chemical compound [Kr]F VZPPHXVFMVZRTE-UHFFFAOYSA-N 0.000 claims 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 2
- ISQINHMJILFLAQ-UHFFFAOYSA-N argon hydrofluoride Chemical compound F.[Ar] ISQINHMJILFLAQ-UHFFFAOYSA-N 0.000 claims 2
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 claims 2
- 229910001632 barium fluoride Inorganic materials 0.000 claims 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 2
- 229910052736 halogen Inorganic materials 0.000 claims 2
- 150000002367 halogens Chemical class 0.000 claims 2
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 claims 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- 239000004810 polytetrafluoroethylene Substances 0.000 claims 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 1
- 239000003344 environmental pollutant Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 229910052756 noble gas Inorganic materials 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 231100000719 pollutant Toxicity 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38785610P | 2010-09-29 | 2010-09-29 | |
| US61/387,856 | 2010-09-29 | ||
| PCT/US2011/053751 WO2012050916A2 (en) | 2010-09-29 | 2011-09-28 | Excimer light source |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013541816A JP2013541816A (ja) | 2013-11-14 |
| JP2013541816A5 true JP2013541816A5 (https=) | 2014-11-13 |
| JP6096118B2 JP6096118B2 (ja) | 2017-03-15 |
Family
ID=45938874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013531778A Active JP6096118B2 (ja) | 2010-09-29 | 2011-09-28 | エキシマ光源 |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US8946662B2 (https=) |
| EP (1) | EP2622623A4 (https=) |
| JP (1) | JP6096118B2 (https=) |
| KR (1) | KR102106293B1 (https=) |
| CN (2) | CN110459460B (https=) |
| AU (2) | AU2011314069B2 (https=) |
| CA (2) | CA3123418C (https=) |
| MX (1) | MX2013003437A (https=) |
| RU (1) | RU2592538C2 (https=) |
| WO (1) | WO2012050916A2 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012017779A1 (de) * | 2012-09-07 | 2014-03-13 | Karlsruher Institut für Technologie | Dielektrisch behinderte Entladungs-Lampe |
| CN103227098A (zh) * | 2013-05-15 | 2013-07-31 | 王颂 | 282nm、222nm无极准分子灯 |
| WO2016125708A1 (ja) * | 2015-02-03 | 2016-08-11 | 合同会社紫光技研 | ガス放電装置とそれを使用した平面光源およびそれらの駆動方法 |
| CN205191526U (zh) * | 2015-11-06 | 2016-04-27 | 东莞莹辉灯饰有限公司 | Led净化节能灯 |
| US11614407B2 (en) | 2020-04-20 | 2023-03-28 | Denovo Lighting, Llc | Devices for instant detection and disinfection of aerosol droplet particles using UV light sources |
| US11786622B2 (en) | 2020-05-08 | 2023-10-17 | Ultra-Violet Solutions, Llc | Far UV-C light apparatus |
| JP6948606B1 (ja) * | 2020-08-28 | 2021-10-13 | ウシオ電機株式会社 | エキシマランプ及び光照射装置 |
| WO2022116366A1 (zh) * | 2020-12-04 | 2022-06-09 | 广明源光科技股份有限公司 | 准分子灯 |
| CN113270309A (zh) * | 2021-06-21 | 2021-08-17 | 深圳市大博实业有限公司 | 一种uv准分子灯 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3927342A (en) * | 1969-04-28 | 1975-12-16 | Owens Illinois Inc | Capillary tube gas discharge device |
| EP0402417A1 (de) * | 1988-04-25 | 1990-12-19 | Siemens Aktiengesellschaft | Einrichtung zur vorionisierung an entladungsgepumpten gaslasern, insbesondere zur röntgen-vorionisierung |
| JPH04303549A (ja) * | 1991-03-30 | 1992-10-27 | Toshiba Lighting & Technol Corp | 高周波点灯式放電ランプ |
