JP2013500604A - 組み込まれた抵抗を有する電極を含む半導体素子および関連手法 - Google Patents
組み込まれた抵抗を有する電極を含む半導体素子および関連手法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 135
- 238000000034 method Methods 0.000 title description 12
- 229910052751 metal Inorganic materials 0.000 claims abstract description 40
- 239000002184 metal Substances 0.000 claims abstract description 40
- 239000010410 layer Substances 0.000 description 104
- 229910010271 silicon carbide Inorganic materials 0.000 description 39
- 108091006146 Channels Proteins 0.000 description 36
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 24
- 230000005669 field effect Effects 0.000 description 15
- 239000000758 substrate Substances 0.000 description 14
- 239000000463 material Substances 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 229910044991 metal oxide Inorganic materials 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 150000004706 metal oxides Chemical class 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 229920005591 polysilicon Polymers 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 108090000699 N-Type Calcium Channels Proteins 0.000 description 4
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 102000004129 N-Type Calcium Channels Human genes 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- -1 Silicon Carbide Metal-Oxide Chemical class 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 201000011510 cancer Diseases 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007688 edging Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
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Abstract
【選択図】図2A
Description
本発明は、米軍陸軍研究所によって認められた米軍陸軍契約No.W911NF−04−2−0021に基づく政府の支援によって成し遂げられたものである。政府は本発明において明確な権利を有する。
ただし、ρsは、絶縁ゲート電極を構成する材料のシート抵抗であり、Lは打ち抜き穴171の長さであり、Wはそれぞれ個々の電気経路191の幅であり、Wは絶縁ゲート電極のコンタクト領域と絶縁ゲート電極の活性領域との間における電流経路(電気経路)の総数分で合計される。
Claims (21)
- チャネルと前記チャネルに近接する端子領域とを含む半導体層と、
前記チャネル上の活性領域とコンタクト領域を含むゲート電極であって、前記ゲート電極は、前記コンタクト領域と前記活性領域の間に増加した電気抵抗の領域を含む、ゲート電極と、
前記半導体層の反対に位置する前記ゲート電極のコンタクト領域上に金属コンタクトと
を含むことを特徴とする半導体素子。 - 前記増加した電気抵抗の領域は、前記ゲート電極を通る複数の打ち抜き穴を含むこと
を特徴とする請求項1に記載の半導体素子。 - 増加した電気抵抗の領域は、前記増加した電気抵抗の領域の反対側に位置するゲート電極部分の厚さと比べて、前記ゲート電極の厚さが削減された領域を含むこと
を特徴とする請求項1に記載の半導体素子。 - 前記増加した電気抵抗の領域は、前記増加した電気抵抗の領域の反対側に位置するゲート電極部分の導電率と比べて、導電率が低下した領域を含むこと
を特徴とする請求項1に記載の半導体素子。 - 前記チャネルは、第一のチャネルを含み、
前記端子領域は、第一のソース/ドレイン領域を含み、
前記半導体は、第二のチャネルと前記第二チャネルに近接する第二のソース/ドレイン端子領域を含み、
前記ゲート電極の前記活性領域は、前記第一および第二のチャネル上にあり、
前記増加した電気抵抗の領域は、前記コンタクト領域と前記第一および第二の両チャネルとの間にあること
