JP2013214769A - 相変化合金をcmpするための組成物 - Google Patents
相変化合金をcmpするための組成物 Download PDFInfo
- Publication number
- JP2013214769A JP2013214769A JP2013141021A JP2013141021A JP2013214769A JP 2013214769 A JP2013214769 A JP 2013214769A JP 2013141021 A JP2013141021 A JP 2013141021A JP 2013141021 A JP2013141021 A JP 2013141021A JP 2013214769 A JP2013214769 A JP 2013214769A
- Authority
- JP
- Japan
- Prior art keywords
- cmp
- composition
- polishing
- substrate
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 104
- 239000000956 alloy Substances 0.000 title claims abstract description 37
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 35
- 230000008859 change Effects 0.000 title claims abstract description 26
- 238000005498 polishing Methods 0.000 claims abstract description 85
- 239000000758 substrate Substances 0.000 claims abstract description 54
- 238000000034 method Methods 0.000 claims abstract description 38
- 239000002738 chelating agent Substances 0.000 claims abstract description 29
- 239000003082 abrasive agent Substances 0.000 claims abstract description 24
- 239000007800 oxidant agent Substances 0.000 claims abstract description 24
- 239000000126 substance Substances 0.000 claims abstract description 17
- 150000001875 compounds Chemical class 0.000 claims abstract description 11
- 239000008365 aqueous carrier Substances 0.000 claims abstract description 5
- 229910000618 GeSbTe Inorganic materials 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 24
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 19
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 18
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 12
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 claims description 11
- 150000003839 salts Chemical class 0.000 claims description 10
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 claims description 9
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 8
- 239000008119 colloidal silica Substances 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 229910021485 fumed silica Inorganic materials 0.000 claims description 5
- 235000012239 silicon dioxide Nutrition 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- KXDHJXZQYSOELW-UHFFFAOYSA-N Carbamic acid Chemical class NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 claims description 3
- 229910019142 PO4 Inorganic materials 0.000 claims description 3
- 229920000388 Polyphosphate Polymers 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- 150000007513 acids Chemical class 0.000 claims description 3
- 150000001991 dicarboxylic acids Chemical class 0.000 claims description 3
- KHIWWQKSHDUIBK-UHFFFAOYSA-N periodic acid Chemical compound OI(=O)(=O)=O KHIWWQKSHDUIBK-UHFFFAOYSA-N 0.000 claims description 3
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 claims description 3
- ZJAOAACCNHFJAH-UHFFFAOYSA-N phosphonoformic acid Chemical class OC(=O)P(O)(O)=O ZJAOAACCNHFJAH-UHFFFAOYSA-N 0.000 claims description 3
- 239000001205 polyphosphate Substances 0.000 claims description 3
- 235000011176 polyphosphates Nutrition 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 235000021317 phosphate Nutrition 0.000 claims 2
