JP2013504197A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2013504197A5 JP2013504197A5 JP2012527410A JP2012527410A JP2013504197A5 JP 2013504197 A5 JP2013504197 A5 JP 2013504197A5 JP 2012527410 A JP2012527410 A JP 2012527410A JP 2012527410 A JP2012527410 A JP 2012527410A JP 2013504197 A5 JP2013504197 A5 JP 2013504197A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- curvature control
- control layer
- type region
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 150000004767 nitrides Chemical class 0.000 claims 2
- 229910002704 AlGaN Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/555,000 US20110057213A1 (en) | 2009-09-08 | 2009-09-08 | Iii-nitride light emitting device with curvat1jre control layer |
| US12/555,000 | 2009-09-08 | ||
| PCT/IB2010/053537 WO2011030238A1 (en) | 2009-09-08 | 2010-08-04 | Iii-nitride light emitting device with curvature control layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013504197A JP2013504197A (ja) | 2013-02-04 |
| JP2013504197A5 true JP2013504197A5 (enExample) | 2013-09-26 |
Family
ID=43128314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012527410A Pending JP2013504197A (ja) | 2009-09-08 | 2010-08-04 | 湾曲を制御する層を備えたiii族の窒化物の発光デバイス |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US20110057213A1 (enExample) |
| EP (1) | EP2476144A1 (enExample) |
| JP (1) | JP2013504197A (enExample) |
| KR (1) | KR20120068900A (enExample) |
| CN (1) | CN102484178A (enExample) |
| TW (1) | TW201117418A (enExample) |
| WO (1) | WO2011030238A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130082274A1 (en) * | 2011-09-29 | 2013-04-04 | Bridgelux, Inc. | Light emitting devices having dislocation density maintaining buffer layers |
| JP5166594B1 (ja) | 2011-12-12 | 2013-03-21 | 株式会社東芝 | 半導体発光素子 |
| EP2696365B1 (en) * | 2012-08-09 | 2021-06-23 | Samsung Electronics Co., Ltd. | Method of manufacturing a semiconductor device using a semiconductor buffer structure |
| EP2908330B1 (en) * | 2012-10-12 | 2021-05-19 | Sumitomo Electric Industries, Ltd. | Group iii nitride composite substrate, manufacturing method therefor, and group iii nitride semiconductor device manufacturing method |
| CN107275425B (zh) * | 2013-01-31 | 2019-10-15 | 欧司朗光电半导体有限公司 | 半导体层序列和用于制造半导体层序列的方法 |
| CN107408933B (zh) * | 2014-10-03 | 2020-11-20 | 芬兰国家技术研究中心股份公司 | 温度补偿复合谐振器 |
| CN108054260A (zh) * | 2017-10-25 | 2018-05-18 | 华灿光电(浙江)有限公司 | 一种发光二极管的外延片及制备方法 |
| KR102211486B1 (ko) * | 2018-12-24 | 2021-02-02 | 한국세라믹기술원 | 전기화학적 에칭법을 이용한 프리 스탠딩 질화갈륨 기판 제조 방법 및 이를 포함하는 물분해 수소생산용 광전극 |
| US12349528B2 (en) | 2021-10-25 | 2025-07-01 | Meta Platforms Technologies, Llc | Strain management of III-P micro-LED epitaxy towards higher efficiency and low bow |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6996150B1 (en) * | 1994-09-14 | 2006-02-07 | Rohm Co., Ltd. | Semiconductor light emitting device and manufacturing method therefor |
| US5670798A (en) * | 1995-03-29 | 1997-09-23 | North Carolina State University | Integrated heterostructures of Group III-V nitride semiconductor materials including epitaxial ohmic contact non-nitride buffer layer and methods of fabricating same |
