JP2013534692A5 - - Google Patents
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- Publication number
- JP2013534692A5 JP2013534692A5 JP2013511720A JP2013511720A JP2013534692A5 JP 2013534692 A5 JP2013534692 A5 JP 2013534692A5 JP 2013511720 A JP2013511720 A JP 2013511720A JP 2013511720 A JP2013511720 A JP 2013511720A JP 2013534692 A5 JP2013534692 A5 JP 2013534692A5
- Authority
- JP
- Japan
- Prior art keywords
- optical
- detection system
- radiation
- cathodoluminescence detection
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 281
- 230000005855 radiation Effects 0.000 claims description 119
- 239000013307 optical fiber Substances 0.000 claims description 112
- 238000000080 cathodoluminescence detection Methods 0.000 claims description 68
- 239000002245 particle Substances 0.000 claims description 34
- 238000004458 analytical method Methods 0.000 claims description 17
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 7
- 241000252073 Anguilliformes Species 0.000 claims description 3
- 238000005430 electron energy loss spectroscopy Methods 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 2
- 230000003750 conditioning effect Effects 0.000 claims 1
- 230000001902 propagating effect Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 description 49
- 238000010586 diagram Methods 0.000 description 18
- 230000003595 spectral effect Effects 0.000 description 12
- 239000006185 dispersion Substances 0.000 description 9
- 238000010894 electron beam technology Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 239000000835 fiber Substances 0.000 description 5
- 230000001419 dependent effect Effects 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000005136 cathodoluminescence Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000004936 stimulating effect Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1054109 | 2010-05-27 | ||
| FR1054109A FR2960699B1 (fr) | 2010-05-27 | 2010-05-27 | Systeme de detection de cathodoluminescence souple et microscope mettant en oeuvre un tel systeme. |
| PCT/FR2011/050986 WO2011148072A1 (fr) | 2010-05-27 | 2011-04-29 | Systeme de detection de cathodoluminescence souple et microscope mettant en oeuvre un tel systeme |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015015903A Division JP5947928B2 (ja) | 2010-05-27 | 2015-01-29 | 順応性のあるカソードルミネッセンス検出システム及びそのようなシステムを採用したマイクロスコープ |
| JP2015211726A Division JP6208198B2 (ja) | 2010-05-27 | 2015-10-28 | 順応性のあるカソードルミネッセンス検出システム及びそのようなシステムを採用した顕微鏡 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013534692A JP2013534692A (ja) | 2013-09-05 |
| JP2013534692A5 true JP2013534692A5 (enExample) | 2015-07-02 |
| JP5833109B2 JP5833109B2 (ja) | 2015-12-16 |
Family
ID=43127317
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013511720A Active JP5833109B2 (ja) | 2010-05-27 | 2011-04-29 | 順応性のあるカソードルミネッセンス検出システム及びそのようなシステムを採用したマイクロスコープ |
| JP2015015903A Active JP5947928B2 (ja) | 2010-05-27 | 2015-01-29 | 順応性のあるカソードルミネッセンス検出システム及びそのようなシステムを採用したマイクロスコープ |
| JP2015211726A Active JP6208198B2 (ja) | 2010-05-27 | 2015-10-28 | 順応性のあるカソードルミネッセンス検出システム及びそのようなシステムを採用した顕微鏡 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015015903A Active JP5947928B2 (ja) | 2010-05-27 | 2015-01-29 | 順応性のあるカソードルミネッセンス検出システム及びそのようなシステムを採用したマイクロスコープ |
| JP2015211726A Active JP6208198B2 (ja) | 2010-05-27 | 2015-10-28 | 順応性のあるカソードルミネッセンス検出システム及びそのようなシステムを採用した顕微鏡 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10157726B2 (enExample) |
| EP (1) | EP2577706B1 (enExample) |
| JP (3) | JP5833109B2 (enExample) |
| FR (1) | FR2960699B1 (enExample) |
| WO (1) | WO2011148072A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7141874B2 (ja) * | 2017-09-29 | 2022-09-26 | 株式会社堀場製作所 | ルミネッセンス採光装置 |
| CN107703060B (zh) * | 2017-10-09 | 2020-12-15 | 苏州市光生环境科技有限公司 | 一种用于大气红外检测装置的调节支架 |
| CN108007488B (zh) * | 2017-11-29 | 2020-04-28 | 赫立科技（成都）有限公司 | 一种用于真空腔室内的位置调节装置 |
| JP7194202B2 (ja) * | 2018-05-30 | 2022-12-21 | ガタン インコーポレイテッド | 波長分解され角度分解されたカソードルミネッセンスのための装置および方法 |
| US11688581B2 (en) * | 2020-04-07 | 2023-06-27 | Gatan, Inc. | Apparatus for transmission electron microscopy cathodoluminescence |
