JP2007258634A5 - - Google Patents

Download PDF

Info

Publication number
JP2007258634A5
JP2007258634A5 JP2006084543A JP2006084543A JP2007258634A5 JP 2007258634 A5 JP2007258634 A5 JP 2007258634A5 JP 2006084543 A JP2006084543 A JP 2006084543A JP 2006084543 A JP2006084543 A JP 2006084543A JP 2007258634 A5 JP2007258634 A5 JP 2007258634A5
Authority
JP
Japan
Prior art keywords
film
sol
gel
ceramic
samples
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006084543A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007258634A (ja
JP5014656B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2006084543A external-priority patent/JP5014656B2/ja
Priority to JP2006084543A priority Critical patent/JP5014656B2/ja
Priority to PCT/JP2007/053002 priority patent/WO2007111058A1/ja
Priority to US12/224,784 priority patent/US20090101070A1/en
Priority to KR1020087025800A priority patent/KR101030937B1/ko
Priority to CNA2007800109093A priority patent/CN101432461A/zh
Publication of JP2007258634A publication Critical patent/JP2007258634A/ja
Publication of JP2007258634A5 publication Critical patent/JP2007258634A5/ja
Publication of JP5014656B2 publication Critical patent/JP5014656B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

JP2006084543A 2006-03-27 2006-03-27 プラズマ処理装置用部材およびその製造方法 Expired - Fee Related JP5014656B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006084543A JP5014656B2 (ja) 2006-03-27 2006-03-27 プラズマ処理装置用部材およびその製造方法
CNA2007800109093A CN101432461A (zh) 2006-03-27 2007-02-20 等离子体处理装置用构件及其制造方法
US12/224,784 US20090101070A1 (en) 2006-03-27 2007-02-20 Member for a Plasma Processing Apparatus and Method of Manufacturing the Same
KR1020087025800A KR101030937B1 (ko) 2006-03-27 2007-02-20 플라즈마 처리 장치용 부재 및 그 제조 방법
PCT/JP2007/053002 WO2007111058A1 (ja) 2006-03-27 2007-02-20 プラズマ処理装置用部材およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006084543A JP5014656B2 (ja) 2006-03-27 2006-03-27 プラズマ処理装置用部材およびその製造方法

Publications (3)

Publication Number Publication Date
JP2007258634A JP2007258634A (ja) 2007-10-04
JP2007258634A5 true JP2007258634A5 (enExample) 2009-03-26
JP5014656B2 JP5014656B2 (ja) 2012-08-29

Family

ID=38540991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006084543A Expired - Fee Related JP5014656B2 (ja) 2006-03-27 2006-03-27 プラズマ処理装置用部材およびその製造方法

Country Status (5)

