JP2013193020A - Nozzle washing device, coating apparatus and nozzle washing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a nozzle washing device, a coating apparatus and a nozzle washing method by means of which a slit nozzle can be washed clean.SOLUTION: Each of droplet jetting parts 40a and 40b of a nozzle washing device 31 includes: first and second planar members 41 and 42 for forming a slit-like air discharge port by being disposed facing each other; and a third planar member 43 for forming a slit-like washing liquid discharge port by being disposed facing the second planar member 42. Compressed air discharged from the air discharge port formed between the first planar member 41 and the second planar member 42 and a washing liquid discharged from the washing liquid discharge port formed between the second planar member 42 and the third planar member 43 are mixed with each other to form droplets of the washing liquid. The droplets are jetted to an inclined surface 13b in the slit nozzle 13. On the lower side of the third planar member 43, a space area E opened to the atmosphere is formed.

Description

  The present invention relates to a nozzle cleaning device, a coating device, and a nozzle cleaning method.

  For example, in the case of applying a coating solution to the surface of a substrate such as a solar cell panel substrate, an organic EL display device glass substrate, a liquid crystal display device glass substrate, a PDP glass substrate, a photomask glass substrate, or an optical disk substrate. Has a slit-like coating liquid discharge port and an inclined surface close to the coating liquid discharge port, and moves in the horizontal direction in a state of being close to the surface of the substrate, thereby applying the coating liquid to the surface of the substrate. A slit nozzle to apply is used.

  In a coating apparatus using such a slit nozzle, when the coating liquid is continuously applied, an unnecessary object due to the coating liquid adheres in the vicinity of the slit-shaped coating liquid discharge port of the slit nozzle. For this reason, the structure which wash | cleans the coating liquid discharge outlet to which the unnecessary substance adhered by the nozzle washing | cleaning apparatus for every fixed time is employ | adopted.

  In Patent Document 1, a lower surface cleaning brush that can contact the lower surface of the lower end of the slit nozzle, a right side cleaning brush that can contact the lower right side of the slit nozzle, and a lower surface of the lower end of the slit nozzle A nozzle cleaning device is disclosed that includes a possible left side cleaning brush, a right side cleaning brush, and a left side cleaning brush.

  Patent Document 2 discloses a coating apparatus with a cleaning device that cleans a slit nozzle with a two-fluid nozzle that ejects two fluids in which NMP that is a cleaning chemical and nitrogen that is an inert gas are mixed.

  Patent Document 3 discloses a coating nozzle cleaning device that includes a slit connected to a supply source of a cleaning liquid and a nitrogen gas ejection hole and can perform cleaning and drying of the coating nozzle.

JP 2008-290031 A Japanese Patent No. 4792787 JP-A-9-330876

  According to the nozzle cleaning device described in Patent Document 1, it is possible to clean the nozzle cleanly, but for example, the viscosity is high like a sealant or nanometal ink used for a solar cell panel substrate. When the coating solution is used, there arises a problem that it becomes difficult to remove the coating solution adhering to the cleaning brush.

  On the other hand, as described in Patent Document 2 and Patent Document 3, such a problem does not occur when a cleaning device that ejects cleaning liquid or gas to the nozzle is used. If the ejection angle is not appropriate, there arises a problem that the nozzle cannot be cleaned sufficiently.

  This invention was made in order to solve the above-mentioned subject, realized the supply of a cleaning liquid and gas to a slit nozzle at an appropriate angle, and a nozzle cleaning device capable of cleaning the slit nozzle cleanly, An object is to provide a coating apparatus and a nozzle cleaning method.

  The invention according to claim 1 is a nozzle for cleaning a slit nozzle that has a slit-like coating liquid discharge port and an inclined surface close to the coating liquid discharge port and applies the coating liquid to the substrate. In the cleaning apparatus, the first and second plate-like members that form the slit-like gas discharge ports by being arranged to face each other, and the slit-like by being arranged to face the second plate-like member. A third plate member that forms a cleaning liquid discharge port, a gas discharged from a gas discharge port formed between the first plate member and the second plate member, Droplets generated by mixing the cleaning liquid discharged from the cleaning liquid discharge port formed between the second plate-shaped member and the third plate-shaped member are ejected onto the inclined surface of the slit nozzle, and The second plate-like member in the second The Jo member on the opposite side, characterized in that the formation of the spatial region to be exposed to the atmosphere.

