JP6896565B2 - インナーウォール及び基板処理装置 - Google Patents
インナーウォール及び基板処理装置 Download PDFInfo
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- JP6896565B2 JP6896565B2 JP2017162755A JP2017162755A JP6896565B2 JP 6896565 B2 JP6896565 B2 JP 6896565B2 JP 2017162755 A JP2017162755 A JP 2017162755A JP 2017162755 A JP2017162755 A JP 2017162755A JP 6896565 B2 JP6896565 B2 JP 6896565B2
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- 239000000758 substrate Substances 0.000 title claims description 39
- 238000005192 partition Methods 0.000 claims description 50
- 230000003028 elevating effect Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 9
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 239000007789 gas Substances 0.000 description 104
- 235000012431 wafers Nutrition 0.000 description 72
- 238000004088 simulation Methods 0.000 description 7
- 238000007789 sealing Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 230000000717 retained effect Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Paper (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
10 処理容器
11 載置台
12 給気部
13 隔壁
14 昇降機構
15 インナーウォール
16 排気部
70 本体部
71 突出部
72 スリット
73 突起部
74 溝
81 排気管
100 制御装置
W ウェハ
S 処理空間
V 排気空間
Claims (6)
- 基板が載置される載置台の外周と間隔をあけて当該載置台を囲う円筒形状のインナーウォールであって、
下端にスリットが複数形成され、
内側面において上端から下端に延伸し、前記スリットに連通する溝が複数形成されていることを特徴とする、インナーウォール。 - 前記スリット及び前記溝はそれぞれ周方向に7箇所以上に形成されていることを特徴とする、請求項1に記載のインナーウォール。
- 基板を処理する基板処理装置であって、
基板を収容する処理容器と、
前記処理容器内で基板を載置する載置台と、
前記載置台の上方から当該載置台に向けて処理ガスを供給する給気部と、
前記処理容器内を排気する排気部と、
前記処理容器内に配置され、前記載置台の外周と間隔をあけて当該載置台を囲う隔壁と、
前記隔壁を退避位置と基板処理位置との間で昇降させる昇降機構と、
前記処理容器の底面に配置され、前記載置台の外周と間隔をあけて当該載置台を囲う円筒形状のインナーウォールと、を有し、
前記インナーウォールの下端には、スリットが複数形成され、
前記インナーウォールの内側面には、上端から下端に延伸し、前記スリットに連通する溝が複数形成され、
前記隔壁を前記基板処理位置に移動させることで、前記隔壁と前記インナーウォールにより基板の処理空間が形成され、
前記処理空間内の排気は、前記溝及び前記スリットを介して前記排気部から行われることを特徴とする、基板処理装置。 - 前記インナーウォールにおいて、前記スリット及び前記溝はそれぞれ周方向に7箇所以上に形成されていることを特徴とする、請求項3に記載の基板処理装置。
- 前記排気部は、前記処理容器の底面に設けられた排気管を有し、
前記排気管は平面視において、インナーウォールの外方に配置されていることを特徴とする、請求項3又は4に記載の基板処理装置。 - 前記スリットは平面視において、前記インナーウォールの中心と前記排気管の中心とを結ぶ直線上からずれて配置されていることを特徴とする、請求項5に記載の基板処理装置。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017162755A JP6896565B2 (ja) | 2017-08-25 | 2017-08-25 | インナーウォール及び基板処理装置 |
KR1020207007745A KR102476943B1 (ko) | 2017-08-25 | 2018-08-13 | 이너 월 및 기판 처리 장치 |
US16/641,456 US20200203194A1 (en) | 2017-08-25 | 2018-08-13 | Inner Wall and substrate Processing Apparatus |
PCT/JP2018/030184 WO2019039337A1 (ja) | 2017-08-25 | 2018-08-13 | インナーウォール及び基板処理装置 |
TW107128118A TWI805603B (zh) | 2017-08-25 | 2018-08-13 | 內壁及基板處理裝置 |
KR1020227043027A KR102554732B1 (ko) | 2017-08-25 | 2018-08-13 | 이너 월 및 기판 처리 장치 |
CN201880053690.3A CN111033695A (zh) | 2017-08-25 | 2018-08-13 | 内壁和基板处理装置 |
SG11202001593QA SG11202001593QA (en) | 2017-08-25 | 2018-08-13 | Inner wall and substrate processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017162755A JP6896565B2 (ja) | 2017-08-25 | 2017-08-25 | インナーウォール及び基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019041026A JP2019041026A (ja) | 2019-03-14 |