- 150000003013 phosphoric acid derivatives Chemical class 0.000 claims 2
- 229910052787 antimony Inorganic materials 0.000 abstract description 7
- 229910052732 germanium Inorganic materials 0.000 abstract description 7
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 abstract description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052738 indium Inorganic materials 0.000 abstract description 6
- 229910052714 tellurium Inorganic materials 0.000 abstract description 6
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 abstract description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 abstract description 5
- 239000012071 phase Substances 0.000 description 15
- 239000002002 slurry Substances 0.000 description 12
- 239000010409 thin film Substances 0.000 description 12
- 239000002245 particle Substances 0.000 description 11
- 238000007517 polishing process Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 239000013522 chelant Substances 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- -1 etc.) Chemical compound 0.000 description 3
- 239000012782 phase change material Substances 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000003125 aqueous solvent Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000006174 pH buffer Substances 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- MLIWQXBKMZNZNF-KUHOPJCQSA-N (2e)-2,6-bis[(4-azidophenyl)methylidene]-4-methylcyclohexan-1-one Chemical compound O=C1\C(=C\C=2C=CC(=CC=2)N=[N+]=[N-])CC(C)CC1=CC1=CC=C(N=[N+]=[N-])C=C1 MLIWQXBKMZNZNF-KUHOPJCQSA-N 0.000 description 1
- RLHGFJMGWQXPBW-UHFFFAOYSA-N 2-hydroxy-3-(1h-imidazol-5-ylmethyl)benzamide Chemical compound NC(=O)C1=CC=CC(CC=2NC=NC=2)=C1O RLHGFJMGWQXPBW-UHFFFAOYSA-N 0.000 description 1
- USFZMSVCRYTOJT-UHFFFAOYSA-N Ammonium acetate Chemical compound N.CC(O)=O USFZMSVCRYTOJT-UHFFFAOYSA-N 0.000 description 1
- 239000005695 Ammonium acetate Substances 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- WHUUTDBJXJRKMK-UHFFFAOYSA-N Glutamic acid Natural products OC(=O)C(N)CCC(O)=O WHUUTDBJXJRKMK-UHFFFAOYSA-N 0.000 description 1
- CKLJMWTZIZZHCS-REOHCLBHSA-N L-aspartic acid Chemical compound OC(=O)[C@@H](N)CC(O)=O CKLJMWTZIZZHCS-REOHCLBHSA-N 0.000 description 1
- WHUUTDBJXJRKMK-VKHMYHEASA-N L-glutamic acid Chemical compound OC(=O)[C@@H](N)CCC(O)=O WHUUTDBJXJRKMK-VKHMYHEASA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- RSRJCYZEMGBMDE-UHFFFAOYSA-J [K+].[K+].[K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O.[O-]S(=O)(=O)OOS([O-])(=O)=O Chemical compound [K+].[K+].[K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O.[O-]S(=O)(=O)OOS([O-])(=O)=O RSRJCYZEMGBMDE-UHFFFAOYSA-J 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001370 alpha-amino acid derivatives Chemical class 0.000 description 1
- 235000008206 alpha-amino acids Nutrition 0.000 description 1
- 235000001014 amino acid Nutrition 0.000 description 1
- 150000001413 amino acids Chemical class 0.000 description 1
- 229940043376 ammonium acetate Drugs 0.000 description 1
- 235000019257 ammonium acetate Nutrition 0.000 description 1
