JP2013211397A5 - - Google Patents

Info

Publication number

JP2013211397A5

JP2013211397A5 JP2012080227A JP2012080227A JP2013211397A5 JP 2013211397 A5 JP2013211397 A5 JP 2013211397A5 JP 2012080227 A JP2012080227 A JP 2012080227A JP 2012080227 A JP2012080227 A JP 2012080227A JP 2013211397 A5 JP2013211397 A5 JP 2013211397A5

Authority

JP

Japan

Prior art keywords

molybdenum

mixture

forming

molybdenum trioxide

moo

Prior art date

2012-03-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
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• JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 claims 37
• 239000000203 mixture Substances 0.000 claims 20
• QXYJCZRRLLQGCR-UHFFFAOYSA-N dioxomolybdenum Chemical compound O=[Mo]=O QXYJCZRRLLQGCR-UHFFFAOYSA-N 0.000 claims 12
• 229910000476 molybdenum oxide Inorganic materials 0.000 claims 10
• PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims 10
• 239000004065 semiconductor Substances 0.000 claims 9
• 239000000758 substrate Substances 0.000 claims 9
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 8
• 229910052710 silicon Inorganic materials 0.000 claims 8
• 239000010703 silicon Substances 0.000 claims 8
• 238000004519 manufacturing process Methods 0.000 claims 7
• 238000000034 method Methods 0.000 claims 6
• 239000003638 chemical reducing agent Substances 0.000 claims 5
• 238000010438 heat treatment Methods 0.000 claims 5
• 238000006243 chemical reaction Methods 0.000 claims 4
• 239000000463 material Substances 0.000 claims 4
• ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 2
• 229910052750 molybdenum Inorganic materials 0.000 claims 2
• 239000011733 molybdenum Substances 0.000 claims 2
• 230000008016 vaporization Effects 0.000 claims 2
• OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims 1
• DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims 1
• WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims 1
• FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 1
• ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 1
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
• 229910052782 aluminium Inorganic materials 0.000 claims 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
• 229910052788 barium Inorganic materials 0.000 claims 1
• DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims 1
• 229910052790 beryllium Inorganic materials 0.000 claims 1
• ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims 1
• 229910052792 caesium Inorganic materials 0.000 claims 1
• TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims 1
• 229910052791 calcium Inorganic materials 0.000 claims 1
• 239000011575 calcium Substances 0.000 claims 1
• 229910052735 hafnium Inorganic materials 0.000 claims 1
• VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 1
• 229910052744 lithium Inorganic materials 0.000 claims 1
• 229910052749 magnesium Inorganic materials 0.000 claims 1
• 239000011777 magnesium Substances 0.000 claims 1
• WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 1
• 229910052700 potassium Inorganic materials 0.000 claims 1
• 239000011591 potassium Substances 0.000 claims 1
• 229910052701 rubidium Inorganic materials 0.000 claims 1
• IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 claims 1
• 229910052706 scandium Inorganic materials 0.000 claims 1
• SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims 1
• 229910052708 sodium Inorganic materials 0.000 claims 1
• 239000011734 sodium Substances 0.000 claims 1
• 229910052712 strontium Inorganic materials 0.000 claims 1
• CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims 1
• 229910052719 titanium Inorganic materials 0.000 claims 1
• 239000010936 titanium Substances 0.000 claims 1
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
• 229910052721 tungsten Inorganic materials 0.000 claims 1
• 239000010937 tungsten Substances 0.000 claims 1
• 229910052727 yttrium Inorganic materials 0.000 claims 1
• VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 1