  According to a second aspect of the present invention, in the first aspect of the present invention, the third plate member is discharged from the cleaning liquid discharge port with respect to the second plate member. A position adjustment mechanism is provided for adjusting the position by moving the lens to the position.

  According to a third aspect of the present invention, in the second aspect of the present invention, a cover surrounding the inclined surface of the slit nozzle is disposed on the side opposite to the gas discharge port of the first plate member. And a purge mechanism for supplying gas to a region of the cover opposite to the first plate-like member.

  According to a fourth aspect of the present invention, there is provided a nozzle for cleaning a slit nozzle that has a slit-like coating liquid discharge port and an inclined surface close to the coating liquid discharge port and that applies the coating liquid to the substrate. The cleaning apparatus includes a mixing unit that mixes the cleaning liquid and the gas, and first and second plate-like members that are disposed to face each other to form a slit-like discharge port. Droplets generated from the cleaning liquid and gas mixed in the mixing unit from the discharge port formed between the member and the second plate-like member are ejected to the inclined surface of the slit nozzle, and the second A space region that is released to the atmosphere is formed on the opposite side of the plate-like member from the first plate-like member.

  The invention according to claim 5 is a coating apparatus for applying a coating liquid to the surface of a substrate, a stage on which the substrate is placed, a slit-shaped coating liquid discharge port, and an inclined surface close to the coating liquid discharge port A slit nozzle that applies a coating liquid to the surface of the substrate by moving in a horizontal direction relative to the substrate in a state of being close to the surface of the substrate placed on the stage. A nozzle cleaning device according to any one of claims 1 to 4 is provided.

  According to a sixth aspect of the present invention, there is provided a slit-like coating liquid discharge port and a pair of inclined surfaces close to the coating liquid discharge port for cleaning a slit nozzle that applies the coating liquid to the substrate. In the nozzle cleaning method, the first and second plate members that form the slit-like gas discharge ports are arranged to face each other, and the slits are arranged to face the second plate member. A gas discharged from a gas discharge port formed between the first plate-shaped member and the second plate-shaped member, and a third plate-shaped member forming a cleaning liquid discharge port. The liquid droplets generated by mixing the cleaning liquid discharged from the cleaning liquid discharge port formed between the second plate member and the third plate member are ejected to the inclined surface of the slit nozzle. The third plate-like member On the opposite side of the plate-shaped member of 2, the pair of droplet ejection portions in which a space region released to the atmosphere is formed are arranged in first and second directions respectively facing the pair of inclined surfaces of the slit nozzle. A slit nozzle placement step, a first cleaning step for discharging a gas from a gas discharge port in the pair of droplet ejection portions, and a cleaning liquid in the pair of droplet ejection portions, and the pair of liquids A gas is ejected from a gas ejection port in a droplet ejection portion facing in a first direction among the droplet ejection portions, and a cleaning liquid is ejected in a droplet ejection portion facing in a first direction of the pair of droplet ejection portions. The cleaning liquid is discharged from the outlet, and the discharge of the gas from the gas discharge port in the droplet discharge portion facing the second direction of the pair of droplet discharge portions is stopped, and the pair of droplet discharge portions The second direction of A second cleaning step for stopping the discharge of the cleaning liquid from the cleaning liquid discharge port in the liquid droplet ejection part, and gas from the gas discharge port in the liquid droplet ejection part facing the second direction of the pair of liquid droplet ejection parts. While discharging, the cleaning liquid is discharged from the cleaning liquid discharge port in the liquid droplet ejecting portion facing the second direction of the pair of liquid droplet ejecting portions, and is directed to the first direction of the pair of liquid droplet ejecting portions. Stops the discharge of the gas from the gas discharge port in the droplet ejection portion and stops the discharge of the cleaning liquid from the cleaning liquid discharge port in the droplet ejection portion facing the first direction of the pair of droplet ejection portions. A third cleaning step, and a drying step for discharging gas from the gas discharge ports in the pair of droplet ejection portions and stopping the discharge of the cleaning liquid from the cleaning liquid ejection ports in the pair of droplet ejection portions. It is characterized by.

  According to a seventh aspect of the present invention, in the sixth aspect of the invention, after the drying step, the slit nozzle is placed in a state in which gas is being discharged from a gas discharge port in the pair of droplet discharge portions. A second drying step of raising the pair of droplet ejection portions relative to the pair of droplet ejection portions;

  The invention according to claim 8 is the invention according to claim 6, wherein the gas is discharged from the gas discharge ports in the pair of droplet discharge portions between the drying step and the third cleaning step, A fourth cleaning step of discharging a cleaning liquid from a cleaning liquid discharge port in the pair of droplet ejection portions;

  According to the first, fourth, and fifth aspects of the invention, the slit nozzle can be cleaned cleanly by supplying the cleaning liquid and the gas to the slit nozzle at an appropriate angle.