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 235000003704 aspartic acid Nutrition 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 150000001576 beta-amino acids Chemical class 0.000 description 1
- OQFSQFPPLPISGP-UHFFFAOYSA-N beta-carboxyaspartic acid Natural products OC(=O)C(N)C(C(O)=O)C(O)=O OQFSQFPPLPISGP-UHFFFAOYSA-N 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 235000019262 disodium citrate Nutrition 0.000 description 1
- 239000002526 disodium citrate Substances 0.000 description 1
- CEYULKASIQJZGP-UHFFFAOYSA-L disodium;2-(carboxymethyl)-2-hydroxybutanedioate Chemical compound [Na+].[Na+].[O-]C(=O)CC(O)(C(=O)O)CC([O-])=O CEYULKASIQJZGP-UHFFFAOYSA-L 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 235000013922 glutamic acid Nutrition 0.000 description 1
- 239000004220 glutamic acid Substances 0.000 description 1
- 235000019589 hardness Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000002356 laser light scattering Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001444 polymaleic acid Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 229920002620 polyvinyl fluoride Polymers 0.000 description 1
- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000001384 succinic acid Substances 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- OUXVDHDFKSWBOW-UHFFFAOYSA-N tetraazanium sulfonatooxy sulfate Chemical compound [NH4+].[NH4+].[NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O.[O-]S(=O)(=O)OOS([O-])(=O)=O OUXVDHDFKSWBOW-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/04—Heavy metals
- C23F3/06—Heavy metals with acidic solutions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
- H10N70/066—Shaping switching materials by filling of openings, e.g. damascene method
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/884—Switching materials based on at least one element of group IIIA, IVA or VA, e.g. elemental or compound semiconductors
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
【解決手段】この組成物は、6重量%以下の粒状研磨材料を、任意の酸化剤、少なくとも1種類のキレート化剤、そして該組成物のための水性キャリヤと組み合わせて含んでいる。キレート化剤は、基材中に存在している、相変化合金又はその成分(例えば、ゲルマニウム、インジウム、アンチモン及び/又はテルル種)をキレート化することができるか、さもなければ、基材をCMP組成物で研磨する間にPCAから形成される物質をキレート化することができる1種類の化合物あるいは複数種類の化合物の組み合わせを含んでいる。また、この組成物を使用して、相変化合金を含有する基材を研磨するためのCMP方法も開示される。
【選択図】なし
Description
本例では、基材からのGST薄膜の除去についての従来のCMP組成物の挙動を本発明の組成物と比較して説明する。
本例では、GST薄膜の有効な除去に関して、キレート化剤を含有するCMP組成物の能力を説明する。
本例では、GST薄膜の有効な除去に関して、キレート化剤、酸化剤及び3重量%以下の量の研磨材を含有する本発明のCMP組成物の能力を説明する。
本例では、本発明のCMP組成物を使用したGST除去の時間依存性を、キレート化剤を包含していない従来のCMPスラリーと比較して説明する。
Claims (26)
- 相変化合金を含有する基材を研磨するための化学機械研磨(CMP)組成物であって、
(a)3重量%以下の量の粒状研磨材料、
(b)前記相変化合金、その成分、あるいは化学機械研磨中に前記PCA材料から形成される物質をキレート化することのできる少なくとも1種類のキレート化剤、及び
(c)該組成物のための水性キャリヤ
を含んでなるCMP組成物。 - 前記粒状研磨材料が1重量%以下の量で存在している、請求項1に記載のCMP組成物。
- 前記粒状研磨材料が0.001〜6重量%の量で存在している、請求項1に記載のCMP組成物。
- 前記粒状研磨材料が、コロイド状シリカ、フュームドシリカ及びα−アルミナからなる群から選ばれる、請求項1に記載のCMP組成物。
- 酸化剤をさらに含む、請求項1に記載のCMP組成物。
- 前記酸化剤が、過酸化水素、過硫酸塩、過ヨウ素酸塩及びその塩からなる群から選ばれる少なくとも1種類の酸化剤を含む、請求項5に記載のCMP組成物。
- 前記酸化剤が過酸化水素を含む、請求項5に記載のCMP組成物。
- 前記酸化剤が0.1〜6重量%の量で存在している、請求項5に記載のCMP組成物。
- 前記キレート化剤が、ジカルボン酸、ポリカルボン酸、アミノカルボン酸、リン酸塩、ポリリン酸塩、アミノリン酸塩及びホスホノカルボン酸、高分子キレート化剤ならびにその塩からなる群から選ばれる少なくとも1種類の化合物を含む、請求項1に記載のCMP組成物。
- 前記キレート化剤が、蓚酸、マロン酸、コハク酸、クエン酸及びその塩からなる群から選ばれる少なくとも1種類の化合物を含む、請求項1に記載のCMP組成物。