JP6896565B2 true JP6896565B2 (ja) | 2021-06-30 |
Family
ID=65439398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017162755A Active JP6896565B2 (ja) | 2017-08-25 | 2017-08-25 | インナーウォール及び基板処理装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20200203194A1 (ja) |
JP (1) | JP6896565B2 (ja) |
KR (2) | KR102554732B1 (ja) |
CN (1) | CN111033695A (ja) |
SG (1) | SG11202001593QA (ja) |
TW (1) | TWI805603B (ja) |
WO (1) | WO2019039337A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR102498913B1 (ko) * | 2021-06-29 | 2023-02-13 | 주식회사 디엠에스 | 기판 건조장치 |
KR20230040072A (ko) * | 2021-09-15 | 2023-03-22 | 주식회사 원익아이피에스 | 기판처리장치 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3200197B2 (ja) * | 1992-09-24 | 2001-08-20 | コマツ電子金属株式会社 | 気相成長装置及びその排気管 |
TW295677B (ja) * | 1994-08-19 | 1997-01-11 | Tokyo Electron Co Ltd | |
JPH08162439A (ja) * | 1994-12-02 | 1996-06-21 | Dainippon Screen Mfg Co Ltd | プラズマアッシング装置 |
US20060037702A1 (en) * | 2004-08-20 | 2006-02-23 | Tokyo Electron Limited | Plasma processing apparatus |
JP4854317B2 (ja) * | 2006-01-31 | 2012-01-18 | 東京エレクトロン株式会社 | 基板処理方法 |
JP4933789B2 (ja) | 2006-02-13 | 2012-05-16 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
JP5350043B2 (ja) * | 2009-03-31 | 2013-11-27 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
JP5567392B2 (ja) * | 2010-05-25 | 2014-08-06 | 東京エレクトロン株式会社 | プラズマ処理装置 |
WO2015023435A1 (en) * | 2013-08-12 | 2015-02-19 | Applied Materials, Inc. | Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors |
JP6305825B2 (ja) | 2014-05-12 | 2018-04-04 | 東京エレクトロン株式会社 | プラズマ処理装置およびそれに用いる排気構造 |
JP6541374B2 (ja) * | 2014-07-24 | 2019-07-10 | 東京エレクトロン株式会社 | 基板処理装置 |
US10096495B2 (en) | 2014-12-26 | 2018-10-09 | Tokyo Electron Limited | Substrate processing apparatus |
JP6574656B2 (ja) * | 2014-12-26 | 2019-09-11 | 東京エレクトロン株式会社 | 基板処理装置 |
-
2017
- 2017-08-25 JP JP2017162755A patent/JP6896565B2/ja active Active
-
2018
- 2018-08-13 TW TW107128118A patent/TWI805603B/zh active
- 2018-08-13 KR KR1020227043027A patent/KR102554732B1/ko active IP Right Grant
- 2018-08-13 WO PCT/JP2018/030184 patent/WO2019039337A1/ja active Application Filing
- 2018-08-13 KR KR1020207007745A patent/KR102476943B1/ko active Application Filing
- 2018-08-13 SG SG11202001593QA patent/SG11202001593QA/en unknown
- 2018-08-13 CN CN201880053690.3A patent/CN111033695A/zh active Pending
- 2018-08-13 US US16/641,456 patent/US20200203194A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US20200203194A1 (en) | 2020-06-25 |
KR20230004888A (ko) | 2023-01-06 |
KR102554732B1 (ko) | 2023-07-13 |
KR20200038524A (ko) | 2020-04-13 |
WO2019039337A1 (ja) | 2019-02-28 |
TWI805603B (zh) | 2023-06-21 |
KR102476943B1 (ko) | 2022-12-14 |
TW201921479A (zh) | 2019-06-01 |
JP2019041026A (ja) | 2019-03-14 |
CN111033695A (zh) | 2020-04-17 |
SG11202001593QA (en) | 2020-03-30 |
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