Country Link
US (1) US20090101070A1 (enExample)
JP (1) JP5014656B2 (enExample)
KR (1) KR101030937B1 (enExample)
CN (1) CN101432461A (enExample)
WO (1) WO2007111058A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5411460B2 (ja) * 2008-06-24 2014-02-12 一般財団法人ファインセラミックスセンター バリア性能評価方法及びバリア性能評価装置
FR2988404B1 (fr) * 2012-03-21 2015-02-13 Centre Techn Ind Mecanique Procede de depot d'un revetement anticorrosion
US9551062B2 (en) 2013-03-28 2017-01-24 Osg Corporation Hard film for machining tools and hard film-coated metal machining tool
KR101290539B1 (ko) * 2013-04-15 2013-07-31 와이엠씨 주식회사 아노다이징 필름 제조 방법
CN103639157B (zh) * 2013-11-15 2016-06-08 广州福耀玻璃有限公司 玻璃附件的表面处理方法
TW201546007A (zh) * 2014-06-11 2015-12-16 Creating Nano Technologies Inc 玻璃結構之製造方法與設備
TWI714965B (zh) * 2018-02-15 2021-01-01 日商京瓷股份有限公司 電漿處理裝置用構件及具備其之電漿處理裝置
CN113272474A (zh) * 2019-01-10 2021-08-17 日本碍子株式会社 散热部件
JP2020132947A (ja) * 2019-02-20 2020-08-31 日本特殊陶業株式会社 膜付き部材及びその製造方法
WO2023275958A1 (ja) * 2021-06-28 2023-01-05 株式会社日立ハイテク 内壁部材の再生方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3527839B2 (ja) * 1998-01-28 2004-05-17 京セラ株式会社 半導体素子製造装置用部材
JP3510993B2 (ja) * 1999-12-10 2004-03-29 トーカロ株式会社 プラズマ処理容器内部材およびその製造方法
TW593196B (en) * 2001-11-01 2004-06-21 Toray Industries Photosensitive ceramics composition and multi-layer substrate using it
SG107103A1 (en) * 2002-05-24 2004-11-29 Ntu Ventures Private Ltd Process for producing nanocrystalline composites
US7311797B2 (en) * 2002-06-27 2007-12-25 Lam Research Corporation Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor
US7780786B2 (en) * 2002-11-28 2010-08-24 Tokyo Electron Limited Internal member of a plasma processing vessel
JP4486372B2 (ja) * 2003-02-07 2010-06-23 東京エレクトロン株式会社 プラズマ処理装置
CN100418187C (zh) * 2003-02-07 2008-09-10 东京毅力科创株式会社 等离子体处理装置、环形部件和等离子体处理方法
JP4603254B2 (ja) * 2003-10-23 2010-12-22 日本曹達株式会社 金属酸化物ゾル液の製造方法、結晶質金属複酸化物ゾルおよび金属酸化物膜
JP2005217350A (ja) * 2004-02-02 2005-08-11 Toto Ltd 耐プラズマ性を有する半導体製造装置用部材およびその作製方法
US20080029032A1 (en) * 2006-08-01 2008-02-07 Sun Jennifer Y Substrate support with protective layer for plasma resistance

Similar Documents

Publication Publication Date Title
JP6682188B2 (ja) 硬質反射防止膜並びにその製造及びその使用
JP6639101B2 (ja) 耐引掻性膜、耐引掻性膜を有する基材及びその製造法
TWI504921B (zh) 藍寶石上之疏油性塗層
FI10853U1 (fi) Hopeakoru, -kolikko, -mitali, -ruokailuväline tai -koriste-esine
KR101524271B1 (ko) 복수 개의 박막으로 이루어진 지문 방지층의 조성물과 그 제조 방법.
WO2010056338A3 (en) Protective coatings resistant to reactive plasma processing
WO2014133929A3 (en) Window units made using ceramic frit that dissolves physical vapor deposition (pvd) deposited coatings, and/or associated methods
JP2014224979A5 (enExample)
JP2015536892A5 (enExample)
JP2007258634A5 (enExample)
CN102899610A (zh) 镀膜件及其制造方法
ATE543879T1 (de) Füller, herstellungsverfahren dafür und kosmetikprodukt
RU2019105544A (ru) Подложка, снабженная набором, обладающим тепловыми свойствами, содержащим по меньшей мере один слой, содержащий нитрид кремния-циркония, обогащенный цирконием, ее применение и ее изготовление
WO2011092017A8 (de) Verfahren zur herstellung eines beschichteten gegenstands mit texturätzen
RU2011144649A (ru) Низкоэмиссионное стекло и способ его получения
TWI372140B (en) Method of producing transparent titanium oxide coatings having a rutile structure
RU2012148723A (ru) Способ изготовления покрытого изделия, имеющего антибактериальное и/или противогрибковое покрытие, и конечный продукт
CN102896825A (zh) 镀膜件及其制造方法
WO2018236744A3 (en) REFRACTORY ARTICLE, COATING COMPOSITION FOR PREVENTING REDOX REACTION, AND METHOD FOR MANUFACTURING THE REFRACTORY ARTICLE
JP2014534143A5 (enExample)
CN105209568B (zh) 由多个薄膜形成的防指纹层的组合物及其制备方法
EA034384B1 (ru) Остекление, содержащее защитное покрытие
JP2012506950A5 (enExample)
CN102896842A (zh) 镀膜件及其制造方法
CN104267452B (zh) 一种复合有基于锡膜镜面膜层的反射镜的制备方法