  According to the second aspect of the present invention, the slit is irrelevant to the type of the cleaning liquid and the shape of the slit nozzle by moving the third plate member and adjusting the supply angle of the cleaning liquid and the gas to the slit nozzle. The nozzle can be cleaned more cleanly.

  According to the third aspect of the present invention, it is possible to prevent the cleaning liquid used for cleaning the slit nozzle from adhering to the inclined surface of the slit nozzle.

  According to the sixth aspect of the invention, the slit nozzle can be cleaned cleanly by supplying the cleaning liquid and the gas to the slit nozzle at an appropriate angle. Further, since the cleaning nozzle is cleaned from both the first direction and the second direction, the entire area of the slit nozzle can be cleaned cleanly. Furthermore, it becomes possible to dry the slit nozzle after washing.

  According to invention of Claim 7, it becomes possible to dry the whole inclined surface of a slit nozzle.

  According to the invention described in claim 8, it is possible to clean the slit nozzle more cleanly.

It is a perspective view of a coating device. It is a side surface schematic diagram of a coating device. 1 is a schematic side view showing a nozzle cleaning device 31 according to a first embodiment of the present invention together with a slit nozzle 13. FIG. It is an enlarged view of the principal part of FIG. 4 is a plan view showing a cover 44. FIG. It is explanatory drawing which shows a mode that the droplet produced | generated by mixing compressed air and a washing | cleaning liquid is ejected to the inclined surface in the slit nozzle. 3 is a flowchart showing a cleaning process by a nozzle cleaning device 31. It is a side surface schematic diagram which shows the droplet ejection part 40a in the nozzle cleaning apparatus 31 which concerns on 2nd Embodiment of this invention with the slit nozzle 13. FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a coating apparatus. FIG. 2 is a schematic side view of the coating apparatus. In FIG. 1, a nozzle cleaning device 31 and a pre-dispensing device 34 which will be described later are not shown. In FIG. 2, the carriage 14 and the like which will be described later are not shown.

  This coating apparatus includes a stage 11 for holding the substrate 100 by suction. As this stage 11, a stone surface plate or the like whose flatness of the upper surface is about several micrometers is used. A plurality of lift pins (not shown) are provided on the stage 11 at appropriate intervals. The lift pins support the substrate 100 from below and lift it upward from the surface of the stage 11 when the substrate 100 is loaded and unloaded.

  Above the stage 11, a carriage 14 is provided that extends substantially horizontally from both sides of the stage 11. The carriage 14 includes a nozzle support portion 15 for supporting the slit nozzle 13 and a pair of left and right lifting mechanisms 16 for supporting both ends of the nozzle support portion 15. In addition, a pair of running rails 17 extending in parallel to the substantially horizontal direction are disposed at both ends of the stage 11. These running rails 17 reciprocate the carriage 14 in the X direction shown in FIG. 1 by guiding both ends of the carriage 14.

  A pair of linear motors 20 each provided with a stator 21 and a moving element 22 are disposed along both side edges of the stage 11 at both side portions of the stage 11 and the carriage 14. A pair of linear encoders 23 each having a scale portion and a detector are fixed to both sides of the stage 11 and the carriage 14. The linear encoder 23 detects the position of the carriage 14.

  Further, as shown in FIG. 2, a nozzle cleaning device 31 which is a characteristic part of the present invention is disposed on the side of the stage 11. In this coating apparatus, the slit nozzle 13 is cleaned by the nozzle cleaning apparatus 31 before or after the coating operation is performed. The configuration of the nozzle cleaning device 31 will be described in detail later.

  Further, as shown in FIG. 2, a pre-dispensing device 34 is disposed on the side of the stage 11. The pre-dispensing device 34 includes a pre-dispensing roller 36 in which a part thereof is immersed in the cleaning liquid stored in the storage tank 35 and a doctor blade 37. The pre-dispensing roller 36 and the doctor blade 37 have a length equal to or longer than that of the slit nozzle 13 in the Y direction. The pre-dispensing roller 36 is rotated by driving a motor (not shown). In this coating apparatus, before performing the coating operation, a small amount of coating liquid is discharged from the slit nozzle 13 that has moved above the pre-dispensing roller 36, so that the coating liquid containing the cleaning liquid at the time of cleaning by the nozzle cleaning apparatus 31. Is removed from the slit nozzle 13.

