JP2013536578A5 - - Google Patents
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- Publication number
- JP2013536578A5 JP2013536578A5 JP2013523375A JP2013523375A JP2013536578A5 JP 2013536578 A5 JP2013536578 A5 JP 2013536578A5 JP 2013523375 A JP2013523375 A JP 2013523375A JP 2013523375 A JP2013523375 A JP 2013523375A JP 2013536578 A5 JP2013536578 A5 JP 2013536578A5
- Authority
- JP
- Japan
- Prior art keywords
- ring
- inner ring
- substrate
- carrier head
- mounting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 46
- 238000005498 polishing Methods 0.000 claims 30
- 239000000126 substance Substances 0.000 claims 6
- 238000000034 method Methods 0.000 claims 3
- 239000000463 material Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US37164410P | 2010-08-06 | 2010-08-06 | |
| US61/371,644 | 2010-08-06 | ||
| US201161479271P | 2011-04-26 | 2011-04-26 | |
| US61/479,271 | 2011-04-26 | ||
| PCT/US2011/046828 WO2012019144A2 (en) | 2010-08-06 | 2011-08-05 | Substrate edge tuning with retaining ring |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013134227A Division JP5924739B2 (ja) | 2010-08-06 | 2013-06-26 | 内側保定リングおよび外側保定リング |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013536578A JP2013536578A (ja) | 2013-09-19 |
| JP2013536578A5 true JP2013536578A5 (https=) | 2014-10-09 |
| JP6073222B2 JP6073222B2 (ja) | 2017-02-01 |
Family
ID=45556486
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013523375A Active JP6073222B2 (ja) | 2010-08-06 | 2011-08-05 | 保定リングを用いた基板縁部調整 |
| JP2013134227A Active JP5924739B2 (ja) | 2010-08-06 | 2013-06-26 | 内側保定リングおよび外側保定リング |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013134227A Active JP5924739B2 (ja) | 2010-08-06 | 2013-06-26 | 内側保定リングおよび外側保定リング |
Country Status (8)
| Country | Link |
|---|---|
| US (5) | US20120034848A1 (https=) |
| EP (2) | EP2601677B1 (https=) |
| JP (2) | JP6073222B2 (https=) |
| KR (3) | KR101814185B1 (https=) |
| CN (2) | CN103098182B (https=) |
| SG (2) | SG10201506082UA (https=) |
| TW (2) | TWI574785B (https=) |
| WO (1) | WO2012019144A2 (https=) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101814185B1 (ko) | 2010-08-06 | 2018-01-02 | 어플라이드 머티어리얼스, 인코포레이티드 | 유지 링에 의한 기판 엣지 튜닝 |
| US20130102152A1 (en) * | 2011-10-20 | 2013-04-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device |
| JP5976522B2 (ja) | 2012-05-31 | 2016-08-23 | 株式会社荏原製作所 | 研磨装置および研磨方法 |
| US10702972B2 (en) | 2012-05-31 | 2020-07-07 | Ebara Corporation | Polishing apparatus |
| US10532441B2 (en) * | 2012-11-30 | 2020-01-14 | Applied Materials, Inc. | Three-zone carrier head and flexible membrane |
| WO2014163735A1 (en) * | 2013-03-13 | 2014-10-09 | Applied Materials, Inc. | Reinforcement ring for carrier head |
| JP6403981B2 (ja) * | 2013-11-13 | 2018-10-10 | 株式会社荏原製作所 | 基板保持装置、研磨装置、研磨方法、およびリテーナリング |
| KR102173323B1 (ko) * | 2014-06-23 | 2020-11-04 | 삼성전자주식회사 | 캐리어 헤드, 화학적 기계식 연마 장치 및 웨이퍼 연마 방법 |
| JP2016155188A (ja) * | 2015-02-24 | 2016-09-01 | 株式会社荏原製作所 | リテーナリング、基板保持装置、研磨装置およびリテーナリングのメンテナンス方法 |
