JP2013539502A5 - - Google Patents

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Publication number
JP2013539502A5
JP2013539502A5 JP2013521807A JP2013521807A JP2013539502A5 JP 2013539502 A5 JP2013539502 A5 JP 2013539502A5 JP 2013521807 A JP2013521807 A JP 2013521807A JP 2013521807 A JP2013521807 A JP 2013521807A JP 2013539502 A5 JP2013539502 A5 JP 2013539502A5
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JP
Japan
Prior art keywords
inorganic layer
thin film
initial thickness
molar volume
film according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013521807A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013539502A (ja
JP5816281B2 (ja
Filing date
Publication date
Priority claimed from US12/879,578 external-priority patent/US20120028011A1/en
Application filed filed Critical
Publication of JP2013539502A publication Critical patent/JP2013539502A/ja
Publication of JP2013539502A5 publication Critical patent/JP2013539502A5/ja
Application granted granted Critical
Publication of JP5816281B2 publication Critical patent/JP5816281B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013521807A 2010-07-27 2011-07-13 自己不動態化する機械的に安定な気密薄膜 Expired - Fee Related JP5816281B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US36801110P 2010-07-27 2010-07-27
US61/368,011 2010-07-27
US12/879,578 2010-09-10
US12/879,578 US20120028011A1 (en) 2010-07-27 2010-09-10 Self-passivating mechanically stable hermetic thin film
PCT/US2011/043772 WO2012018487A1 (en) 2010-07-27 2011-07-13 Self-passivating mechanically stable hermetic thin film

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015146729A Division JP6180472B2 (ja) 2010-07-27 2015-07-24 自己不動態化する機械的に安定な気密薄膜

Publications (3)

Publication Number Publication Date
JP2013539502A JP2013539502A (ja) 2013-10-24
JP2013539502A5 true JP2013539502A5 (enExample) 2015-09-17
JP5816281B2 JP5816281B2 (ja) 2015-11-18

Family

ID=44514994

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2013521807A Expired - Fee Related JP5816281B2 (ja) 2010-07-27 2011-07-13 自己不動態化する機械的に安定な気密薄膜
JP2015146729A Expired - Fee Related JP6180472B2 (ja) 2010-07-27 2015-07-24 自己不動態化する機械的に安定な気密薄膜

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2015146729A Expired - Fee Related JP6180472B2 (ja) 2010-07-27 2015-07-24 自己不動態化する機械的に安定な気密薄膜

Country Status (7)

Country Link
US (1) US20120028011A1 (enExample)
EP (1) EP2598667A1 (enExample)
JP (2) JP5816281B2 (enExample)
KR (1) KR101801425B1 (enExample)
CN (1) CN103025911B (enExample)
TW (1) TWI550111B (enExample)
WO (1) WO2012018487A1 (enExample)

Families Citing this family (24)

