JP2013238876A5 - - Google Patents
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- JP2013238876A5 JP2013238876A5 JP2013141219A JP2013141219A JP2013238876A5 JP 2013238876 A5 JP2013238876 A5 JP 2013238876A5 JP 2013141219 A JP2013141219 A JP 2013141219A JP 2013141219 A JP2013141219 A JP 2013141219A JP 2013238876 A5 JP2013238876 A5 JP 2013238876A5
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- semiconductor
- doped
- optical waveguide
- waveguide core
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Claims (3)
- 一端で入力光信号を受信し、対向する端で変調された光信号を出力するように構成された半導体平面光導波路コアと、
前記半導体平面光導波路コアのN型領域に隣接するように配置されたN型にドープされた半導体接続パス、ならびに前記半導体平面光導波路コアのP型領域に隣接するように配置されたP型にドープされた半導体接続パスであって、前記N型領域が前記N型にドープされた半導体接続パスおよび前記P型領域の間に配置され、前記P型領域が前記P型にドープされた半導体接続パスおよび前記N型領域の間に配置され、前記N型およびP型にドープされた半導体接続パスが前記入力光信号の伝播方向に横切って前記半導体平面光導波路コアに電圧を印加することができる半導体接続パスと、
を含む光変調器を備える装置であって、
前記半導体平面光導波路コアが、前記半導体平面光導波路コア内の前記N型およびP型にドープされた領域に形成されたPN接合部を含み、
真性半導体層または絶縁層が、前記N型およびP型にドープされた半導体接続パスの少なくとも1つと前記半導体平面光導波路コアとの間に配置されている装置。 - 前記真性半導体層または前記絶縁層が、前記N型およびP型にドープされた半導体接続パスの各々と前記半導体平面光導波路コアとの間に配置されている、請求項1に記載の装置。
- 前記N型にドープされた半導体接続パスは、前記N型領域より高い濃度でN型にドープされ、
前記P型にドープされた半導体接続パスは、前記P型領域より高い濃度でP型にドープされている、請求項1に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/681,070 | 2007-03-01 | ||
US11/681,070 US7672553B2 (en) | 2007-03-01 | 2007-03-01 | High speed semiconductor optical modulator |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009551977A Division JP5551446B2 (ja) | 2007-03-01 | 2007-10-30 | 高速の半導体光変調器 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013238876A JP2013238876A (ja) | 2013-11-28 |
JP2013238876A5 true JP2013238876A5 (ja) | 2014-07-10 |
JP6073753B2 JP6073753B2 (ja) | 2017-02-01 |
Family
ID=39046860
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009551977A Expired - Fee Related JP5551446B2 (ja) | 2007-03-01 | 2007-10-30 | 高速の半導体光変調器 |
JP2013141219A Expired - Fee Related JP6073753B2 (ja) | 2007-03-01 | 2013-07-05 | 高速の半導体光変調器 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009551977A Expired - Fee Related JP5551446B2 (ja) | 2007-03-01 | 2007-10-30 | 高速の半導体光変調器 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7672553B2 (ja) |
EP (1) | EP2132595B1 (ja) |
JP (2) | JP5551446B2 (ja) |
KR (1) | KR101158969B1 (ja) |
CN (1) | CN101622570B (ja) |
WO (1) | WO2008105854A1 (ja) |
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GB2477131A (en) * | 2010-01-22 | 2011-07-27 | Univ Surrey | Electro-optic device |
KR101683543B1 (ko) * | 2010-02-08 | 2016-12-07 | 삼성전자 주식회사 | 벌크 실리콘 기판을 사용하는 변조기 |
US8842942B2 (en) * | 2010-02-08 | 2014-09-23 | Samsung Electronics Co., Ltd. | Optical modulator formed on bulk-silicon substrate |
GB2477935A (en) * | 2010-02-17 | 2011-08-24 | Univ Surrey | Electro-optic device with a waveguide rib |
CN101907785B (zh) * | 2010-06-11 | 2015-09-16 | 上海华虹宏力半导体制造有限公司 | 一种光调制器pn结的制作方法 |
US8358897B1 (en) * | 2010-12-10 | 2013-01-22 | Aurrion, Llc | High index bonding layer for hybrid photonic devices |
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US8542954B2 (en) * | 2012-02-01 | 2013-09-24 | Kotura, Inc. | Optical component having reduced dependency on etch depth |
US9329415B2 (en) | 2012-11-05 | 2016-05-03 | Agency For Science, Technology And Research | Method for forming an optical modulator |
JP6020096B2 (ja) * | 2012-11-30 | 2016-11-02 | 富士通株式会社 | 光変調器及び光送信器 |
US9625746B2 (en) | 2012-12-11 | 2017-04-18 | Acacia Communications, Inc. | Silicon depletion modulators with enhanced slab doping |
US10025120B2 (en) | 2012-12-13 | 2018-07-17 | Luxtera, Inc. | Method and system for a low parasitic silicon high-speed phase modulator having raised fingers perpendicular to the PN junction |
JP2014174306A (ja) * | 2013-03-08 | 2014-09-22 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路構造 |
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US9939666B2 (en) | 2013-06-06 | 2018-04-10 | Acacia Communications, Inc. | Silicon electro-optical modulator |
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US9929725B2 (en) * | 2015-01-09 | 2018-03-27 | Northwestern University | System and method for anti-ambipolar heterojunctions from solution-processed semiconductors |
US10514503B2 (en) | 2016-03-04 | 2019-12-24 | The Governing Council Of The University Of Toronto | System and method for manufacturing a semiconductor junction |
CN107293601B (zh) * | 2016-04-12 | 2021-10-22 | 朱江 | 一种肖特基半导体装置及其制备方法 |
CN106873192A (zh) * | 2016-11-07 | 2017-06-20 | 北京交通大学 | 基于硅波导的电光超快空间调制器 |
CN110431475B (zh) * | 2017-01-18 | 2023-09-19 | 新飞通光电公司 | 用于基于半导体的mzm调制器的相位匹配的光波传播和rf波传播的方法和装置 |
JP6983590B2 (ja) * | 2017-09-08 | 2021-12-17 | 技術研究組合光電子融合基盤技術研究所 | 光変調器及びその製造方法 |
JP6823619B2 (ja) * | 2018-04-19 | 2021-02-03 | 日本電信電話株式会社 | 光変調器 |
CN109324428B (zh) * | 2018-11-07 | 2021-11-12 | 三明学院 | 硅基电光调制器的调制臂长度设置方法及设备 |
CN110989211B (zh) * | 2018-12-06 | 2023-08-22 | 希烽光电科技(南京)有限公司 | 带有梳状传输线的单片电光调制器 |
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CN110955067B (zh) * | 2019-12-12 | 2022-09-02 | 武汉邮电科学研究院有限公司 | 一种水平分层的脊形光波导器件的有源区结构及制造方法 |
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-
2007
- 2007-03-01 US US11/681,070 patent/US7672553B2/en not_active Expired - Fee Related
- 2007-10-30 WO PCT/US2007/022945 patent/WO2008105854A1/en active Application Filing
- 2007-10-30 EP EP07839857.5A patent/EP2132595B1/en not_active Not-in-force
- 2007-10-30 JP JP2009551977A patent/JP5551446B2/ja not_active Expired - Fee Related
- 2007-10-30 CN CN2007800519416A patent/CN101622570B/zh not_active Expired - Fee Related
- 2007-10-30 KR KR1020097018204A patent/KR101158969B1/ko not_active IP Right Cessation
-
2013
- 2013-07-05 JP JP2013141219A patent/JP6073753B2/ja not_active Expired - Fee Related
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