| US9488218B2 (en) | 2015-03-30 | 2016-11-08 | Honeywell International Inc. | Pilot ring with controlled axial roll |
| JP6392193B2 (ja) * | 2015-10-14 | 2018-09-19 | 株式会社荏原製作所 | 基板保持装置および基板研磨装置ならびに基板保持装置の製造方法 |
| US10029346B2 (en) * | 2015-10-16 | 2018-07-24 | Applied Materials, Inc. | External clamp ring for a chemical mechanical polishing carrier head |
| US10160091B2 (en) * | 2015-11-16 | 2018-12-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | CMP polishing head design for improving removal rate uniformity |
| US12285839B2 (en) * | 2016-04-01 | 2025-04-29 | Joon Mo Kang | Carrier head for chemical mechanical polishing apparatus comprising substrate receiving member |
| JP7021863B2 (ja) * | 2017-03-30 | 2022-02-17 | 富士紡ホールディングス株式会社 | 保持具 |
| CN109551365B (zh) * | 2019-01-15 | 2023-12-08 | 合肥哈工普利世智能装备有限公司 | 等离子抛光夹持组件、等离子抛光机及其抛光方法 |
| TWI840511B (zh) * | 2019-02-28 | 2024-05-01 | 美商應用材料股份有限公司 | 用於化學機械研磨承載頭的固定器 |
| US11325223B2 (en) | 2019-08-23 | 2022-05-10 | Applied Materials, Inc. | Carrier head with segmented substrate chuck |
| US11511390B2 (en) | 2019-08-30 | 2022-11-29 | Applied Materials, Inc. | Pivotable substrate retaining ring |
| EP4171875A4 (en) | 2020-06-29 | 2024-11-20 | Applied Materials, Inc. | Polishing carrier head with multiple angular pressurizable zones |
| WO2022040459A1 (en) * | 2020-08-21 | 2022-02-24 | Applied Materials, Inc. | Improved retaining ring design |
| US11440159B2 (en) * | 2020-09-28 | 2022-09-13 | Applied Materials, Inc. | Edge load ring |
| US11623321B2 (en) * | 2020-10-14 | 2023-04-11 | Applied Materials, Inc. | Polishing head retaining ring tilting moment control |
| JP7536601B2 (ja) * | 2020-11-04 | 2024-08-20 | 株式会社荏原製作所 | 研磨ヘッドおよび研磨装置 |
| US11660721B2 (en) * | 2021-02-18 | 2023-05-30 | Applied Materials, Inc. | Dual loading retaining ring |
| WO2022187249A1 (en) | 2021-03-04 | 2022-09-09 | Applied Materials, Inc. | Polishing carrier head with floating edge control |
| KR102556166B1 (ko) | 2022-01-28 | 2023-07-19 | 지앤에스건설 주식회사 | 플로팅 인테리어 계단 시공방법 및 그 방법으로 시공된 플로팅 인테리어 계단 |
| US20230356355A1 (en) * | 2022-05-03 | 2023-11-09 | Applied Materials, Inc. | Polishing head with local inner ring downforce control |
| US20230356354A1 (en) * | 2022-05-03 | 2023-11-09 | Applied Materials, Inc. | Compliant inner ring for a chemical mechanical polishing system |
| WO2023229658A1 (en) * | 2022-05-27 | 2023-11-30 | Applied Materials, Inc. | Clamping retainer for chemical mechanical polishing and method of operation |
| KR102630907B1 (ko) | 2022-08-24 | 2024-01-30 | 임형남 | 이중나선계단 다가구주택 |
| US20250100105A1 (en) * | 2023-09-27 | 2025-03-27 | Applied Materials, Inc. | Cmp inner ring in smart head |
| CN117484382A (zh) * | 2023-11-14 | 2024-02-02 | 北京子牛亦东科技有限公司 | 一种用于化学机械研磨设备的研磨头的隔膜 |
Family Cites Families (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW353203B (en) * | 1995-04-10 | 1999-02-21 | Matsushita Electric Industrial Co Ltd | Apparatus for holding substrate to be polished |
| US5795215A (en) * | 1995-06-09 | 1998-08-18 | Applied Materials, Inc. | Method and apparatus for using a retaining ring to control the edge effect |
