JP2013520833A - 温度分配制御装置を用いる処理方法および処理装置 - Google Patents
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Abstract
Description
本願は、2010年2月24日に出願された米国仮特許出願第61/307,497号の出願日の利益を主張するものであり、その開示内容は、引用することにより本明細書の一部となすものとする。
本発明は、ウエハ処理装置、このような処理装置に用いられるウエハキャリア、およびウエハ処理の方法に関する。
Claims (22)
- ウエハを処理する方法において、
(a)1つまたは複数のウエハをキャリア上に保持するステップであって、各ウエハの底面が前記キャリアの面と直接対向し、各ウエハの前記底面と前記キャリアの前記対向面との間に間隙が画定されるようになっており、かつ各ウエハの上面が露出するようになっている、ステップと、
(b)前記キャリアから各ウエハの前記底面と前記キャリアの前記対向面との間の前記間隙を横切る熱伝達によって、前記ウエハを少なくとも部分的に加熱するステップと、
(c)前記加熱ステップ中に、前記ウエハの前記露出した上面に一種または複数種の処理ガスを印加するステップと、
(d)前記印加ステップ中に、各ウエハの前記底面と前記キャリアの前記対向面との間の前記間隙内に充満される充填ガスの熱伝導率を変化させるステップとを含んでいることを特徴とする方法。 - 前記ウエハの前記上面の温度分布を監視するステップをさらに含んでおり、前記充填ガスの熱伝導率を変化させる前記ステップは、少なくとも部分的に前記監視ステップの結果に応じて行われるようになっていることを特徴とする請求項1に記載の方法。
- 前記ウエハは、前記間隙の形状が前記印加ステップ中に時間と共に変化するように、前記印加ステップ中に変形し、前記充填ガスの熱伝導率の変化が、前記ウエハの前記上面の温度分布に及ぼすこのような形状の変化の影響を少なくとも部分的に弱めるようになっていることを特徴とする請求項1または2に記載の方法。
- 1つまたは複数のウエハをキャリア上に保持する前記ステップは、複数のウエハを、各ウエハの前記上面が前記キャリアの上面と実質的に同一平面をなすように、前記キャリアの前記上面によって画定されたポケット内に保持することを含んでいることを特徴とする請求項1または2に記載の方法。
- 複数のウエハをキャリア上に保持する前記ステップは、各ウエハを前記ウエハの周辺においてのみ支持するステップを含んでいることを特徴とする請求項4に記載の方法。
- 各ウエハを支持する前記ステップは、前記キャリアと一体の複数の支持体によって前記ウエハを支持することを含んでおり、前記支持体は、前記ウエハの周辺に沿って互いに離間されていることを特徴とする請求項5に記載の方法。
- 各ウエハの前記底面と前記キャリアの前記対向面との間の前記間隙に充満される充填ガスの熱伝導率を変化させるステップは、充填ガスを前記間隙に供給し、前記供給される充填ガスの組成および前記供給される充填ガスの流量の少なくとも1つを変化させることを含んでいることを特徴とする請求項1に記載の方法。
- 前記処理ガスの一種または複数種の成分が、前記ウエハの前記上面に堆積物を形成することを特徴とする請求項1に記載の方法。
- ウエハを処理する方法において、
(a)1つまたは複数のウエハをキャリア上に保持するステップであって、各ウエハの底面が前記キャリアの面を覆って、各ウエハの前記底面と前記キャリアの前記面との間に間隙が画定されるようになっており、かつ各ウエハの上面が露出するようになっているステップと、
(b)前記キャリアから前記間隙を横切る熱伝達によって、前記ウエハを少なくとも部分的に加熱するステップと、
(c)前記加熱ステップ中に、前記ウエハおよび前記キャリアのそれぞれの上面を処理ガス混合物に晒すステップであって、前記処理ガスは、前記ウエハの周辺において前記間隙に入り込む傾向にある、ステップと、
(d)前記晒すステップ中に、前記処理ガスと異なる熱伝導率を有する充填ガスを各ウエハの下方の前記間隙内に供給するステップであって、各ウエハの下方の前記間隙において前記充填ガスの濃度の勾配が存在するようになっているステップとを含んでいることを特徴とする方法。 - 充填ガスを供給する前記ステップは、前記間隙内のガスの組成を変化させるために、前記充填ガスの流量および前記充填ガスの組成の少なくとも1つを変化させるステップを含んでいることを特徴とする請求項9に記載の方法。
- 前記ウエハの前記上面の温度分布を監視するステップをさらに含んでおり、前記変化させるステップは、少なくとも部分的に前記監視ステップの結果に応じて行われることを特徴とする請求項9に記載の方法。
- 前記充填ガスを供給する前記ステップは、前記充填ガスを前記ウエハの中心に隣接する前記キャリアのポートを通して各間隙内に導くことによって行われることを特徴とする請求項9に記載の方法。
- ウエハ処理装置において、
(a)処理チャンバと、
(b)前記チャンバ内に上下方向に延在する軸の周りに回転するように取り付けられたスピンドルであって、前記スピンドルは、上端、および前記スピンドルの前記上端に隣接する開口を有するガス通路を有しており、前記スピンドルの前記上端は、ウエハキャリアが前記スピンドルに機械的に接続されるように、かつ前記ウエハキャリアのガス導管が前記ガス通路の前記開口に連通するように、前記ウエハキャリアに離脱可能に係合するよう適合されているスピンドルと、