  When a coating operation is executed by this coating apparatus, first, the substrate 100 is loaded onto the stage 11 by a transport mechanism (not shown). Then, the substrate 100 is sucked and held on the stage. In this state, the slit nozzle 13 is moved along the surface of the substrate 100 by driving the linear motor 20 in a state where the slit nozzle 13 is brought close to the surface of the substrate 100 sucked and held on the stage 11, and the coating liquid Is supplied to the surface of the substrate 100. Thereby, a thin film of the coating liquid is formed on the surface of the substrate 100.

  Next, the configuration of the nozzle cleaning device 31 according to the first embodiment of the present invention will be described. FIG. 3 is a schematic side view showing the nozzle cleaning device 31 according to the first embodiment of the present invention together with the slit nozzle 13, and FIG. 4 is an enlarged view of a main part thereof. FIG. 5 is a plan view showing the cover 44. Further, FIG. 6 is an explanatory diagram showing a state in which droplets generated by mixing compressed air and cleaning liquid are ejected onto the inclined surface of the slit nozzle 13.

  The nozzle cleaning device 31 is for cleaning the slit nozzle 13 having a slit-shaped coating liquid discharge port 13a and a pair of inclined surfaces 13b adjacent to the coating liquid discharge port 13a. A pair of droplet ejection portions 40a, 40b disposed in the first and second directions respectively facing the pair of inclined surfaces 13b, a pot 54 for supporting these droplet ejection portions 40a, 40b, and a pot 54 The exhaust duct 56 formed on the side wall of the exhaust duct 56, the cover member 55 disposed on the front surface of the exhaust duct 56, and the waste liquid drain port 57 formed on the lower surface of the pot 54.

  In addition, the droplet ejection portions 40a and 40b are arranged to face each other, thereby forming first and second plate-like members 41 and 42 that form slit-like air discharge ports, and a second plate-like member 42. And a third plate member 43 that forms a slit-like cleaning liquid discharge port.

  A recess 51 is formed in the second plate member. A compressor or the like (not shown) is connected to the recess 51, and compressed air is supplied to the recess 51. The compressed air supplied to the recess 51 is discharged from the slit-like air discharge port through a flow path formed by disposing the first plate member 41 and the second plate member 42 so as to face each other. The The second plate member 42 has a recess 52 formed therein. A cleaning liquid supply unit (not shown) is connected to the recess 52, and the cleaning liquid is supplied to the recess 52. The cleaning liquid supplied to the recess 52 is discharged from the slit-shaped cleaning liquid discharge port through a flow path formed by arranging the second plate member 42 and the third plate member 43 so as to face each other. .

  Compressed air discharged from an air outlet formed between the first plate member 41 and the second plate member 42, and the second plate member 42 and the third plate member 43. The cleaning liquids discharged from the cleaning liquid discharge ports formed therebetween are mixed (externally mixed) with each other immediately after discharge to form cleaning liquid droplets. This droplet is ejected onto the inclined surface 13b of the slit nozzle 13. In this way, by generating the droplets of the cleaning liquid by external mixing, it is possible to reduce the amount of the cleaning liquid used compared to the generation of droplets by internal mixing. The recess 51 and the recess 52 are also called manifolds, and are formed to uniformly discharge air, cleaning liquid, and the like from the slit-like air discharge port and cleaning liquid discharge port.

  As shown in FIG. 4, a pair of long holes 47 is formed in the third plate-like member 43, and a screw 48 that is screwed into the second plate-like member 42 is arranged in each long hole 47. It is installed. For this reason, the third plate-like member 43 is movable with respect to the second plate-like member 42 in the discharge direction of the cleaning liquid discharged from the cleaning liquid discharge port formed therebetween. On the opposite side of the third plate-like member 43 where the second plate-like member 42 is disposed, that is, on the lower side of the third plate-like member 43, a space region E that is released to the atmosphere is formed. ing. More specifically, the space region E is a space region formed immediately below the lower surface of the third plate-like member 43.

