JP2013516764A5 - - Google Patents
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- Publication number
- JP2013516764A5 JP2013516764A5 JP2012547120A JP2012547120A JP2013516764A5 JP 2013516764 A5 JP2013516764 A5 JP 2013516764A5 JP 2012547120 A JP2012547120 A JP 2012547120A JP 2012547120 A JP2012547120 A JP 2012547120A JP 2013516764 A5 JP2013516764 A5 JP 2013516764A5
- Authority
- JP
- Japan
- Prior art keywords
- transfer layer
- substrate
- structured mold
- mold
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29105309P | 2009-12-30 | 2009-12-30 | |
| US61/291,053 | 2009-12-30 | ||
| PCT/US2010/061195 WO2011090641A2 (en) | 2009-12-30 | 2010-12-20 | Method of using a mask to provide a patterned substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013516764A JP2013516764A (ja) | 2013-05-13 |
| JP2013516764A5 true JP2013516764A5 (enExample) | 2014-01-09 |
Family
ID=44307459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012547120A Pending JP2013516764A (ja) | 2009-12-30 | 2010-12-20 | マスクを使用してパターン化基板を提供する方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20130068723A1 (enExample) |
| EP (1) | EP2519964A2 (enExample) |
| JP (1) | JP2013516764A (enExample) |
| KR (1) | KR20120097413A (enExample) |
| CN (1) | CN102687241A (enExample) |
| BR (1) | BR112012016099A2 (enExample) |
| SG (1) | SG181954A1 (enExample) |
| WO (1) | WO2011090641A2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2938495B1 (en) | 2012-12-31 | 2017-04-19 | 3M Innovative Properties Company | Re-inking roller for microcontact printing in a roll-to-roll process |
| EP3065951B1 (en) * | 2013-11-06 | 2019-07-31 | 3M Innovative Properties Company | Microcontact printing stamps with functional features |
| JP2015159277A (ja) | 2014-01-23 | 2015-09-03 | パナソニック株式会社 | 電子デバイスの製造方法 |
| JP7053587B2 (ja) * | 2016-09-27 | 2022-04-12 | イラミーナ インコーポレーテッド | インプリント基板 |
| KR101851713B1 (ko) | 2017-06-20 | 2018-04-24 | 창원대학교 산학협력단 | 패턴의 제조방법 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5265535A (en) * | 1991-12-28 | 1993-11-30 | Kabushiki Kaisha Isowa | Printing machine for corrugated board sheet |
| US6309580B1 (en) * | 1995-11-15 | 2001-10-30 | Regents Of The University Of Minnesota | Release surfaces, particularly for use in nanoimprint lithography |
| US6680214B1 (en) * | 1998-06-08 | 2004-01-20 | Borealis Technical Limited | Artificial band gap |
| NO311797B1 (no) * | 1999-05-12 | 2002-01-28 | Thin Film Electronics Asa | Fremgangsmåter til mönstring av polymerfilmer og anvendelse av fremgangsmåtene |
| KR100658553B1 (ko) * | 2001-05-31 | 2006-12-18 | 미쯔비시 레이온 가부시끼가이샤 | 전기도금 부품 |
| GB0323295D0 (en) * | 2003-10-04 | 2003-11-05 | Dow Corning | Deposition of thin films |
| JP2006156735A (ja) * | 2004-11-30 | 2006-06-15 | Nippon Telegr & Teleph Corp <Ntt> | パターン形成方法及びモールド |
| US7374968B2 (en) * | 2005-01-28 | 2008-05-20 | Hewlett-Packard Development Company, L.P. | Method of utilizing a contact printing stamp |
| JP4622626B2 (ja) * | 2005-03-30 | 2011-02-02 | 凸版印刷株式会社 | 導電性パターンの形成方法 |
| US20080191371A1 (en) * | 2005-06-16 | 2008-08-14 | Tetsuya Matsuyama | Pattern Copying Apparatus, Pattern Copying Method and Peeling Roller |
| WO2008007563A1 (fr) * | 2006-07-12 | 2008-01-17 | Konica Minolta Holdings, Inc. | dispositif d'affichage électrochromique |
| KR20090079946A (ko) * | 2006-11-15 | 2009-07-22 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 기판으로의 전사 중에 경화하는 플렉소그래픽 인쇄 |
| US8608972B2 (en) * | 2006-12-05 | 2013-12-17 | Nano Terra Inc. | Method for patterning a surface |
| WO2008115530A2 (en) * | 2007-03-20 | 2008-09-25 | Nano Terra Inc. | Polymer composition for preparing electronic devices by microcontact printing processes and products prepared by the processes |
| JP4448868B2 (ja) * | 2007-06-29 | 2010-04-14 | 株式会社日立産機システム | インプリント用スタンパとその製造方法 |
| JP5065880B2 (ja) * | 2007-12-27 | 2012-11-07 | 株式会社日立産機システム | 微細構造転写装置および微細構造転写方法 |
| KR101111932B1 (ko) * | 2008-09-30 | 2012-03-14 | 이비덴 가부시키가이샤 | 다층 프린트 배선판, 및 다층 프린트 배선판의 제조 방법 |
| CN101477304B (zh) * | 2008-11-04 | 2011-08-17 | 南京大学 | 在复杂形状表面复制高分辨率纳米结构的压印方法 |
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2010
- 2010-12-20 WO PCT/US2010/061195 patent/WO2011090641A2/en not_active Ceased
- 2010-12-20 BR BR112012016099A patent/BR112012016099A2/pt not_active IP Right Cessation
- 2010-12-20 EP EP10844214A patent/EP2519964A2/en not_active Withdrawn
- 2010-12-20 US US13/518,915 patent/US20130068723A1/en not_active Abandoned
- 2010-12-20 JP JP2012547120A patent/JP2013516764A/ja active Pending
- 2010-12-20 SG SG2012047437A patent/SG181954A1/en unknown
- 2010-12-20 KR KR1020127019723A patent/KR20120097413A/ko not_active Withdrawn
- 2010-12-20 CN CN2010800602951A patent/CN102687241A/zh active Pending