| US5643061A (en) * | 1995-07-20 | 1997-07-01 | Integrated Process Equipment Corporation | Pneumatic polishing head for CMP apparatus |
| US5738574A (en) | 1995-10-27 | 1998-04-14 | Applied Materials, Inc. | Continuous processing system for chemical mechanical polishing |
| JPH09321002A (ja) * | 1996-05-31 | 1997-12-12 | Komatsu Electron Metals Co Ltd | 半導体ウェハの研磨方法およびその研磨用テンプレー ト |
| US6019670A (en) * | 1997-03-10 | 2000-02-01 | Applied Materials, Inc. | Method and apparatus for conditioning a polishing pad in a chemical mechanical polishing system |
| US6110025A (en) * | 1997-05-07 | 2000-08-29 | Obsidian, Inc. | Containment ring for substrate carrier apparatus |
| EP0881039B1 (en) * | 1997-05-28 | 2003-04-16 | Tokyo Seimitsu Co.,Ltd. | Wafer polishing apparatus with retainer ring |
| US6116992A (en) * | 1997-12-30 | 2000-09-12 | Applied Materials, Inc. | Substrate retaining ring |
| KR100550034B1 (ko) * | 1998-04-06 | 2006-02-08 | 가부시키가이샤 에바라 세이사꾸쇼 | 폴리싱장치 |
| US6143127A (en) * | 1998-05-14 | 2000-11-07 | Applied Materials, Inc. | Carrier head with a retaining ring for a chemical mechanical polishing system |
| US6436228B1 (en) | 1998-05-15 | 2002-08-20 | Applied Materials, Inc. | Substrate retainer |
| US20020173242A1 (en) * | 1999-04-19 | 2002-11-21 | Mitsubishi Materials Corporation | Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring |
| TW467795B (en) * | 1999-03-15 | 2001-12-11 | Mitsubishi Materials Corp | Wafer transporting device, wafer polishing device and method for making wafers |
| US6527624B1 (en) * | 1999-03-26 | 2003-03-04 | Applied Materials, Inc. | Carrier head for providing a polishing slurry |
| KR100546288B1 (ko) * | 1999-04-10 | 2006-01-26 | 삼성전자주식회사 | 화학 기계적 폴리싱 장치 |
| JP3873557B2 (ja) * | 2000-01-07 | 2007-01-24 | 株式会社日立製作所 | 半導体装置の製造方法 |
| US6517422B2 (en) * | 2000-03-07 | 2003-02-11 | Toshiba Ceramics Co., Ltd. | Polishing apparatus and method thereof |
| US6375549B1 (en) * | 2000-03-17 | 2002-04-23 | Motorola, Inc. | Polishing head for wafer, and method for polishing |
| US6558232B1 (en) * | 2000-05-12 | 2003-05-06 | Multi-Planar Technologies, Inc. | System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal control |
| US6602114B1 (en) * | 2000-05-19 | 2003-08-05 | Applied Materials Inc. | Multilayer retaining ring for chemical mechanical polishing |
| JP2002018709A (ja) * | 2000-07-05 | 2002-01-22 | Tokyo Seimitsu Co Ltd | ウェーハ研磨装置 |
| US6857945B1 (en) | 2000-07-25 | 2005-02-22 | Applied Materials, Inc. | Multi-chamber carrier head with a flexible membrane |
| TWI261009B (en) * | 2001-05-02 | 2006-09-01 | Hitoshi Suwabe | Polishing machine |
| US6872130B1 (en) * | 2001-12-28 | 2005-03-29 | Applied Materials Inc. | Carrier head with non-contact retainer |
| US6916226B2 (en) * | 2002-05-28 | 2005-07-12 | Ebara Technologies, Inc. | Chemical mechanical polishing apparatus having a stepped retaining ring and method for use thereof |