  As shown in FIGS. 3 and 4, a cover 44 surrounding the inclined surface 13b of the slit nozzle 13 is disposed on the opposite side of the first plate member 41 where the second plate member 42 is disposed. ing. The cover 44 is sandwiched between the first plate member 41 and the support member 45. As shown in FIG. 5, four covers 44 are disposed so as to surround the slit nozzle 13, and an inclined surface 13 b of the slit nozzle 13 is disposed in a region 49 surrounded by these covers 44. It is the composition which becomes.

  As shown in FIGS. 3 and 4, a lid member 46 having a recess 53 connected to an air supply source (not shown) is disposed above the support member 45. For this reason, air is discharged from the air discharge port formed by the gap between the support member 45 and the lid member 46 to a region of the cover 44 opposite to the first plate-like member 41. As described above, when air is supplied to the opposite area of the cover 44 where the first plate-like member 41 is disposed and the area is purged with air, the slit nozzle 13 described later is cleaned. It is possible to effectively prevent the cleaning liquid droplet from moving upward along the inclined surface 13 b of the slit nozzle 13.

  In the nozzle cleaning device 31 including the pair of droplet ejection portions 40a and 40b having such a configuration, an air discharge port formed between the first plate member 41 and the second plate member 42. Compressed air discharged from the cleaning liquid discharged from the cleaning liquid discharge port formed between the second plate-like member 42 and the third plate-like member 43 is mixed by colliding with each other, and the cleaning liquid It becomes a droplet and is ejected toward the inclined surface 13 b of the slit nozzle 13. Thereby, the slit nozzle 13 is washed. At this time, since a space region E that is released to the atmosphere is formed below the third plate-like member 43, the position of the third plate-like member 43 with respect to the second plate-like member 42 is appropriately set. By maintaining the above, the supply angle of the cleaning liquid droplets to the inclined surface 13b of the slit nozzle 13 can be made appropriate. More specifically, the position of the third plate-like member 43 relative to the second plate-like member 42 is, in other words, the position of the second plate-like member 42 in the discharge direction of the cleaning liquid discharged from the cleaning liquid discharge port. This is the position of the tip of the third plate member 43 with respect to the position of the tip.

  That is, when air is discharged from a discharge portion having a pointed tip, such as the pair of droplet discharge portions 40a and 40b described above, the air is discharged vigorously by surrounding air currents. On the other hand, when the space area E that is released to the atmosphere as described above is not formed, the area that is not released to the atmosphere has a negative pressure, and air is drawn in that direction.

  For the same reason, in this embodiment, as shown in FIG. 6A, the distal end of the third plate member 43 is larger than the distal end of the second plate member 42 by a large distance D1. In the case of projecting only, the third plate-like member 43 side, that is, the lower side becomes negative pressure, so that air is ejected toward the third plate-like member 43, that is, downward. It will be. Further, as shown in FIG. 6B, when the tip of the third plate member 43 protrudes by a small distance D2 with respect to the tip of the second plate member 42, the air is It will be ejected upward from the direction shown in FIG.

  For this reason, by appropriately maintaining the position of the third plate member 43 relative to the second plate member 42, the supply angle of the cleaning liquid droplet to the inclined surface 13b of the slit nozzle 13 is made appropriate. Can do. In particular, in this embodiment, the third plate member 43 is movable with respect to the second plate member 42 in the discharge direction of the cleaning liquid discharged from the cleaning liquid discharge port formed therebetween. Therefore, the inclined surface 13b of the slit nozzle 13 is adjusted by adjusting the position of the third plate member 43 relative to the second plate member 42 according to the type of cleaning liquid, the shape of the slit nozzle 13, and the like. It is possible to make the supply angle of the cleaning liquid droplets more appropriate.

  Here, the supply angle of the cleaning liquid droplet to the inclined surface 13 b of the slit nozzle 13 is preferably an angle at which the cleaning liquid droplet is ejected in a direction along the inclined surface of the slit nozzle 13. It is preferable that the supply angle of the droplets is appropriately adjusted according to the shape of the slit nozzle 13. Since the supply angle of the cleaning liquid droplets can be made more appropriate in this way, it is particularly suitable for cleaning a slit nozzle that discharges a coating liquid having a viscosity of 30 cp (centipoise) or more.

  Next, the cleaning operation of the slit nozzle 13 by the nozzle cleaning device 31 will be described. FIG. 7 is a flowchart showing a cleaning process by the nozzle cleaning device 31.

