JP2013178961A5 - - Google Patents

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Publication number
JP2013178961A5
JP2013178961A5 JP2012042386A JP2012042386A JP2013178961A5 JP 2013178961 A5 JP2013178961 A5 JP 2013178961A5 JP 2012042386 A JP2012042386 A JP 2012042386A JP 2012042386 A JP2012042386 A JP 2012042386A JP 2013178961 A5 JP2013178961 A5 JP 2013178961A5
Authority
JP
Japan
Prior art keywords
particle beam
charged particle
detector
detection surface
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012042386A
Other languages
English (en)
Japanese (ja)
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JP2013178961A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012042386A priority Critical patent/JP2013178961A/ja
Priority claimed from JP2012042386A external-priority patent/JP2013178961A/ja
Priority to US13/772,419 priority patent/US8847180B2/en
Publication of JP2013178961A publication Critical patent/JP2013178961A/ja
Publication of JP2013178961A5 publication Critical patent/JP2013178961A5/ja
Pending legal-status Critical Current

Links

JP2012042386A 2012-02-28 2012-02-28 荷電粒子線装置及び物品製造方法 Pending JP2013178961A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012042386A JP2013178961A (ja) 2012-02-28 2012-02-28 荷電粒子線装置及び物品製造方法
US13/772,419 US8847180B2 (en) 2012-02-28 2013-02-21 Charged particle beam apparatus, drawing apparatus, and method of manufacturing article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012042386A JP2013178961A (ja) 2012-02-28 2012-02-28 荷電粒子線装置及び物品製造方法

Publications (2)

Publication Number Publication Date
JP2013178961A JP2013178961A (ja) 2013-09-09
JP2013178961A5 true JP2013178961A5 (enExample) 2015-04-09

Family

ID=49003240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012042386A Pending JP2013178961A (ja) 2012-02-28 2012-02-28 荷電粒子線装置及び物品製造方法

Country Status (2)

Country Link
US (1) US8847180B2 (enExample)
JP (1) JP2013178961A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014216631A (ja) * 2013-04-30 2014-11-17 キヤノン株式会社 描画装置、及び物品の製造方法
WO2019053173A1 (en) * 2017-09-18 2019-03-21 Asml Netherlands B.V. USER PROGRAMMABLE DETECTOR NETWORK

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2957516B2 (ja) * 1997-04-14 1999-10-04 山形日本電気株式会社 イオンビーム電流検出機構
WO2002045153A1 (fr) * 2000-12-01 2002-06-06 Ebara Corporation Procede et appareil d'inspection utilisant un faisceau d'electrons, et procede de production de dispositif utilisant celui-ci
JP2004055933A (ja) * 2002-07-22 2004-02-19 Advantest Corp 電子ビーム露光装置、及び電子ビーム計測モジュール
JP4048925B2 (ja) * 2002-11-18 2008-02-20 株式会社日立製作所 電子顕微鏡
JP4184782B2 (ja) * 2002-12-20 2008-11-19 株式会社日立製作所 マルチ電子ビーム装置およびそれに用いられるマルチ電子ビーム電流の計測・表示方法
JP4738723B2 (ja) * 2003-08-06 2011-08-03 キヤノン株式会社 マルチ荷電粒子線描画装置、荷電粒子線の電流の測定方法及びデバイス製造方法

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