| JP3291809B2 (ja) * | 1993-01-20 | 2002-06-17 | ウシオ電機株式会社 | 誘電体バリヤ放電ランプを使用した処理方法 |
| JPH09259834A (ja) * | 1996-03-26 | 1997-10-03 | Toshiba Corp | 真空紫外光源 |
| JPH1021880A (ja) * | 1996-07-08 | 1998-01-23 | Toshiba Lighting & Technol Corp | 放電ランプ、照射装置、殺菌装置および水処理装置 |
| RU2120152C1 (ru) * | 1996-12-16 | 1998-10-10 | Общество с ограниченной ответственностью "Микроэлектронные системы" - ООО "МИКС" | Газоразрядная лампа |
| US7006546B2 (en) * | 2000-03-15 | 2006-02-28 | Komatsu Ltd. | Gas laser electrode, laser chamber employing the electrode, and gas laser device |
| AU2002365227A1 (en) * | 2001-11-14 | 2003-09-02 | Blacklight Power, Inc. | Hydrogen power, plasma, and reactor for lasing, and power conversion |
| CN2592631Y (zh) * | 2002-08-28 | 2003-12-17 | 中国科学院等离子体物理研究所 | 准分子紫外光源 |
| EP1550742A4 (en) | 2002-10-10 | 2007-01-03 | Kansai Paint Co Ltd | METHOD FOR PRODUCING A SEMICONDUCTOR FILM AND USE OF SEMICONDUCTOR FILM |
| DE60333792D1 (de) | 2003-01-02 | 2010-09-23 | Ultraviolet Sciences Inc | Mikro-entladungsvorrichtungen und anwendungen |
| GB2399216B (en) * | 2003-03-06 | 2007-05-09 | Quay Technologies Ltd | Ultraviolet light source |
| JP4013923B2 (ja) * | 2003-09-04 | 2007-11-28 | ウシオ電機株式会社 | エキシマランプ |
| WO2005098903A1 (ja) * | 2004-04-08 | 2005-10-20 | Sen Engineering Co., Ltd. | 誘電体バリア放電エキシマ光源 |
| KR20080002851A (ko) * | 2005-04-22 | 2008-01-04 | 호야 칸데오 옵트로닉스 가부시키가이샤 | 엑시머 램프 |
| JP2006302720A (ja) * | 2005-04-22 | 2006-11-02 | Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 | エキシマランプ |
| JP2005317555A (ja) * | 2005-07-12 | 2005-11-10 | Quark Systems Co Ltd | エキシマランプ及びエキシマ照射装置 |
| JP2007088116A (ja) * | 2005-09-21 | 2007-04-05 | Harison Toshiba Lighting Corp | 紫外光照射装置および光洗浄装置 |
| CN101489939B (zh) * | 2006-07-13 | 2011-11-16 | 皇家飞利浦电子股份有限公司 | 包括辐射源模块和冷却装置的流体处理系统 |
| JP4424394B2 (ja) * | 2007-08-31 | 2010-03-03 | ウシオ電機株式会社 | エキシマランプ |
| WO2009139908A1 (en) * | 2008-05-15 | 2009-11-19 | Rutgers, The State University | Fluorescent excimer lamps |
| JP2010056008A (ja) * | 2008-08-29 | 2010-03-11 | Ehime Univ | 無水銀殺菌ランプおよび殺菌装置 |
| WO2011060033A1 (en) | 2009-11-10 | 2011-05-19 | Immunolight, L.L.C. | Up and down coversion systems for production of emitted light from various energy sources including radio frequency, microwave energy and magnetic induction sources for upconversion |
-
2011
- 2011-09-28 JP JP2013531778A patent/JP6096118B2/ja active Active
- 2011-09-28 RU RU2013118110/05A patent/RU2592538C2/ru active
- 2011-09-28 US US13/822,575 patent/US8946662B2/en active Active
- 2011-09-28 EP EP11833068.7A patent/EP2622623A4/en not_active Ceased
- 2011-09-28 CN CN201910748148.6A patent/CN110459460B/zh active Active
- 2011-09-28 CA CA3123418A patent/CA3123418C/en active Active
- 2011-09-28 AU AU2011314069A patent/AU2011314069B2/en active Active
- 2011-09-28 KR KR1020137010922A patent/KR102106293B1/ko active Active
- 2011-09-28 CA CA2812947A patent/CA2812947C/en active Active
- 2011-09-28 WO PCT/US2011/053751 patent/WO2012050916A2/en not_active Ceased
- 2011-09-28 MX MX2013003437A patent/MX2013003437A/es active IP Right Grant
- 2011-09-28 CN CN201180051962.4A patent/CN103415338B/zh active Active
-
2015
- 2015-01-30 US US14/609,757 patent/US9865448B2/en active Active
- 2015-07-27 AU AU2015206251A patent/AU2015206251B2/en active Active
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