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US10158057B2 (en) 2010-10-28 2018-12-18 Corning Incorporated LED lighting devices
KR101931177B1 (ko) * 2012-03-02 2018-12-21 삼성디스플레이 주식회사 유기 발광 표시 장치
TW201343940A (zh) * 2012-03-14 2013-11-01 Corning Inc 用於形成密封阻障層之濺射靶材與相關濺射方法
JP5776630B2 (ja) * 2012-06-01 2015-09-09 日立金属株式会社 銅系材料及びその製造方法
DE102012109207B4 (de) * 2012-09-28 2018-05-09 Osram Oled Gmbh Verfahren und Vorrichtung zum Herstellen eines optoelektronischen Bauelementes
US10017849B2 (en) 2012-11-29 2018-07-10 Corning Incorporated High rate deposition systems and processes for forming hermetic barrier layers
US9202996B2 (en) 2012-11-30 2015-12-01 Corning Incorporated LED lighting devices with quantum dot glass containment plates
US9666763B2 (en) 2012-11-30 2017-05-30 Corning Incorporated Glass sealing with transparent materials having transient absorption properties
JP5765323B2 (ja) * 2012-12-07 2015-08-19 日立金属株式会社 銅ボンディングワイヤ及びその製造方法
KR20140077020A (ko) * 2012-12-13 2014-06-23 삼성디스플레이 주식회사 스퍼터링 장치
KR101434367B1 (ko) * 2012-12-14 2014-08-27 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조방법
US8754434B1 (en) 2013-01-28 2014-06-17 Corning Incorporated Flexible hermetic thin film with light extraction layer
KR20140120541A (ko) * 2013-04-03 2014-10-14 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
KR101428378B1 (ko) 2013-04-05 2014-08-07 현대자동차주식회사 커먼레일 시스템용 고압펌프의 윤활장치
KR102072805B1 (ko) * 2013-04-15 2020-02-04 삼성디스플레이 주식회사 유기발광표시장치 및 그의 제조방법
KR102096053B1 (ko) * 2013-07-25 2020-04-02 삼성디스플레이 주식회사 유기발광표시장치의 제조방법
KR102093392B1 (ko) * 2013-07-25 2020-03-26 삼성디스플레이 주식회사 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법
KR20150012541A (ko) * 2013-07-25 2015-02-04 삼성디스플레이 주식회사 대향 타겟 스퍼터링 장치, 이를 이용한 유기발광표시장치 및 그 제조방법
KR20150012540A (ko) * 2013-07-25 2015-02-04 삼성디스플레이 주식회사 유기발광표시장치의 제조방법.
WO2015123254A1 (en) 2014-02-13 2015-08-20 Corning Incorporated Ultra low melting glass frit and fibers
JP6020972B2 (ja) * 2015-06-11 2016-11-02 日立金属株式会社 銅ボンディングワイヤ
WO2017066261A2 (en) * 2015-10-13 2017-04-20 Alphabet Energy, Inc. Oxidation and sublimation prevention for thermoelectric devices
FR3061404B1 (fr) * 2016-12-27 2022-09-23 Packaging Sip Procede de fabrication collective de modules electroniques hermetiques
CN110077073B (zh) * 2019-04-03 2021-09-14 乐凯胶片股份有限公司 一种聚烯烃膜、制备方法及太阳能电池背板

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JPH0664935B2 (ja) * 1985-10-18 1994-08-22 ティーディーケイ株式会社 透明導電膜およびその形成方法
JPH07310184A (ja) * 1994-05-13 1995-11-28 Mitsubishi Heavy Ind Ltd ＳｉＯＸ 蒸着フィルムの後処理方法及びその装置
JPH08197675A (ja) * 1995-01-27 1996-08-06 Toppan Printing Co Ltd 酸化珪素蒸着フィルム及びその製造方法
JP4371539B2 (ja) * 2000-05-31 2009-11-25 電気化学工業株式会社 酸化けい素質蒸着膜の製造方法
JP4235551B2 (ja) * 2001-10-02 2009-03-11 独立行政法人産業技術総合研究所 金属酸化物薄膜及びその製造方法
EP1466997B1 (en) * 2003-03-10 2012-02-22 OSRAM Opto Semiconductors GmbH Method for forming and arrangement of barrier layers on a polymeric substrate
JP3883543B2 (ja) * 2003-04-16 2007-02-21 新光電気工業株式会社 導体基材及び半導体装置
JP4398265B2 (ja) * 2004-01-27 2010-01-13 三菱樹脂株式会社 ガスバリア性フィルム及びガスバリア性積層体
US7722929B2 (en) * 2005-08-18 2010-05-25 Corning Incorporated Sealing technique for decreasing the time it takes to hermetically seal a device and the resulting hermetically sealed device
US20080206589A1 (en) * 2007-02-28 2008-08-28 Bruce Gardiner Aitken Low tempertature sintering using Sn2+ containing inorganic materials to hermetically seal a device
US20070040501A1 (en) 2005-08-18 2007-02-22 Aitken Bruce G Method for inhibiting oxygen and moisture degradation of a device and the resulting device
WO2008073485A2 (en) * 2006-12-12 2008-06-19 Quantum Leap Packaging, Inc. Plastic electronic component package
JP2009037811A (ja) * 2007-07-31 2009-02-19 Sumitomo Chemical Co Ltd 有機ｅｌ装置の製造方法

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