JP2013257208A - 欠陥原因工程分析装置および欠陥原因工程分析方法 - Google Patents

欠陥原因工程分析装置および欠陥原因工程分析方法 Download PDF

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Publication number
JP2013257208A
JP2013257208A JP2012133020A JP2012133020A JP2013257208A JP 2013257208 A JP2013257208 A JP 2013257208A JP 2012133020 A JP2012133020 A JP 2012133020A JP 2012133020 A JP2012133020 A JP 2012133020A JP 2013257208 A JP2013257208 A JP 2013257208A
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JP
Japan
Prior art keywords
defect
information
inspection
correction
tft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012133020A
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English (en)
Japanese (ja)
Inventor
Masao Toya
正雄 戸屋
Katsuki Imai
克樹 今井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
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Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP2012133020A priority Critical patent/JP2013257208A/ja
Priority to CN201380027369.5A priority patent/CN104335029A/zh
Priority to PCT/JP2013/066169 priority patent/WO2013187430A1/ja
Publication of JP2013257208A publication Critical patent/JP2013257208A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13452—Conductors connecting driver circuitry and terminals of panels

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2012133020A 2012-06-12 2012-06-12 欠陥原因工程分析装置および欠陥原因工程分析方法 Pending JP2013257208A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012133020A JP2013257208A (ja) 2012-06-12 2012-06-12 欠陥原因工程分析装置および欠陥原因工程分析方法
CN201380027369.5A CN104335029A (zh) 2012-06-12 2013-06-12 缺陷原因工序分析装置和缺陷原因工序分析方法
PCT/JP2013/066169 WO2013187430A1 (ja) 2012-06-12 2013-06-12 欠陥原因工程分析装置および欠陥原因工程分析方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012133020A JP2013257208A (ja) 2012-06-12 2012-06-12 欠陥原因工程分析装置および欠陥原因工程分析方法

Publications (1)

Publication Number Publication Date
JP2013257208A true JP2013257208A (ja) 2013-12-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012133020A Pending JP2013257208A (ja) 2012-06-12 2012-06-12 欠陥原因工程分析装置および欠陥原因工程分析方法

Country Status (3)

Country Link
JP (1) JP2013257208A (zh)
CN (1) CN104335029A (zh)
WO (1) WO2013187430A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105044124A (zh) * 2015-08-27 2015-11-11 李明英 基于灰度均值分析的玻璃瑕疵分类装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109507815B (zh) * 2018-12-05 2022-06-21 武汉精立电子技术有限公司 一种液晶显示屏背光检测中快速定位缺陷位置的方法
CN109683358B (zh) * 2019-01-22 2022-08-12 成都中电熊猫显示科技有限公司 检测方法、装置和存储介质
CN114076771A (zh) * 2020-08-19 2022-02-22 南通深南电路有限公司 底片的检验方法及底片检测组件
CN115532656A (zh) * 2021-06-30 2022-12-30 京东方科技集团股份有限公司 一种显示面板缺陷检测方法、设备和系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10177844A (ja) * 1996-12-19 1998-06-30 Hitachi Ltd 平面ディスプレイパネルの製造方法およびプラズマディスプレイパネルの製造方法
JP2006251561A (ja) * 2005-03-11 2006-09-21 Sony Corp 欠陥画素リペア方法
JP2008158501A (ja) * 2007-11-01 2008-07-10 Shimadzu Corp 液晶基板管理装置
JP2009264865A (ja) * 2008-04-24 2009-11-12 Sony Corp フラットパネルディスプレイの欠陥検査装置およびその方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008529067A (ja) * 2005-01-21 2008-07-31 フォトン・ダイナミクス・インコーポレーテッド 自動欠陥修復システム
KR100783309B1 (ko) * 2006-02-15 2007-12-10 주식회사 동진쎄미켐 평판 표시 장치의 검사 시스템
WO2008015738A1 (fr) * 2006-08-01 2008-02-07 Shimadzu Corporation Dispositif d'inspection et de réparation de substrat et système d'évaluation de substrat

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10177844A (ja) * 1996-12-19 1998-06-30 Hitachi Ltd 平面ディスプレイパネルの製造方法およびプラズマディスプレイパネルの製造方法
JP2006251561A (ja) * 2005-03-11 2006-09-21 Sony Corp 欠陥画素リペア方法
JP2008158501A (ja) * 2007-11-01 2008-07-10 Shimadzu Corp 液晶基板管理装置
JP2009264865A (ja) * 2008-04-24 2009-11-12 Sony Corp フラットパネルディスプレイの欠陥検査装置およびその方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105044124A (zh) * 2015-08-27 2015-11-11 李明英 基于灰度均值分析的玻璃瑕疵分类装置

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Publication number Publication date
WO2013187430A1 (ja) 2013-12-19
CN104335029A (zh) 2015-02-04

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