  When cleaning the slit nozzle 13, first, a slit nozzle arrangement step is executed (step S1). That is, the slit nozzle 13 is moved by the action of the pair of linear motors 20 and the pair of lifting mechanisms 16, and the tip of the slit nozzle 13 is inserted into the region 49 in the nozzle cleaning device 31. Thereby, a pair of droplet ejection part 40a, 40b is arrange | positioned in the 1st, 2nd direction which respectively opposes a pair of inclined surface 13b in the slit nozzle 13. FIG.

  In this state, the first cleaning process is executed (step S2). That is, compressed air is discharged from the air discharge port between the first plate-like member 41 and the second plate-like member 42 in each of the droplet ejection portions 40a and 40b, and the second plate-like member 42 and the second plate-like member 42 The cleaning liquid is discharged from the cleaning liquid discharge port between the three plate-like members 43. Thereby, the droplet produced | generated by mixing compressed air and a washing | cleaning liquid is injected toward the slit nozzle 13, and the slit nozzle 13 is wash | cleaned.

  At this time, air is discharged from the air discharge port formed by the gap between the support member 45 and the lid member 46 to a region of the cover 44 opposite to the first plate-like member 41. As described above, when air is supplied to the region of the cover 44 opposite to the first plate-like member 41 and this region is purged with air, the slit nozzle 13 is inclined during the cleaning of the slit nozzle 13. It becomes possible to effectively prevent the droplet of the cleaning liquid supplied to the surface from moving upward along the inclined surface 13b. This purging operation with air is continued until the cleaning process is completed.

  Next, the second cleaning process is executed (step S3). That is, compression is performed from the air discharge port between the first plate-like member 41 and the second plate-like member 42 in the droplet ejection portion 40a that faces the first direction of the pair of droplet ejection portions 40a and 40b. While discharging air, the cleaning liquid is discharged from the cleaning liquid discharge port between the second plate member 42 and the third plate member 43. At this time, the discharge of the compressed air from the air discharge port in the droplet discharge portion 40b facing the second direction of the pair of droplet discharge portions 40a and 40b is stopped and the discharge of the cleaning liquid from the cleaning liquid discharge port is stopped. Stop.

  Next, a 3rd washing process is performed (Step S4). That is, compression is performed from the air discharge port between the first plate-like member 41 and the second plate-like member 42 in the droplet ejection portion 40b facing the second direction of the pair of droplet ejection portions 40a and 40b. While discharging air, the cleaning liquid is discharged from the cleaning liquid discharge port between the second plate member 42 and the third plate member 43. At this time, the discharge of the compressed air from the air discharge port in the droplet discharge portion 40a facing the first direction of the pair of droplet discharge portions 40a and 40b is stopped and the discharge of the cleaning liquid from the cleaning liquid discharge port is stopped. Stop.

  As described above, when the droplet jetting portions 40a and the droplet jetting portions 40b are alternately used, not only the pair of inclined surfaces 13b in the slit nozzle 13 but also the vicinity of the slit-like coating liquid discharge port 13a is sufficient. It becomes possible to wash it. That is, when droplets are ejected simultaneously from the droplet ejecting portion 40a and the droplet ejecting portion 40b toward the slit nozzle 13, the droplets collide with each other, thereby causing the droplet ejecting portion 40a and the droplet to be ejected. In some cases, the coating liquid discharge port 13a in the slit nozzle 13 located at the center of the ejection portion 40b is not sufficiently cleaned. However, when the droplet jetting portion 40a and the droplet jetting portion 40b are alternately used as in this embodiment, such a collision does not occur, so that the vicinity of the slit-like coating liquid discharge port 13a is sufficiently provided. It becomes possible to wash it.

  Next, a 4th washing process is performed (Step S5). That is, again, the compressed air is discharged from the air discharge port between the first plate-like member 41 and the second plate-like member 42 in each of the droplet jetting portions 40a and 40b, and the second plate-like member 42 is discharged. The cleaning liquid is discharged from the cleaning liquid discharge port between the first plate member 43 and the third plate member 43. Thereby, the slit nozzle 13 is finished and cleaned.

  Thereafter, the first drying process is executed (step S6). That is, in the state where compressed air is being discharged from the air discharge port between the first plate-like member 41 and the second plate-like member 42 in the pair of droplet ejection portions 40a, 40b, the second plate-like The discharge of the cleaning liquid from the cleaning liquid discharge port between the member 42 and the third plate-like member 43 is stopped. Thereby, the slit nozzle 13 is dried with compressed air.

