JP2013534568A5 - - Google Patents
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- Publication number
- JP2013534568A5 JP2013534568A5 JP2013519013A JP2013519013A JP2013534568A5 JP 2013534568 A5 JP2013534568 A5 JP 2013534568A5 JP 2013519013 A JP2013519013 A JP 2013519013A JP 2013519013 A JP2013519013 A JP 2013519013A JP 2013534568 A5 JP2013534568 A5 JP 2013534568A5
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- axis
- target
- section
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP10169891.8 | 2010-07-16 | ||
| EP20100169891 EP2407999B1 (en) | 2010-07-16 | 2010-07-16 | Magnet arrangement for a target backing tube, target backing tube including the same, cylindrical target assembly and sputtering system |
| PCT/EP2011/060517 WO2012007256A1 (en) | 2010-07-16 | 2011-06-22 | Magnet arrangement for a target backing tube, target backing tube including the same, cylindrical target assembly and sputtering system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013534568A JP2013534568A (ja) | 2013-09-05 |
| JP2013534568A5 true JP2013534568A5 (https=) | 2014-08-07 |
| JP5844808B2 JP5844808B2 (ja) | 2016-01-20 |
Family
ID=43383469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013519013A Active JP5844808B2 (ja) | 2010-07-16 | 2011-06-22 | ターゲットバッキングチューブ用の磁石構成体、磁石構成体を含むターゲットバッキングチューブ、円筒形ターゲットアセンブリ、およびスパッタリングシステム |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9005414B2 (https=) |
| EP (1) | EP2407999B1 (https=) |
| JP (1) | JP5844808B2 (https=) |
| KR (1) | KR101573667B1 (https=) |
| CN (1) | CN103003915B (https=) |
| TW (1) | TWI515318B (https=) |
| WO (1) | WO2012007256A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140126517A (ko) * | 2013-04-23 | 2014-10-31 | 주식회사 아바코 | 마그넷 유닛 및 이를 구비하는 스퍼터링 장치 |
| KR101913791B1 (ko) * | 2014-07-22 | 2018-11-01 | 어플라이드 머티어리얼스, 인코포레이티드 | 타겟 어레인지먼트, 그를 구비한 프로세싱 장치 및 그의 제조 방법 |
| US11008650B2 (en) | 2016-11-03 | 2021-05-18 | Starfire Industries Llc | Compact system for coupling RF power directly into RF linacs |
| US12211679B2 (en) | 2019-02-25 | 2025-01-28 | Starfire Industries Llc | Method and apparatus for metal and ceramic nanolayering for accident tolerant nuclear fuel, particle accelerators, and aerospace leading edges |
| US11056323B2 (en) * | 2017-11-01 | 2021-07-06 | Ulvac, Inc. | Sputtering apparatus and method of forming film |
| JP7097172B2 (ja) * | 2017-11-21 | 2022-07-07 | キヤノントッキ株式会社 | スパッタリング装置 |
| JP6673590B2 (ja) * | 2017-12-27 | 2020-03-25 | キヤノントッキ株式会社 | スパッタ成膜装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4525264A (en) * | 1981-12-07 | 1985-06-25 | Ford Motor Company | Cylindrical post magnetron sputtering system |
| JPH04346662A (ja) * | 1991-05-22 | 1992-12-02 | Ube Ind Ltd | スパッタリング方法およびその装置 |
| EP0805880A4 (en) * | 1995-01-12 | 1998-05-06 | Boc Group Inc | ROTATABLE MICROWAVE WITH CURVED OR SEGMENTED MAGNETS |
| US6306265B1 (en) * | 1999-02-12 | 2001-10-23 | Applied Materials, Inc. | High-density plasma for ionized metal deposition capable of exciting a plasma wave |
| US20020046945A1 (en) * | 1999-10-28 | 2002-04-25 | Applied Materials, Inc. | High performance magnetron for DC sputtering systems |
| DE10336422A1 (de) * | 2003-08-08 | 2005-03-17 | Applied Films Gmbh & Co. Kg | Vorrichtung zur Kathodenzerstäubung |
| EP1825494A1 (en) * | 2004-12-17 | 2007-08-29 | Unaxis Balzers Aktiengesellschaft | Magnetron sputtering apparatus |
-
2010
- 2010-07-16 EP EP20100169891 patent/EP2407999B1/en active Active
- 2010-07-20 US US12/840,021 patent/US9005414B2/en active Active
-
2011
- 2011-06-22 WO PCT/EP2011/060517 patent/WO2012007256A1/en not_active Ceased
- 2011-06-22 CN CN201180034908.9A patent/CN103003915B/zh active Active
- 2011-06-22 KR KR1020137003864A patent/KR101573667B1/ko active Active
- 2011-06-22 JP JP2013519013A patent/JP5844808B2/ja active Active
- 2011-07-15 TW TW100125162A patent/TWI515318B/zh active
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