- 相変化合金を含有する基材を研磨するための化学機械研磨(CMP)方法であって、下記の工程:
(a)相変化合金を含有する基材の表面に、研磨パッドと、水性CMP組成物であって、水性キャリヤ、粒状研磨材料、任意の酸化剤及び前記相変化合金、その成分、あるいは化学機械研磨中に該組成物から形成される物質をキレート化することのできるキレート化剤を含み、かつ前記粒状研磨材料が6重量%以下の量で存在しているCMP組成物とを接触させること、及び
(b)前記CMP組成物の一部と、前記研磨パッドと前記基材の間の表面との接触を前記基材から前記相変化合金の少なくとも一部を研磨するのに十分な時間にわたって継続する一方で、前記研磨パッドと前記基材との間で相対運動を引き起こすこと
を含んでなるCMP方法。 - 前記粒状研磨材料を0.01〜5重量%の量で存在させる、請求項11に記載のCMP方法。
- 前記粒状研磨材料を0.1〜1重量%の量で存在させる、請求項11に記載のCMP方法。
- 前記粒状研磨材料を、コロイド状シリカ、フュームドシリカ及びα−アルミナからなる群から選択する、請求項11に記載のCMP方法。
- 前記組成物が、過酸化水素、過硫酸塩、過ヨウ素酸塩及びその塩からなる群から選ばれる少なくとも1種類の酸化剤を含む、請求項11に記載のCMP方法。
- 前記組成物が過酸化水素を含む、請求項11に記載のCMP方法。
- 前記酸化剤を0.1〜6重量%の量で存在させる、請求項11に記載のCMP方法。
- 前記酸化剤を2〜4重量%の量で存在させる、請求項11に記載のCMP方法。
- 前記キレート化剤が、ジカルボン酸、ポリカルボン酸、アミノカルボン酸、リン酸塩、ポリリン酸塩、アミノリン酸塩及びホスホノカルボン酸、高分子キレート化剤ならびにその塩からなる群から選ばれる少なくとも1種類の化合物を含む、請求項11に記載のCMP方法。
- 前記キレート化剤が、蓚酸、マロン酸、コハク酸、クエン酸及びその塩からなる群から選ばれる少なくとも1種類の化合物を含む、請求項11に記載のCMP方法。
- 前記基材がゲルマニウム・アンチモン・テルル(GST)合金を含む、請求項11に記載のCMP方法。
- 前記基材が線形材料をさらに含む、請求項11に記載のCMP方法。
- 前記線形材料が、Ti、TiN及びその組み合わせからなる群から選ばれる、請求項22に記載のCMP方法。
- 前記基材が、前記GST合金及び前記線形材料の下に二酸化ケイ素の層をさらに含む、請求項22に記載のCMP方法。
- 前記GST合金及び前記線形材料がそれぞれ研磨され、前記二酸化ケイ素の層のところで研磨が停止される、請求項24に記載のCMP方法。
- 前記基材がインジウム・アンチモン(InSb)を含む、請求項11に記載のCMP方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US76416106P | 2006-02-01 | 2006-02-01 | |
US60/764,161 | 2006-02-01 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008553321A Division JP5356832B2 (ja) | 2006-02-01 | 2007-01-31 | 相変化合金をcmpするための方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013214769A true JP2013214769A (ja) | 2013-10-17 |
JP5643393B2 JP5643393B2 (ja) | 2014-12-17 |
Family
ID=38327727
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008553321A Active JP5356832B2 (ja) | 2006-02-01 | 2007-01-31 | 相変化合金をcmpするための方法 |
JP2013141021A Active JP5643393B2 (ja) | 2006-02-01 | 2013-07-04 | 相変化合金をcmpするための組成物 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008553321A Active JP5356832B2 (ja) | 2006-02-01 | 2007-01-31 | 相変化合金をcmpするための方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US7897061B2 (ja) |
EP (1) | EP1979431B1 (ja) |
JP (2) | JP5356832B2 (ja) |
KR (1) | KR101173720B1 (ja) |
CN (1) | CN101370897B (ja) |
IL (1) | IL192528A (ja) |
MY (1) | MY147946A (ja) |
TW (1) | TWI359192B (ja) |
WO (1) | WO2007089824A1 (ja) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8518296B2 (en) | 2007-02-14 | 2013-08-27 | Micron Technology, Inc. | Slurries and methods for polishing phase change materials |
US20090001339A1 (en) * | 2007-06-29 | 2009-01-01 | Tae Young Lee | Chemical Mechanical Polishing Slurry Composition for Polishing Phase-Change Memory Device and Method for Polishing Phase-Change Memory Device Using the Same |
JP5529736B2 (ja) * | 2007-07-26 | 2014-06-25 | キャボット マイクロエレクトロニクス コーポレイション | 相変化材料を化学的機械的に研磨するための組成物及び方法 |
EP2048207A1 (en) * | 2007-10-11 | 2009-04-15 | STMicroelectronics S.r.l. | Method of planarizing chalcogenide alloys, in particular for use in phase change memory devices |
KR101198100B1 (ko) * | 2007-12-11 | 2012-11-09 | 삼성전자주식회사 | 상변화 물질층 패턴의 형성 방법, 상변화 메모리 장치의제조 방법 및 이에 사용되는 상변화 물질층 연마용 슬러리조성물 |
US8735293B2 (en) * | 2008-11-05 | 2014-05-27 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing composition and methods relating thereto |