(c)前記スピンドルの前記ガス通路に連通する入口を有する回転接続具とを備えていることを特徴とするウエハ処理装置。 - (d)前記スピンドルを前記軸の周りに回転させるためのモータ駆動装置をさらに備えることを特徴とする請求項13に記載の装置。
- (e)前記チャンバの上端に隣接して前記チャンバに取り付けられたガス注入要素であって、処理ガスを前記スピンドルおよび前記スピンドルに取り付けられたウエハキャリアに向かって下方に導くように構成かつ配置されているガス注入要素と、
(f)前記スピンドル上に取り付けられたウエハキャリアを加熱するために、前記チャンバ内に配置された加熱器とをさらに備えることを特徴とする請求項14に記載の装置。 - 前記スピンドルの前記上端は、上下端を有するテーパ部分を備えており、前記ガス通路の前記開口は、前記テーパ部分の前記下端の上方に配置されていることを特徴とする請求項13に記載の装置。
- ウエハキャリアにおいて、
(a)中心軸および前記中心軸を横切る上面を画定する本体であって、前記本体は、ウエハ保持特徴部をさらに有しており、前記ウエハ保持特徴部は、複数のウエハを、前記ウエハの上面が露出するように、かつ各ウエハの底面と前記本体の面との間に間隙が存在するように保持するよう適合されている本体と、
(b)前記本体の前記ウエハ保持特徴部に延在する1つまたは複数のガス導管を画定する構造であって、前記ガス導管に供給された充填ガスが前記ウエハの前記底面と前記本体との間の前記間隙内に導かれるようになっている構造と、
(c)前記本体の前記中心軸における取付け部であって、前記1つまたは複数の導管が前記スピンドルの1つまたは複数のガス通路に連通するように、ウエハ処理装置のスピンドルに離脱可能に係合して前記ウエハキャリアを前記スピンドル上に保持するよう適合されている取付け部と
を備えていることを特徴とするウエハキャリア。 - 前記取付け部は、前記スピンドルを受けるために、下向き方向に開いた凹部を画定しており、前記1つまたは複数のガス導管は、前記凹部に連通していることを特徴とする請求項17に記載のウエハキャリア。
- 前記凹部は、上向き方向に徐々に細くなっていることを特徴とする請求項18に記載のウエハキャリア。
- 前記ウエハ保持特徴部は、前記本体の前記上面内に複数のポケットを備えており、前記導管は、前記ポケットに連通していることを特徴とする請求項17に記載のウエハキャリア。
- 前記各ポケットは、上面の下方に凹んだ床面、前記床面から前記上面に向かって上方に延在する周囲壁、およびウエハを前記床面の上方に支持するために前記床面の上方でかつ前記上面の下方に延在する複数の支持体を備えていることを特徴とする請求項20に記載のウエハキャリア。
- 各床面は、前記ポケットの中心に隣接して配置されたポートを有しており、前記導管は、前記ポートを介して前記ポケットに連通していることを特徴とする請求項21に記載のウエハキャリア。
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US30749710P | 2010-02-24 | 2010-02-24 | |
US61/307,497 | 2010-02-24 | ||
PCT/US2010/060258 WO2011106064A1 (en) | 2010-02-24 | 2010-12-14 | Processing methods and apparatus with temperature distribution control |
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JP2011500961A (ja) | 2007-10-11 | 2011-01-06 | バレンス プロセス イクウィップメント,インコーポレイテッド | 化学気相成長反応器 |
TWI390074B (zh) * | 2010-04-29 | 2013-03-21 | Chi Mei Lighting Tech Corp | 有機金屬化學氣相沉積機台 |
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US9275868B2 (en) | 2013-07-19 | 2016-03-01 | Globalfoundries Inc. | Uniform roughness on backside of a wafer |
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USD778247S1 (en) * | 2015-04-16 | 2017-02-07 | Veeco Instruments Inc. | Wafer carrier with a multi-pocket configuration |
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DE102020119873A1 (de) * | 2020-07-28 | 2022-02-03 | Aixtron Se | Verfahren zum Erkennen fehlerhafter oder fehlerhaft in einem CVD-Reaktor eingesetzte Substrate |
CN112735965B (zh) * | 2020-12-25 | 2024-02-27 | 北京北方华创微电子装备有限公司 | 半导体设备及其承载装置 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0230695A (ja) * | 1988-07-18 | 1990-02-01 | Nissin Electric Co Ltd | 気相成長装置の回転シヤフト |