| TWM255104U (en) * | 2003-02-05 | 2005-01-11 | Applied Materials Inc | Retaining ring with flange for chemical mechanical polishing |
| JP2007537052A (ja) * | 2004-05-13 | 2007-12-20 | アプライド マテリアルズ インコーポレイテッド | 導電部を備えた保持リング |
| CN101137464A (zh) | 2005-04-12 | 2008-03-05 | 日本精密电子株式会社 | Cmp装置用挡圈及其制造方法、以及cmp装置 |
| US7186171B2 (en) * | 2005-04-22 | 2007-03-06 | Applied Materials, Inc. | Composite retaining ring |
| KR200395968Y1 (ko) * | 2005-06-16 | 2005-09-15 | 주식회사 윌비에스엔티 | 화학적기계 연마장치의 리테이너 링 |
| US7198548B1 (en) * | 2005-09-30 | 2007-04-03 | Applied Materials, Inc. | Polishing apparatus and method with direct load platen |
| US7654888B2 (en) * | 2006-11-22 | 2010-02-02 | Applied Materials, Inc. | Carrier head with retaining ring and carrier ring |
| US7575504B2 (en) * | 2006-11-22 | 2009-08-18 | Applied Materials, Inc. | Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly |
| US7727055B2 (en) * | 2006-11-22 | 2010-06-01 | Applied Materials, Inc. | Flexible membrane for carrier head |
| US7699688B2 (en) * | 2006-11-22 | 2010-04-20 | Applied Materials, Inc. | Carrier ring for carrier head |
| JP2008302464A (ja) | 2007-06-07 | 2008-12-18 | Renesas Technology Corp | 研磨装置およびそれを用いた半導体装置の製造方法 |
| JP2008307674A (ja) * | 2007-06-18 | 2008-12-25 | Tokyo Seimitsu Co Ltd | 分割加圧型リテーナリング |
| JP5199691B2 (ja) * | 2008-02-13 | 2013-05-15 | 株式会社荏原製作所 | 研磨装置 |
| US7749052B2 (en) * | 2008-09-08 | 2010-07-06 | Applied Materials, Inc. | Carrier head using flexure restraints for retaining ring alignment |
| KR101814185B1 (ko) | 2010-08-06 | 2018-01-02 | 어플라이드 머티어리얼스, 인코포레이티드 | 유지 링에 의한 기판 엣지 튜닝 |
| US20130102152A1 (en) * | 2011-10-20 | 2013-04-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device |
-
2011
- 2011-08-05 KR KR1020137006070A patent/KR101814185B1/ko active Active
- 2011-08-05 WO PCT/US2011/046828 patent/WO2012019144A2/en not_active Ceased
- 2011-08-05 CN CN201180044017.1A patent/CN103098182B/zh active Active
- 2011-08-05 US US13/204,541 patent/US20120034848A1/en not_active Abandoned
- 2011-08-05 US US13/204,571 patent/US8721391B2/en active Active
- 2011-08-05 JP JP2013523375A patent/JP6073222B2/ja active Active
- 2011-08-05 KR KR1020137005683A patent/KR101701870B1/ko active Active
- 2011-08-05 EP EP11815393.1A patent/EP2601677B1/en active Active
- 2011-08-05 SG SG10201506082UA patent/SG10201506082UA/en unknown
- 2011-08-05 EP EP18181304.9A patent/EP3406402B1/en active Active
- 2011-08-05 SG SG2013009766A patent/SG187782A1/en unknown
- 2011-08-05 TW TW102108272A patent/TWI574785B/zh active
- 2011-08-05 CN CN201310170453.4A patent/CN103252715B/zh active Active
- 2011-08-05 KR KR1020177037347A patent/KR101882708B1/ko active Active
- 2011-08-05 TW TW100127991A patent/TWI540021B/zh active
-
2013
- 2013-02-08 US US13/762,963 patent/US8840446B2/en active Active
- 2013-06-26 JP JP2013134227A patent/JP5924739B2/ja active Active
-
2015
- 2015-12-03 US US14/958,814 patent/US10022837B2/en active Active
-
2018
- 2018-06-25 US US16/017,689 patent/US11173579B2/en active Active
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