US20100130013A1 (en) * | 2008-11-24 | 2010-05-27 | Applied Materials, Inc. | Slurry composition for gst phase change memory materials polishing |
US8226841B2 (en) * | 2009-02-03 | 2012-07-24 | Cabot Microelectronics Corporation | Polishing composition for nickel-phosphorous memory disks |
US20120001118A1 (en) * | 2010-07-01 | 2012-01-05 | Koo Ja-Ho | Polishing slurry for chalcogenide alloy |
US20120003834A1 (en) * | 2010-07-01 | 2012-01-05 | Koo Ja-Ho | Method Of Polishing Chalcogenide Alloy |
CN102554783B (zh) * | 2010-12-23 | 2014-12-03 | 中芯国际集成电路制造(上海)有限公司 | 研磨垫清洗方法 |
US8309468B1 (en) * | 2011-04-28 | 2012-11-13 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing composition and method for polishing germanium-antimony-tellurium alloys |
US8790160B2 (en) * | 2011-04-28 | 2014-07-29 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing composition and method for polishing phase change alloys |
TWI548728B (zh) * | 2011-08-01 | 2016-09-11 | 巴斯夫歐洲公司 | 一種製造半導體裝置的方法,其包含在包含特定有機化合物之CMP組成物的存在下化學機械拋光元素鍺及/或Si1-x Gex材料 |
EP2554613A1 (en) | 2011-08-01 | 2013-02-06 | Basf Se | A process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of elemental germanium and/or si1-xgex material in the presence of a cmp composi-tion comprising a specific organic compound |
EP2554612A1 (en) | 2011-08-01 | 2013-02-06 | Basf Se | A process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of elemental germanium and/or Si1-xGex material in the presence of a CMP composi-tion having a pH value of 3.0 to 5.5 |
JP2013084876A (ja) * | 2011-09-30 | 2013-05-09 | Fujimi Inc | 研磨用組成物 |
JP2013080751A (ja) * | 2011-09-30 | 2013-05-02 | Fujimi Inc | 研磨用組成物 |
KR20130081599A (ko) * | 2012-01-09 | 2013-07-17 | 에스케이하이닉스 주식회사 | 연마 조성물 및 이를 이용한 화학기계적 평탄화 방법 |
US10143358B2 (en) | 2012-02-07 | 2018-12-04 | Treble Innovations, Llc | System and method for a magnetic endoscope |
US9376594B2 (en) | 2012-03-16 | 2016-06-28 | Fujimi Incorporated | Polishing composition |
WO2013157442A1 (ja) * | 2012-04-18 | 2013-10-24 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
US9039914B2 (en) | 2012-05-23 | 2015-05-26 | Cabot Microelectronics Corporation | Polishing composition for nickel-phosphorous-coated memory disks |
JP2013247341A (ja) | 2012-05-29 | 2013-12-09 | Fujimi Inc | 研磨用組成物並びにそれを用いた研磨方法及びデバイス製造方法 |
US8778211B2 (en) * | 2012-07-17 | 2014-07-15 | Cabot Microelectronics Corporation | GST CMP slurries |
US8920667B2 (en) * | 2013-01-30 | 2014-12-30 | Cabot Microelectronics Corporation | Chemical-mechanical polishing composition containing zirconia and metal oxidizer |
JP6139975B2 (ja) * | 2013-05-15 | 2017-05-31 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
EP2810997A1 (en) | 2013-06-05 | 2014-12-10 | Basf Se | A chemical mechanical polishing (cmp) composition |
US9434859B2 (en) | 2013-09-24 | 2016-09-06 | Cabot Microelectronics Corporation | Chemical-mechanical planarization of polymer films |
JP2018506176A (ja) | 2014-12-16 | 2018-03-01 | ビーエーエスエフ ソシエタス・ヨーロピアBasf Se | ゲルマニウムを含む基板の高効率研磨のための化学機械研磨(cmp)組成物 |
US9597768B1 (en) * | 2015-09-09 | 2017-03-21 | Cabot Microelectronics Corporation | Selective nitride slurries with improved stability and improved polishing characteristics |