JPH0424916A (ja) * | 1990-05-15 | 1992-01-28 | Furukawa Electric Co Ltd:The | 半導体ウエハの成膜装置 |
JPH0513350A (ja) * | 1991-07-03 | 1993-01-22 | Tokyo Electron Yamanashi Kk | 基板処理装置 |
JPH0621005A (ja) * | 1992-07-02 | 1994-01-28 | Fujitsu Ltd | ドライエッチング方法 |
JPH06283431A (ja) * | 1990-07-16 | 1994-10-07 | Novellus Syst Inc | 基板支持装置、基板支持・運搬装置、及び基板裏側への被着防止方法 |
JP2000003879A (ja) * | 1998-06-12 | 2000-01-07 | Sony Corp | 基板冷却機構 |
US6184154B1 (en) * | 1999-10-13 | 2001-02-06 | Seh America, Inc. | Method of processing the backside of a wafer within an epitaxial reactor chamber |
JP2007109770A (ja) * | 2005-10-12 | 2007-04-26 | Matsushita Electric Ind Co Ltd | プラズマ処理装置及びプラズマ処理方法 |
JP2008252106A (ja) * | 2001-02-07 | 2008-10-16 | Veeco Instruments Inc | 化学蒸着によりウェハ上にエピタキシャル層を成長させる装置および方法 |
JP2009088088A (ja) * | 2007-09-28 | 2009-04-23 | Sharp Corp | 基板処理装置および基板処理方法 |
JP2009534824A (ja) * | 2006-04-21 | 2009-09-24 | アイクストロン、アーゲー | プロセスチャンバ内の基板表面温度制御装置及び方法 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4512841A (en) * | 1984-04-02 | 1985-04-23 | International Business Machines Corporation | RF Coupling techniques |
DE3803411A1 (de) * | 1988-02-05 | 1989-08-17 | Leybold Ag | Vorrichtung zur halterung von werkstuecken |
EP0448346B1 (en) * | 1990-03-19 | 1997-07-09 | Kabushiki Kaisha Toshiba | Vapor-phase deposition apparatus |
JPH06310438A (ja) * | 1993-04-22 | 1994-11-04 | Mitsubishi Electric Corp | 化合物半導体気相成長用基板ホルダおよび化合物半導体気相成長装置 |
US5318801A (en) * | 1993-05-18 | 1994-06-07 | United States Of America As Represented By The Secretary Of The Navy | Substrate temperature control apparatus and technique for CVD reactors |
TW277139B (ja) * | 1993-09-16 | 1996-06-01 | Hitachi Seisakusyo Kk | |
US6053982A (en) | 1995-09-01 | 2000-04-25 | Asm America, Inc. | Wafer support system |
US6113702A (en) * | 1995-09-01 | 2000-09-05 | Asm America, Inc. | Wafer support system |
JP3274602B2 (ja) * | 1996-04-08 | 2002-04-15 | 株式会社日立国際電気 | 半導体素子の製造方法及び基板処理装置 |
US6001183A (en) * | 1996-06-10 | 1999-12-14 | Emcore Corporation | Wafer carriers for epitaxial growth processes |
WO1999023691A2 (en) * | 1997-11-03 | 1999-05-14 | Asm America, Inc. | Improved low mass wafer support system |
DE10056029A1 (de) * | 2000-11-11 | 2002-05-16 | Aixtron Ag | Verfahren und Vorrichtung zur Temperatursteuerung der Oberflächentemperaturen von Substraten in einem CVD-Reaktor |