| EP4165675A1 (en) * | 2020-06-10 | 2023-04-19 | ASML Netherlands B.V. | Replaceable module for a charged particle apparatus |
| EP3971938A1 (en) * | 2020-09-22 | 2022-03-23 | ASML Netherlands B.V. | Replaceable module for a charged particle apparatus |
| BR102020015402A2 (pt) * | 2020-07-28 | 2022-02-08 | Universidade Estadual De Campinas - Unicamp | Sistema de detecção de luz para microscópios de varredura de sonda |
| US11211223B1 (en) * | 2020-08-25 | 2021-12-28 | Fei Company | System and method for simultaneous phase contrast imaging and electron energy-loss spectroscopy |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS614348U (ja) * | 1984-06-15 | 1986-01-11 | 株式会社日立製作所 | カソ−ドルミネツセンス装置 |
| DE3729846A1 (de) * | 1987-09-05 | 1989-03-23 | Zeiss Carl Fa | Kathodolumineszenzdetektor |
| US5013915A (en) * | 1988-05-20 | 1991-05-07 | Hitachi, Ltd. | Transmission type electron microscope |
| GB8920344D0 (en) * | 1989-09-08 | 1989-10-25 | Isis Innovation | Method and apparatus for imaging dislocations in materials |
| US5517033A (en) * | 1994-07-25 | 1996-05-14 | Gatan, Inc. | Apparatus for improved image resolution in electron microscopy |
| US5536941A (en) * | 1995-02-22 | 1996-07-16 | Gatan, Inc. | Rotatable wide angle camera and prism assembly for electron microscopes |
| US5724131A (en) * | 1995-06-14 | 1998-03-03 | The National University Of Singapore | Integrated emission microscope for panchromatic imaging, continuous wavelength spectroscopy and selective area spectroscopic mapping |
| JPH0945271A (ja) * | 1995-08-03 | 1997-02-14 | Hitachi Ltd | 撮像装置付き電子顕微鏡 |
| JP3718300B2 (ja) * | 1996-09-17 | 2005-11-24 | 株式会社トプコン | 試料分析装置 |
| US6061085A (en) * | 1997-02-07 | 2000-05-09 | Soft Imaging System Gmbh | Camera system for a transmission electron microscope |
| JP4392990B2 (ja) * | 1998-05-09 | 2010-01-06 | レニショウ パブリック リミテッド カンパニー | 電子顕微鏡および分光システム |
| GB0118981D0 (en) * | 2001-08-03 | 2001-09-26 | Renishaw Plc | Electron microscope and spectroscopy system |
| US6885445B2 (en) * | 1998-05-09 | 2005-04-26 | Renishaw Plc | Electron microscope and spectroscopy system |
| EP1145066B1 (de) * | 1998-12-21 | 2005-03-02 | Evotec OAI AG | Positionierung des messvolumens in einem scanning-mikroskopischen verfahren |
| JP3429282B2 (ja) * | 2001-02-02 | 2003-07-22 | リサーチ・インターナショナル・インコーポレーテッド | 自動化されたシステム、及びサンプルの分析方法 |
| JP4198325B2 (ja) * | 2001-03-06 | 2008-12-17 | 株式会社フォトロン | 多画面分光撮影装置 |
| GB0106342D0 (en) * | 2001-03-15 | 2001-05-02 | Renishaw Plc | Spectroscopy apparatus and method |
| GB0123053D0 (en) * | 2001-09-25 | 2001-11-14 | Oxford Instr Analytical Ltd | Electron detection device |
| JP3718818B2 (ja) * | 2001-10-31 | 2005-11-24 | 株式会社ユニソク | カソードルミネッセンス用試料ホルダ、及びカソードルミネッセンス分光分析装置 |
| JP2003157789A (ja) * | 2001-11-20 | 2003-05-30 | Hitachi High-Technologies Corp | 走査電子顕微鏡等のカソードルミネッセンス検出装置 |
| JP3888980B2 (ja) * | 2003-03-18 | 2007-03-07 | 株式会社日立ハイテクノロジーズ | 物質同定システム |
| JP4025836B2 (ja) * | 2004-10-07 | 2007-12-26 | コニカミノルタオプト株式会社 | 撮像装置及び携帯通信機器 |
| EP1739715A3 (en) * | 2005-06-29 | 2008-12-10 | Horiba, Ltd. | Sample measuring device |
| EP1956633A3 (en) * | 2007-02-06 | 2009-12-16 | FEI Company | Particle-optical apparatus for simultaneous observing a sample with particles and photons |
| EP1956632A1 (en) * | 2007-02-14 | 2008-08-13 | FEI Company | Particle-optical apparatus for simultaneous observing a sample with particles and photons |
| JP4988444B2 (ja) * | 2007-06-19 | 2012-08-01 | 株式会社日立製作所 | 検査方法および装置 |
| US7964846B2 (en) * | 2008-08-01 | 2011-06-21 | Gatan, Inc. | Retractable lens-coupled electron microscope camera with image sensor in electron microscope vacuum chamber |
-
2010
- 2010-05-27 FR FR1054109A patent/FR2960699B1/fr active Active
-
2011
- 2011-04-29 US US13/699,975 patent/US10157726B2/en active Active
- 2011-04-29 JP JP2013511720A patent/JP5833109B2/ja active Active
- 2011-04-29 WO PCT/FR2011/050986 patent/WO2011148072A1/fr not_active Ceased
- 2011-04-29 EP EP11723542.4A patent/EP2577706B1/fr active Active
-
2015
- 2015-01-29 JP JP2015015903A patent/JP5947928B2/ja active Active
- 2015-10-28 JP JP2015211726A patent/JP6208198B2/ja active Active
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