WO2017075435A1 (en) * | 2015-10-30 | 2017-05-04 | Corning Incorporated | Glass articles with mixed polymer and metal oxide coatings |
CN110788739A (zh) * | 2019-10-31 | 2020-02-14 | 云南北方昆物光电科技发展有限公司 | 一种锑化铟单晶片的抛光方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005007770A1 (en) * | 2003-07-11 | 2005-01-27 | W.R. Grace & Co.-Conn. | Abrasive particles for chemical mechanical polishing |
JP2005032855A (ja) * | 2003-07-09 | 2005-02-03 | Matsushita Electric Ind Co Ltd | 半導体記憶装置及びその製造方法 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE148914C (ja) * | ||||
DE142830C (ja) * | ||||
GB1278499A (en) * | 1968-10-17 | 1972-06-21 | Texas Instruments Inc | Improved process for polishing oxidizable surfaces |
SU1059033A1 (ru) * | 1982-04-16 | 1983-12-07 | Ордена Ленина физико-технический институт им.А.Ф.Иоффе | Полирующий травитель дл антимонида инди |
JPS59196385A (ja) * | 1983-04-23 | 1984-11-07 | Shinko Electric Ind Co Ltd | 化学研摩液 |
JP3147168B2 (ja) * | 1990-10-08 | 2001-03-19 | 日産化学工業株式会社 | 第3―5族化合物半導体の研磨剤 |
US5196353A (en) | 1992-01-03 | 1993-03-23 | Micron Technology, Inc. | Method for controlling a semiconductor (CMP) process by measuring a surface temperature and developing a thermal image of the wafer |
JPH06124931A (ja) * | 1992-08-28 | 1994-05-06 | Hitachi Cable Ltd | 基板貼付用接着剤及び基板の研磨方法 |
US6614529B1 (en) | 1992-12-28 | 2003-09-02 | Applied Materials, Inc. | In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization |
JP2585963B2 (ja) * | 1993-12-10 | 1997-02-26 | 日本エクシード株式会社 | 化合物半導体のための研磨液及びこれを用いた化合物半導体の研磨方法 |
US5433651A (en) | 1993-12-22 | 1995-07-18 | International Business Machines Corporation | In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing |
US5489233A (en) | 1994-04-08 | 1996-02-06 | Rodel, Inc. | Polishing pads and methods for their use |
US5527423A (en) | 1994-10-06 | 1996-06-18 | Cabot Corporation | Chemical mechanical polishing slurry for metal layers |
US5964643A (en) | 1995-03-28 | 1999-10-12 | Applied Materials, Inc. | Apparatus and method for in-situ monitoring of chemical mechanical polishing operations |
US5958794A (en) | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
CN1243071C (zh) | 1998-12-28 | 2006-02-22 | 日立化成工业株式会社 | 金属研磨液材料、金属研磨液、其制造方法及使用它的研磨方法 |
US6719920B2 (en) * | 2001-11-30 | 2004-04-13 | Intel Corporation | Slurry for polishing a barrier layer |
US20030162398A1 (en) * | 2002-02-11 | 2003-08-28 | Small Robert J. | Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same |
CN100336179C (zh) * | 2002-04-30 | 2007-09-05 | 日立化成工业株式会社 | 研磨液及研磨方法 |
US6744088B1 (en) | 2002-12-13 | 2004-06-01 | Intel Corporation | Phase change memory device on a planar composite layer |
JP4167928B2 (ja) * | 2003-04-23 | 2008-10-22 | 住友金属鉱山株式会社 | Iii−v族化合物半導体ウェハ用の研磨液及びそれを用いたiii−v族化合物半導体ウェハの研磨方法 |
JP2005268666A (ja) * | 2004-03-19 | 2005-09-29 | Fujimi Inc | 研磨用組成物 |
KR100850877B1 (ko) * | 2004-06-18 | 2008-08-07 | 주식회사 동진쎄미켐 | 철 함유 콜로이달 실리카를 포함하는 화학 기계적 연마슬러리 조성물 |
US7303993B2 (en) * | 2004-07-01 | 2007-12-04 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing compositions and methods relating thereto |