  And a 2nd drying process is performed (step S7). That is, while the compressed air is being discharged from the air discharge port between the first plate-like member 41 and the second plate-like member 42, the slit nozzle is operated by the action of the pair of lifting mechanisms 16 shown in FIG. Is raised with respect to the pair of droplet ejection portions 40a and 40b. Thereby, the whole inclined surface 13 in the slit nozzle 13 can be dried.

  Next, another embodiment of the present invention will be described. FIG. 8 is a schematic side view showing the droplet ejecting portion 40a together with the slit nozzle 13 in the nozzle cleaning device 31 according to the second embodiment of the present invention. In addition, about the member similar to 1st Embodiment mentioned above, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.

  In the droplet ejection part 40a of the nozzle cleaning device 31 according to the second embodiment, instead of the first plate member 41, the second plate member 42, and the third plate member 43 in the first embodiment. In addition, first and second plate-like members 61 and 62 that form slit-like discharge ports are provided. The second plate-like member is formed with a recessed portion 63 connected to a compressed air supply source and a cleaning liquid supply source (not shown). The recess 63 functions as a mixing unit that mixes the compressed air and the cleaning liquid. Further, a space region E that is released to the atmosphere is formed on the opposite side of the second plate member 62 from the first plate member 61, that is, on the lower side of the second plate member 62.

  In the droplet jetting portion 40a of the nozzle cleaning device 31 according to the second embodiment, mixing is performed at the concave portion 63 from the discharge port formed between the first plate-like member 61 and the second plate-like member 62. The liquid droplets generated from the compressed air and the cleaning liquid are ejected onto the inclined surface 13 a of the slit nozzle 13.

  Also in this embodiment, since the space region E that is released to the atmosphere is formed on the lower side, which is directly below the lower surface of the second plate-like member 62, the first plate-like member 62 of the first plate By appropriately maintaining the position with respect to the plate-like member 61, the supply angle of the cleaning liquid droplets to the inclined surface 13b of the slit nozzle 13 can be made appropriate.

  Moreover, in the said embodiment, although the purge operation by air is continued until the washing | cleaning process is complete | finished, it is not restricted to this. While only the inclined surface 13b on one side of the slit nozzle 13 is cleaned, the corresponding one side may be purged with air.

  Moreover, in this invention, it is not restricted to the washing | cleaning process by the nozzle washing | cleaning apparatus 31 in embodiment mentioned above, You may combine the process of the 1st-4th washing | cleaning suitably. For example, when cleaning the slit nozzle 13 that has ejected a coating solution having a high viscosity, the cleaning can be performed more reliably by repeating the second cleaning and the third cleaning a plurality of times.

  In the present invention, an inert gas such as nitrogen may be used as a gas to be used.

DESCRIPTION OF SYMBOLS 11 Stage 13 Slit nozzle 13a Coating liquid discharge port 13b Inclined surface 14 Carriage 15 Nozzle support part 16 Lifting mechanism 17 Traveling rail 20 Linear motor 23 Linear encoder 31 Nozzle cleaning apparatus 34 Pre-dispensing apparatus 40a Droplet discharge part 40b Droplet discharge part 41 First plate member 42 Second plate member 43 Third plate member 44 Cover 47 Long hole 48 Screw 51 Recess 52 Recess 53 Recess 54 Pot 100 Substrate E Space area

Claims (8)