を特徴とする請求項1に記載の半導体素子。 - 前記ゲート電極と前記半導体層との間のゲート絶縁層を更に含むこと
を特徴とする請求項5に記載の半導体素子。 - 絶縁層と、
前記絶縁層上の半導体電極であって、増加した電気抵抗の領域は前記半導体電極のコンタクト領域を前記半導体電極の活性領域から分離する、半導体電極と、
前記絶縁層の反対に位置する前記半導体電極の前記コンタクト領域上の金属コンタクトと
を含むことを特徴とする半導体素子。 - 増加した電気抵抗の領域は、半導体電極を通る複数の打ち抜き穴を含むこと
を特徴とする請求項7に記載の半導体素子。 - 前記増加した電気抵抗の領域は、前記半導体電極のコンタクト領域および活性領域の厚さに比べて、前記半導体電極の厚さが削減された領域を含むこと
を特徴とする請求項7に記載の半導体素子。 - 前記増加した電気抵抗の領域は、前記半導体電極のコンタクト領域および活性領域の導電率に比べて、導電率が低下した領域を含むこと
を特徴とする請求項7に記載の半導体素子。 - 前記増加した電気抵抗の領域は、前記半導体電極のコンタクト領域を取り囲むこと
を特徴とする請求項7に記載の半導体素子。 - 前記半導体電極は、多結晶半導体電極を含むこと
を特徴とする請求項7に記載の半導体素子。 - 第一の導電型を有する半導体層であって、絶縁層は前記半導体層と半導体電極の間にあり、前記半導体層は、前記半導体電極の活性領域およびコンタクト領域に対応する活性領域およびコンタクト領域を含む、半導体層と、
前記半導体層の活性領域において第二の導電型を有するウェル領域であって、前記第一の導電型と前記第二の導電型は異なる、ウェル領域と、
前記ウェル領域の少なくとも一部と近接する、前記第一の導電型を有するソース/ドレイン端子領域であって、前記ソース/ドレイン端子領域と、前記半導体層の表面に近接する前記ウェル領域の外周囲との間の前記ウェル領域部分はチャネルを規定し、前記半導体電極は前記チャネルの反対の位置にある絶縁層部分の上にある、ソース/ドレイン領域と
をさらに含むことを特徴とする請求項7に記載の半導体素子。 - 第一の導電型を有する半導体層であって、前記半導体層は活性領域とゲートコンタクト領域を含む、半導体層と、
前記活性領域において第二の導電型を有するウェル領域であって、前記第一の導電型および前記第二の導電型は異なる、ウェル領域と、
前記ウェル領域の少なくとも一部と近接する前記第一の導電型を有するソース/ドレイン端子領域であって、前記ソース/ドレイン端子領域と前記ウェル領域の外周囲との間の前記ウェル領域部分はチャネルを規定する、ソース/ドレイン端子領域と、
前記チャネル上、前記ウェル領域の外側の前記活性領域上、かつ前記ゲートコンタクト領域上のゲート絶縁層と、
前記チャネルの反対の位置にあり、前記ウェル領域の外側の前記活性領域の反対の位置にあり、かつ前記ゲートコンタクト領域の反対の位置にある前記ゲート絶縁層上のゲート電極であって、前記ゲート電極は前記ゲートコンタクト領域と前記チャネルの間に、増加した電気抵抗の領域を含む、ゲート電極と
を含むことを特徴する半導体素子。 - 前記増加した電気抵抗の領域は、前記ゲート電極を通る複数の打ち抜き穴を含むこと
を特徴とする請求項14に記載の半導体素子。 - 前記増加した電気抵抗の領域は、前記ゲート電極のその他の部分の厚さに比べて、前記ゲート電極の厚さが削減された領域を含むこと
を特徴とする請求項14に記載の半導体素子。 - 前記増加した電気抵抗の領域は、前記ゲート電極のその他の部分の導電率に比べて、導電率が低下した領域を含むこと
を特徴とする請求項14に記載の半導体素子。 - 前記半導体層の前記ゲートコンタクト領域の反対の位置にある前記ゲート電極上の金属コンタクトであって、前記増加した電気抵抗の領域は、前記金属コンタクトと前記ゲート電極の間のコンタクトの領域を取り囲む、金属コンタクトをさらに含むこと
を特徴とする請求項14に記載の半導体素子。 - 前記ゲート電極は半導体ゲート電極を含むこと
を特徴とする請求項14に記載の半導体素子。 - 前記ウェル領域は第一のウェル領域を含み、前記ソース/ドレイン端子領域は、第一のソース/ドレイン端子領域を含み、前記チャネルは第一のチャネルを含み、前記半導体素子はさらに、
前記活性領域において前記第一のウェル領域から離れた間隔が空けられ、前記第二の導電型を有する第二のウェル領域と、
前記第二のウェル領域の少なくとも一部と近接する、前記第一の導電型を有する第二のソース/ドレイン端子領域であって、
前記第二のソース/ドレイン端子領域と前記第二のウェル領域の外周囲との間における前記第二のウェル領域部分は、第二のチャネルを規定し、
前記ゲート絶縁層は、前記第一のチャネルおよび前記第二のチャネル上、かつ前記第一のウェル領域と前記第二のウェル領域の間の活性領域上にあり、
前記ゲート電力は、前記第一のチャネルおよび前記第二のチャネルの反対に位置し、前記第一のウェル領域と前記第二のウェル領域の間における前記活性領域の反対に位置する前記ゲート絶縁層上にある、第二のソース/ドレイン端子領域と
を含むことを特徴とする請求項14に記載の半導体素子。 - 前記第一のソース/ドレイン領域および前記第二のソース/ドレイン領域に連結した第一のソース/ドレイン電極であって、前記第一のソース/ドレイン電極と前記ゲート電極は電気的に絶縁される、第一のソース/ドレイン電極と、
前記半導体層上の第二のソース/ドレイン電極であって、前記半導体層は前記第一のソース/ドレイン電極と前記第二のソース/ドレイン電極との間にある、第二のソース/ドレイン電極と
を含むことを特徴とする請求項14に記載の半導体素子。
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