JP2013187385A - 処理室内部品の冷却方法、処理室内部品冷却プログラム、及び記憶媒体 - Google Patents
処理室内部品の冷却方法、処理室内部品冷却プログラム、及び記憶媒体 Download PDFInfo
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Abstract
【解決手段】基板Gにドライエッチング処理を施す基板処理装置10において、互いに分離可能な基部11a及び蓋部11bからなるチャンバ11内に配置されたステージ12を冷却する際、チャンバ11内の圧力を大気圧に調整し、基部11aから蓋部11bを離間させてチャンバ11の側壁部の全周に亘って開放部11dを形成してチャンバ11内及び大気を連通させ、排気系14を用いてチャンバ11内に気流を形成し、ステージ12の温度が60℃以下と判定された場合、排気系14の作動を停止してチャンバ11内の気流を停止させる。
【選択図】図3
Description
L 開口代
L1 開放代
S 処理空間
V3 バルブ
W ウエハ
10,30 基板処理装置
11,31,36,39,42 チャンバ
11a 基部
11b 蓋部
11d 開放部
12 ステージ
14 排気系
16 ヒーター
19 温度センサ
27 DP
32 サセプタ
33,37,40 ゲートバルブ
34,38,41 連通穴
Claims (8)
- 基板に所定の処理を施す基板処理装置の処理室内に配置された処理室内部品の冷却方法であって、
前記処理室内の圧力を大気圧に調整する圧力調整ステップと、
前記処理室の側壁部の少なくとも一部を開放して前記処理室内及び大気を連通させる処理室内開放ステップと、
前記処理室内を排気する排気装置を用いて前記処理室内に前記大気の流れを形成する気流形成ステップと、
前記処理室内部品の温度が所定の温度以下か否かを判定する温度判定ステップと、
前記温度判定ステップにおいて前記処理室内部品の温度が所定の温度以下と判定された場合、前記排気装置の作動を停止して前記大気の流れを停止させる気流停止ステップとを有することを特徴とする処理室内部品の冷却方法。 - 前記処理室内開放ステップでは、前記処理室の側壁部を全周に亘って連続的に開放することを特徴とする請求項1記載の処理室内部品の冷却方法。
- 前記処理室は分割可能に構成された蓋部及び基部からなり、
前記処理室内開放ステップにおいて前記蓋部は前記基部から離間し、
前記蓋部の前記基部からの離間距離は40mm以上且つ100mm以下であることを特徴とする請求項2記載の処理室内部品の冷却方法。 - 前記蓋部の前記基部からの離間は、前記蓋部のみの移動、前記基部のみの移動、又は前記蓋部及び前記基部の移動によって実現されることを特徴とする請求項3記載の処理室内部品の冷却方法。
- 前記処理室内部品は、前記基板を載置し且つ加熱機構を有する高温載置台であることを特徴とする請求項1乃至4のいずれか1項に記載の処理室内部品の冷却方法。
- 基板に所定の処理を施す基板処理装置の処理室内に配置された処理室内部品の冷却方法であって、前記処理室内の圧力を大気圧に調整する圧力調整ステップと、前記処理室の側壁部の少なくとも一部を開放して前記処理室内及び大気を連通させる処理室内開放ステップと、前記処理室内を排気する排気装置を用いて前記処理室内に前記大気の流れを形成する気流形成ステップと、前記処理室内部品の温度が所定の温度以下か否かを判定する温度判定ステップと、前記温度判定ステップにおいて前記処理室内部品の温度が所定の温度以下と判定された場合、前記排気装置の作動を停止して前記大気の流れを停止させる気流停止ステップとを有する処理室内部品の冷却方法をコンピュータに実行させる処理室内部品冷却プログラムであって、
前記処理室内開放ステップを実行する処理室内開放モジュールと、
前記気流形成ステップを実行する気流形成モジュールと、
前記温度判定ステップを実行する温度判定モジュールと、
前記気流停止ステップを実行する気流停止モジュールとを少なくとも有することを特徴とする処理室内部品冷却プログラム。 - 前記気流形成モジュールは、前記処理室内開放モジュールが前記処理室内開放ステップを実行している間、又は実行した後に、前記処理室内開放モジュールから呼び出されて前記気流形成ステップを実行することを特徴とする請求項6記載の処理室内部品冷却プログラム。
- 請求項6又は7に記載の処理室内部品冷却プログラムを格納することを特徴とするコンピュータ読み取り可能な記憶媒体。
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JP2012051730A JP5965680B2 (ja) | 2012-03-08 | 2012-03-08 | 処理室内部品の冷却方法、処理室内部品冷却プログラム、及び記憶媒体 |
TW102106743A TWI619162B (zh) | 2012-03-08 | 2013-02-26 | 處理室內零件的冷卻方法、處理室內零件冷卻程式及記憶媒體 |
CN201310070714.5A CN103311152B (zh) | 2012-03-08 | 2013-03-06 | 处理室内零件的冷却方法 |
KR1020130023847A KR101738204B1 (ko) | 2012-03-08 | 2013-03-06 | 처리실내 부품의 냉각 방법, 처리실내 부품 냉각 프로그램을 저장한 컴퓨터 판독 가능한 기억 매체 |
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- 2013-02-26 TW TW102106743A patent/TWI619162B/zh active
- 2013-03-06 CN CN201310070714.5A patent/CN103311152B/zh active Active
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Publication number | Publication date |
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CN103311152A (zh) | 2013-09-18 |
KR20130103390A (ko) | 2013-09-23 |
KR101738204B1 (ko) | 2017-05-19 |
TW201401365A (zh) | 2014-01-01 |
TWI619162B (zh) | 2018-03-21 |
JP5965680B2 (ja) | 2016-08-10 |
CN103311152B (zh) | 2018-05-29 |
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