US6689221B2 (en) | 2000-12-04 | 2004-02-10 | Applied Materials, Inc. | Cooling gas delivery system for a rotatable semiconductor substrate support assembly |
JP2002327275A (ja) * | 2001-05-02 | 2002-11-15 | Tokyo Electron Ltd | 真空処理方法及び真空処理装置 |
US6902623B2 (en) * | 2001-06-07 | 2005-06-07 | Veeco Instruments Inc. | Reactor having a movable shutter |
WO2003046966A1 (fr) | 2001-11-30 | 2003-06-05 | Shin-Etsu Handotai Co., Ltd. | Suscepteur, dispositif de croissance de phase gazeuse, dispositif et procede de fabrication de plaquette epitaxiale, et plaquette epitaxiale |
JP3853302B2 (ja) * | 2002-08-09 | 2006-12-06 | 東京エレクトロン株式会社 | 熱処理方法及び熱処理装置 |
US20040055709A1 (en) * | 2002-09-19 | 2004-03-25 | Applied Materials, Inc. | Electrostatic chuck having a low level of particle generation and method of fabricating same |
JP2004266212A (ja) * | 2003-03-04 | 2004-09-24 | Tadahiro Omi | 基板の処理システム |
US7663860B2 (en) * | 2003-12-05 | 2010-02-16 | Tokyo Electron Limited | Electrostatic chuck |
JPWO2005093136A1 (ja) * | 2004-03-29 | 2008-02-14 | エピクルー株式会社 | 支持体並びに半導体基板の処理方法 |
US7611322B2 (en) * | 2004-11-18 | 2009-11-03 | Intevac, Inc. | Processing thin wafers |
DE102005018161A1 (de) | 2005-04-19 | 2006-11-02 | Aixtron Ag | Halbleiterbehandlungsvorrichtung zur Durchführung eines RTP Verfahrens |
US7988872B2 (en) * | 2005-10-11 | 2011-08-02 | Applied Materials, Inc. | Method of operating a capacitively coupled plasma reactor with dual temperature control loops |
US8603248B2 (en) * | 2006-02-10 | 2013-12-10 | Veeco Instruments Inc. | System and method for varying wafer surface temperature via wafer-carrier temperature offset |
US8021487B2 (en) | 2007-12-12 | 2011-09-20 | Veeco Instruments Inc. | Wafer carrier with hub |
EP2562291A1 (en) | 2008-08-29 | 2013-02-27 | Veeco Instruments Inc. | Wafer carrier with varying thermal resistance |
US9653340B2 (en) * | 2011-05-31 | 2017-05-16 | Veeco Instruments Inc. | Heated wafer carrier profiling |
US10167571B2 (en) * | 2013-03-15 | 2019-01-01 | Veeco Instruments Inc. | Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems |
-
2010
- 2010-12-14 WO PCT/US2010/060258 patent/WO2011106064A1/en active Application Filing
- 2010-12-14 JP JP2012554991A patent/JP5882918B2/ja not_active Expired - Fee Related
- 2010-12-14 EP EP10795886A patent/EP2539920A1/en not_active Withdrawn
- 2010-12-14 KR KR1020127024826A patent/KR20120131194A/ko not_active Application Discontinuation