| JPH0964477A (ja) * | 1995-08-25 | 1997-03-07 | Toshiba Corp | 半導体発光素子及びその製造方法 |
| JPH10150245A (ja) * | 1996-11-21 | 1998-06-02 | Matsushita Electric Ind Co Ltd | 窒化ガリウム系半導体の製造方法 |
| US6194742B1 (en) * | 1998-06-05 | 2001-02-27 | Lumileds Lighting, U.S., Llc | Strain engineered and impurity controlled III-V nitride semiconductor films and optoelectronic devices |
| JP2002261033A (ja) * | 2000-12-20 | 2002-09-13 | Matsushita Electric Ind Co Ltd | 半導体の製造方法、半導体基板の製造方法及び半導体発光素子 |
| JP3866540B2 (ja) * | 2001-07-06 | 2007-01-10 | 株式会社東芝 | 窒化物半導体素子およびその製造方法 |
| CN1324772C (zh) * | 2002-06-19 | 2007-07-04 | 日本电信电话株式会社 | 半导体发光器件 |
| WO2006054737A1 (en) * | 2004-11-18 | 2006-05-26 | Showa Denko K.K. | Gallium nitride-based semiconductor stacked structure, method for fabrication thereof, gallium nitride-based semiconductor device and lamp using the device |
| US7795050B2 (en) * | 2005-08-12 | 2010-09-14 | Samsung Electronics Co., Ltd. | Single-crystal nitride-based semiconductor substrate and method of manufacturing high-quality nitride-based light emitting device by using the same |
-
2009
- 2009-09-08 US US12/555,000 patent/US20110057213A1/en not_active Abandoned
-
2010
- 2010-08-04 JP JP2012527410A patent/JP2013504197A/ja active Pending
- 2010-08-04 EP EP10749916A patent/EP2476144A1/en not_active Withdrawn
- 2010-08-04 WO PCT/IB2010/053537 patent/WO2011030238A1/en not_active Ceased
- 2010-08-04 KR KR1020127008995A patent/KR20120068900A/ko not_active Withdrawn
- 2010-08-04 CN CN2010800399971A patent/CN102484178A/zh active Pending
- 2010-08-06 TW TW099126371A patent/TW201117418A/zh unknown
-
2012
- 2012-06-29 US US13/537,107 patent/US20120264248A1/en not_active Abandoned
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2013504197A5 (enExample) | ||
| KR100931483B1 (ko) | 발광소자 | |
| CN103500780B (zh) | 一种氮化镓基led外延结构及其制备方法 | |
| JP2009260398A5 (enExample) | ||
| CN103151435B (zh) | 一种具有复合势垒的氮化镓基发光二极管 | |
| WO2008153130A1 (ja) | 窒化物半導体発光素子及び窒化物半導体の製造方法 | |
| CN104115258A (zh) | 外延基板、半导体装置及半导体装置的制造方法 | |
| WO2019024501A1 (zh) | 一种半导体发光元件及其制备方法 | |
| CN105405939A (zh) | 一种发光二极管及其制造方法 | |
| CN102044598A (zh) | 一种GaN基发光二极管外延片及其生长方法 | |
| US8598605B2 (en) | Semiconductor light-emitting device | |
| US20160351750A1 (en) | Fabrication Method of Nitride Light Emitting Diodes | |
| CN105304778B (zh) | 提高GaN基LED抗静电性能的外延结构及其制备方法 | |
| CN101931036A (zh) | 一种氮化镓系发光二极管 | |
| JP2014022685A (ja) | 半導体積層構造およびこれを用いた半導体素子 | |
| CN104332537A (zh) | 一种高浓度Te掺杂的发光二极管外延结构 | |
| JP6138359B2 (ja) | 窒化物系化合物半導体素子を製造する方法 | |
| TW201415662A (zh) | 氮化物半導體裝置 | |
| CN104332536A (zh) | 一种高浓度Te掺杂的发光二极管外延方法 | |
| CN109560177A (zh) | 一种发光二极管及其制备方法 | |
| TWI567877B (zh) | Manufacturing method of nitride semiconductor device | |
| TW201415661A (zh) | 氮化物半導體裝置 | |
| TW201415663A (zh) | 氮化物半導體裝置 | |
| JP2013528945A5 (enExample) | ||
| US9240518B2 (en) | Light emitting diode device having super lattice structure and a nano-structure layer |