CN1300271C (zh) * | 2004-09-24 | 2007-02-14 | 中国科学院上海微系统与信息技术研究所 | 硫系化合物相变材料化学机械抛光的纳米抛光液及其应用 |
CN100335581C (zh) * | 2004-11-24 | 2007-09-05 | 中国科学院上海微系统与信息技术研究所 | 硫系相变材料化学机械抛光的无磨料抛光液及其应用 |
-
2007
- 2007-01-29 US US11/699,129 patent/US7897061B2/en active Active
- 2007-01-31 CN CN2007800029065A patent/CN101370897B/zh active Active
- 2007-01-31 JP JP2008553321A patent/JP5356832B2/ja active Active
- 2007-01-31 WO PCT/US2007/002611 patent/WO2007089824A1/en active Application Filing
- 2007-01-31 EP EP07717147.8A patent/EP1979431B1/en active Active
- 2007-01-31 KR KR1020087021237A patent/KR101173720B1/ko active IP Right Grant
- 2007-02-01 TW TW096103738A patent/TWI359192B/zh active
-
2008
- 2008-06-30 IL IL192528A patent/IL192528A/en not_active IP Right Cessation
- 2008-07-30 MY MYPI20082866A patent/MY147946A/en unknown
-
2013
- 2013-07-04 JP JP2013141021A patent/JP5643393B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005032855A (ja) * | 2003-07-09 | 2005-02-03 | Matsushita Electric Ind Co Ltd | 半導体記憶装置及びその製造方法 |
WO2005007770A1 (en) * | 2003-07-11 | 2005-01-27 | W.R. Grace & Co.-Conn. | Abrasive particles for chemical mechanical polishing |
Also Published As
Publication number | Publication date |
---|---|
EP1979431A1 (en) | 2008-10-15 |
IL192528A (en) | 2012-10-31 |
CN101370897B (zh) | 2012-09-05 |
MY147946A (en) | 2013-02-15 |
WO2007089824A1 (en) | 2007-08-09 |
EP1979431A4 (en) | 2009-04-29 |
JP2009525615A (ja) | 2009-07-09 |
TW200734439A (en) | 2007-09-16 |
EP1979431B1 (en) | 2018-01-10 |
TWI359192B (en) | 2012-03-01 |
US20070178700A1 (en) | 2007-08-02 |
IL192528A0 (en) | 2009-02-11 |
US7897061B2 (en) | 2011-03-01 |
CN101370897A (zh) | 2009-02-18 |
JP5356832B2 (ja) | 2013-12-04 |
KR20080092976A (ko) | 2008-10-16 |
WO2007089824A8 (en) | 2007-12-06 |
KR101173720B1 (ko) | 2012-08-13 |
JP5643393B2 (ja) | 2014-12-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5643393B2 (ja) | 相変化合金をcmpするための組成物 | |
EP2183333B1 (en) | Compositions and methods for chemical-mechanical polishing of phase change materials | |
JP6251262B2 (ja) | Gst用cmpスラリー | |
KR101069472B1 (ko) | 칼코게나이드 물질의 화학 기계적 평탄화 방법 | |
US7915071B2 (en) | Method for chemical mechanical planarization of chalcogenide materials | |
JP5176077B2 (ja) | 金属用研磨液及びこれを用いた研磨方法 | |
US8920667B2 (en) | Chemical-mechanical polishing composition containing zirconia and metal oxidizer | |
US20100130013A1 (en) | Slurry composition for gst phase change memory materials polishing | |
JP2012235111A (ja) | ケミカルメカニカルポリッシング組成物及び相変化合金を研磨する方法 | |
JP2015532005A (ja) | 白金及びルテニウム材料を選択的に研磨するための組成物及び方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130711 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130711 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140527 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20140826 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140829 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140908 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140930 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20141030 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5643393 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |