JP2013214608A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2013214608A JP2013214608A JP2012083931A JP2012083931A JP2013214608A JP 2013214608 A JP2013214608 A JP 2013214608A JP 2012083931 A JP2012083931 A JP 2012083931A JP 2012083931 A JP2012083931 A JP 2012083931A JP 2013214608 A JP2013214608 A JP 2013214608A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0641—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region without components of the field effect type
- H01L27/0647—Bipolar transistors in combination with diodes, or capacitors, or resistors, e.g. vertical bipolar transistor and bipolar lateral transistor and resistor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
- H01L29/66098—Breakdown diodes
- H01L29/66106—Zener diodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/866—Zener diodes
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Abstract
【解決手段】点火装置に用いられる半導体装置が同一半導体基板上に出力段IGBT25とツェナーダイオード(ZD)12とを備え、第1pウェル層2aの表層のnエミッタ(E)領域4と、ゲート(G)絶縁膜5を介して被覆するG電極6と、前記E領域4上のE電極8とを有し、前記ZD12が前記第1pウェル層2aと異なる第2pウェル層2bの表層に、該第2pウェル層2bより高濃度のp+層1表面にオーミック接触するアノード(A)電極13と、前記第2pウェル層2bより低濃度のn−層3表面にショットキー接触するカソード(K)電極14とを備え、前記IGBTのE電極8と前記A電極13とが接続されている。
【選択図】図1
Description
PN接合とこのPN接合に直列接続されるデプレッション型MOSFETを有する構成にかかるデバイスの記載がある(特許文献3)。
また、前記カソード電極がショットキー接触して形成されるショットキー接合の耐圧が、2V以上であることが好ましい。
(製造方法)
図2の回路図の破線枠で示す内燃機関用の点火用IC22をワンチップで形成する製造プロセスに関しては、半導体基板上に、図10の制御回路24内に含まれるポリシリコン抵抗38やデプレッション型MOSFET37および図9の出力段IGBT25のエミッタ−ゲート間に接続される縦型ツェナーダイオード32などの公知の製造プロセスを利用して少しプロセスを変更するだけ容易に製造することができる。
以上の説明では、p基板9上にn+エピ層10とn−エピ層11をエピタキシャル成長させた半導体基板について説明したが、これに限らず、n型の半導体基板11にn型層10およびp型層9をイオン注入と拡散により形成した半導体基板などであっても同様に効果が得られる。
2a、2b pウェル層
3 n−層
4 n+層
5 酸化膜
6 ゲート電極
6a ポリシリコン層
7 層間絶縁膜
8 エミッタ電極
9 p基板
10 n+エピ層
11 n−エピ層
12、39、40 双方向ツェナーダイオード
13、131、134 アノード電極
14、144、145、146、147 カソード電極
21 ECU
22 点火用IC
23 ゲート抵抗
24 制御回路
25 出力段IGBT
25a センスIGBT
26 センス抵抗
27 コイル
28 一次コイル
29 二次コイル
30 電圧源、バッテリー
31 点火プラグ
32 縦型ツェナーダイオード
34 配線抵抗
35 基準電圧
36 オペアンプ
37 デプレッション型MOSFET
38 ポリシリコン抵抗
391,392、394、395 ウェル層
51、52 電流電圧波形
71 半導体基板
72 ウェル層
C コレクタ端子
E エミッタ端子
G ゲート端子
Claims (4)
- IGBTと、該IGBTをサージ電圧から保護する機能を有するツェナーダイオードとを備え、前記IGBTは、第2導電型半導体層の一方の主面上の第1導電型半導体層に第2導電型の第1のウェル層を備え、該第1のウェル層の表層に選択的に設けられる第1導電型のエミッタ層と、該エミッタ層表面と前記第1のウェル層表面との一部にゲート絶縁膜を介して被覆するゲート電極と、該ゲート電極に覆われない前記エミッタ層表面および前記第1のウェル層表面とに共通に接触するエミッタ電極と、前記第2導電型半導体層の他方の主面に接触するコレクタ電極と、を有し、前記ツェナーダイオードは、前記第2導電型半導体層の表層に前記第1のウェル層と離れて設けられる第2導電型の第2のウェル層に接しかつ該第2のウェル層より高不純物濃度の第2導電型層の表面にオーミック接触するアノード電極と、前記第2のウェル層の表層に前記第2導電型層と離れて設けられ該第2のウェル層より低不純物濃度の第1導電型層の表面にショットキー接触するカソード電極と、を備え、前記IGBTのエミッタ電極と前記ツェナーダイオードのアノード電極とが接続されていることを特徴とする半導体装置。
- 内燃機関の点火装置に用いられる半導体装置であることを特徴とする請求項1に記載の半導体装置。
- 前記カソード電極がショットキー接触して形成されるショットキー接合の耐圧が、2V以上であることを特徴とする請求項2記載の半導体装置。
- 前記IGBTの出力電流を制御する制御回路と、該制御回路をサージ電圧から保護する機能を有する第2のツェナーダイオードと、を備え、前記第2のツェナーダイオードは、前記第1導電型半導体層の表層に前記第1のウェル層および前記第2のウェル層と離れて設けられる第2導電型の第3のウェル層に接しかつ該第3のウェル層より高不純物濃度の第2の第2導電型層の表面にオーミック接触する第2のアノード電極と、前記第3のウェル層の表層に前記第2の第2導電型層と離れて設けられ該第3のウェル層より低不純物濃度の第2の第1導電型層の表面にショットキー接触するカソード電極と、を備え、前記IGBTのエミッタ電極と前記ツェナーダイオードのアノード電極とが接続されていることを特徴とする請求項1ないし3のいずれか一項に記載の半導体装置。
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JP2012083931A JP6098041B2 (ja) | 2012-04-02 | 2012-04-02 | 半導体装置 |
US13/854,506 US8803190B2 (en) | 2012-04-02 | 2013-04-01 | Semiconductor device |
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JP2012083931A JP6098041B2 (ja) | 2012-04-02 | 2012-04-02 | 半導体装置 |
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JP6098041B2 JP6098041B2 (ja) | 2017-03-22 |
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Cited By (3)
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JP2015207726A (ja) * | 2014-04-23 | 2015-11-19 | サンケン電気株式会社 | 車両用点火装置の駆動装置 |
JP2017162891A (ja) * | 2016-03-08 | 2017-09-14 | 株式会社東芝 | 半導体装置 |
US11830871B2 (en) | 2020-02-21 | 2023-11-28 | Fuji Electric Co., Ltd. | Semiconductor device and method for fabricating semiconductor device |
Families Citing this family (9)
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JP6707930B2 (ja) * | 2016-03-18 | 2020-06-10 | 富士電機株式会社 | スイッチ装置および点火装置 |
US10411006B2 (en) * | 2016-05-09 | 2019-09-10 | Infineon Technologies Ag | Poly silicon based interface protection |
JP2018067570A (ja) * | 2016-10-17 | 2018-04-26 | 富士電機株式会社 | 半導体装置 |
US10122294B2 (en) * | 2016-12-01 | 2018-11-06 | Ford Global Technologies, Llc | Active gate clamping for inverter switching devices with enhanced common source inductance |
CN107452618B (zh) * | 2017-06-19 | 2019-11-26 | 西安电子科技大学 | 基于埋氧化层的SiC PNM IGBT及其制备方法 |
KR102449320B1 (ko) * | 2017-09-29 | 2022-09-29 | 엘지디스플레이 주식회사 | 초고해상도용 박막 트랜지스터 및 이를 포함하는 유기 발광 표시 장치 |
CN109755303B (zh) * | 2017-11-01 | 2021-02-26 | 苏州东微半导体股份有限公司 | 一种igbt功率器件 |
US11233486B2 (en) * | 2019-02-01 | 2022-01-25 | Skyworks Solutions, Inc. | Concurrent electrostatic discharge and surge protection clamps in power amplifiers |
JP7404600B2 (ja) * | 2019-11-01 | 2023-12-26 | 株式会社東海理化電機製作所 | 半導体集積回路 |
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2012
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2013
- 2013-04-01 US US13/854,506 patent/US8803190B2/en active Active
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2015207726A (ja) * | 2014-04-23 | 2015-11-19 | サンケン電気株式会社 | 車両用点火装置の駆動装置 |
JP2017162891A (ja) * | 2016-03-08 | 2017-09-14 | 株式会社東芝 | 半導体装置 |
US11830871B2 (en) | 2020-02-21 | 2023-11-28 | Fuji Electric Co., Ltd. | Semiconductor device and method for fabricating semiconductor device |
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US20130256746A1 (en) | 2013-10-03 |
JP6098041B2 (ja) | 2017-03-22 |
US8803190B2 (en) | 2014-08-12 |
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