In a nozzle cleaning device for cleaning a slit nozzle that has a slit-like coating liquid discharge port and an inclined surface close to the coating liquid discharge port and applies the coating liquid to the substrate,
First and second plate-shaped members that form slit-like gas discharge ports by being opposed to each other;
A third plate member that forms a slit-like cleaning liquid discharge port by being disposed opposite to the second plate member;
Between the gas discharged from the gas discharge port formed between the first plate member and the second plate member, and between the second plate member and the third plate member And ejecting droplets generated by mixing the cleaning liquid discharged from the cleaning liquid discharge port formed on the inclined surface in the slit nozzle,
A nozzle cleaning device, wherein a space region to be released to the atmosphere is formed on the opposite side of the third plate member to the second plate member. The nozzle cleaning device according to claim 1,
Nozzle cleaning provided with a position adjusting mechanism that adjusts the position of the third plate member by moving it in the discharge direction of the cleaning liquid discharged from the cleaning liquid discharge port with respect to the second plate member. apparatus. The nozzle cleaning device according to claim 2,
A cover surrounding the inclined surface of the slit nozzle is disposed on the opposite side of the first plate-like member to the second plate-like member, and the first plate-like member of the cover is opposite to the first plate-like member. Nozzle cleaning device comprising a purge mechanism for supplying gas to the region. In a nozzle cleaning device for cleaning a slit nozzle that has a slit-like coating liquid discharge port and an inclined surface close to the coating liquid discharge port and applies the coating liquid to the substrate,
A mixing section for mixing the cleaning liquid and the gas;
The first and second plate-shaped members that form slit-shaped discharge ports by being arranged to face each other,
Liquid droplets generated from the cleaning liquid and gas mixed in the mixing section are ejected from the discharge port formed between the first plate-like member and the second plate-like member onto the inclined surface of the slit nozzle. With
A nozzle cleaning device, wherein a space region to be released to the atmosphere is formed on the opposite side of the second plate member to the first plate member. In a coating apparatus for coating a coating solution on the surface of a substrate,
A stage on which the substrate is placed;
It has a slit-like coating liquid discharge port and an inclined surface close to the coating liquid discharge port, and is relatively close to the substrate in the horizontal direction in the state of being close to the surface of the substrate placed on the stage. A slit nozzle that applies a coating solution to the surface of the substrate by moving;
A nozzle cleaning device according to any one of claims 1 to 4,
A coating apparatus comprising: In a nozzle cleaning method for cleaning a slit nozzle for applying a coating liquid to a substrate, having a slit-shaped coating liquid discharge port and a pair of inclined surfaces close to the coating liquid discharge port,
The first and second plate-shaped members that form the slit-shaped gas discharge ports by being disposed to face each other, and the slit-shaped cleaning liquid discharge ports by being disposed to face the second plate-shaped member. A third plate-like member to be formed, a gas discharged from a gas discharge port formed between the first plate-like member and the second plate-like member, and the second plate-like member Droplets generated by mixing the cleaning liquid discharged from the cleaning liquid discharge port formed between the member and the third plate-like member are ejected onto the inclined surface of the slit nozzle, and the third plate A pair of liquid droplet ejection portions in which a space area that is released to the atmosphere on the opposite side of the second plate-like member is formed, and the first and second opposing each of the pair of inclined surfaces of the slit nozzle. Slit nozzle arrangement step to arrange in the direction of,
A first cleaning step of discharging gas from the gas discharge ports in the pair of droplet ejection portions and discharging the cleaning liquid from the cleaning liquid discharge ports in the pair of droplet ejection portions;
A liquid jet is discharged from a gas discharge port in the liquid droplet ejection section facing in the first direction of the pair of liquid droplet ejection sections, and the liquid droplet ejection is directed in the first direction of the pair of liquid droplet ejection sections. The cleaning liquid is discharged from the cleaning liquid discharge port in the section, and the discharge of the gas from the gas discharge port in the liquid droplet ejection section facing the second direction of the pair of liquid droplet ejection sections is stopped, and the pair of liquid droplets A second cleaning step of stopping the discharge of the cleaning liquid from the cleaning liquid discharge port in the liquid droplet jetting part facing the second direction among the jetting parts;
A gas is discharged from a gas discharge port in the liquid droplet ejecting portion facing in the second direction of the pair of liquid droplet ejecting portions, and a liquid droplet ejecting in the second direction of the pair of liquid droplet ejecting portions. The cleaning liquid is discharged from the cleaning liquid discharge port in the section, and the discharge of the gas from the gas discharge port in the liquid droplet ejection section facing the first direction of the pair of liquid droplet ejection sections is stopped, and the pair of liquid droplets A third cleaning step of stopping the discharge of the cleaning liquid from the cleaning liquid discharge port in the liquid droplet jetting part facing the first direction among the jetting parts;
A drying step of discharging gas from the gas discharge ports in the pair of droplet ejection portions and stopping discharge of the cleaning liquid from the cleaning liquid ejection ports in the pair of droplet ejection portions;
A nozzle cleaning method comprising: The nozzle cleaning method according to claim 6,
After the drying step, a second drying step of raising the slit nozzle relative to the pair of droplet ejection portions while gas is being discharged from the gas ejection ports in the pair of droplet ejection portions. A nozzle cleaning method comprising: The nozzle cleaning method according to claim 6,
Between the drying step and the third cleaning step, a gas is discharged from the gas discharge port in the pair of droplet ejection portions, and a cleaning liquid is discharged from the cleaning liquid discharge port in the pair of droplet ejection portions. A nozzle cleaning method comprising a cleaning step.

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