- 2010-12-14 US US12/967,381 patent/US9324590B2/en not_active Expired - Fee Related
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- 2010-12-14 SG SG2012061982A patent/SG183432A1/en unknown
-
2011
- 2011-02-24 TW TW100106284A patent/TWI512883B/zh not_active IP Right Cessation
-
2016
- 2016-03-22 US US15/077,283 patent/US10002805B2/en not_active Expired - Fee Related
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0230695A (ja) * | 1988-07-18 | 1990-02-01 | Nissin Electric Co Ltd | 気相成長装置の回転シヤフト |
JPH0424916A (ja) * | 1990-05-15 | 1992-01-28 | Furukawa Electric Co Ltd:The | 半導体ウエハの成膜装置 |
JPH06283431A (ja) * | 1990-07-16 | 1994-10-07 | Novellus Syst Inc | 基板支持装置、基板支持・運搬装置、及び基板裏側への被着防止方法 |
JPH0513350A (ja) * | 1991-07-03 | 1993-01-22 | Tokyo Electron Yamanashi Kk | 基板処理装置 |
JPH0621005A (ja) * | 1992-07-02 | 1994-01-28 | Fujitsu Ltd | ドライエッチング方法 |
JP2000003879A (ja) * | 1998-06-12 | 2000-01-07 | Sony Corp | 基板冷却機構 |
US6184154B1 (en) * | 1999-10-13 | 2001-02-06 | Seh America, Inc. | Method of processing the backside of a wafer within an epitaxial reactor chamber |
JP2008252106A (ja) * | 2001-02-07 | 2008-10-16 | Veeco Instruments Inc | 化学蒸着によりウェハ上にエピタキシャル層を成長させる装置および方法 |
JP2007109770A (ja) * | 2005-10-12 | 2007-04-26 | Matsushita Electric Ind Co Ltd | プラズマ処理装置及びプラズマ処理方法 |
JP2009534824A (ja) * | 2006-04-21 | 2009-09-24 | アイクストロン、アーゲー | プロセスチャンバ内の基板表面温度制御装置及び方法 |
JP2009088088A (ja) * | 2007-09-28 | 2009-04-23 | Sharp Corp | 基板処理装置および基板処理方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015512565A (ja) * | 2012-03-20 | 2015-04-27 | ビーコ・インストゥルメンツ・インコーポレイテッド | キー付きウエハキャリア |
JP2016015492A (ja) * | 2012-03-20 | 2016-01-28 | ビーコ・インストゥルメンツ・インコーポレイテッド | キー付きウエハキャリア |
US9816184B2 (en) | 2012-03-20 | 2017-11-14 | Veeco Instruments Inc. | Keyed wafer carrier |
Also Published As
Publication number | Publication date |
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JP5882918B2 (ja) | 2016-03-09 |
US20110206843A1 (en) | 2011-08-25 |
TWI512883B (zh) | 2015-12-11 |
US10002805B2 (en) | 2018-06-19 |
WO2011106064A1 (en) | 2011-09-01 |
SG183432A1 (en) | 2012-09-27 |
KR20120131194A (ko) | 2012-12-04 |
US20160204044A1 (en) | 2016-07-14 |
CN102859645B (zh) | 2016-05-04 |
EP2539920A1 (en) | 2013-01-02 |
US9324590B2 (en) | 2016-04-26 |
TW201145445A (en) | 2011-12-16 |
CN102859645A (zh) | 2013-01-02 |
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