JP2013053046A - 封着材料層付きガラス基板 - Google Patents
封着材料層付きガラス基板 Download PDFInfo
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- JP2013053046A JP2013053046A JP2011192512A JP2011192512A JP2013053046A JP 2013053046 A JP2013053046 A JP 2013053046A JP 2011192512 A JP2011192512 A JP 2011192512A JP 2011192512 A JP2011192512 A JP 2011192512A JP 2013053046 A JP2013053046 A JP 2013053046A
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- 239000011521 glass Substances 0.000 title claims abstract description 178
- 239000003566 sealing material Substances 0.000 title claims abstract description 150
- 239000000758 substrate Substances 0.000 title claims abstract description 76
- 238000007789 sealing Methods 0.000 claims abstract description 71
- 239000000843 powder Substances 0.000 claims abstract description 60
- 238000010438 heat treatment Methods 0.000 claims abstract description 26
- 238000005245 sintering Methods 0.000 claims abstract description 7
- 239000000049 pigment Substances 0.000 claims description 29
- 239000000945 filler Substances 0.000 claims description 16
- 239000012298 atmosphere Substances 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 229910020599 Co 3 O 4 Inorganic materials 0.000 claims description 3
- 230000007774 longterm Effects 0.000 abstract description 7
- 238000007599 discharging Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 62
- 239000002245 particle Substances 0.000 description 36
- 239000007789 gas Substances 0.000 description 24
- 229920005989 resin Polymers 0.000 description 14
- 239000011347 resin Substances 0.000 description 14
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 239000010408 film Substances 0.000 description 11
- 238000005259 measurement Methods 0.000 description 10
- 239000002904 solvent Substances 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000012299 nitrogen atmosphere Substances 0.000 description 8
- 239000011247 coating layer Substances 0.000 description 7
- 238000004455 differential thermal analysis Methods 0.000 description 7
- 238000010304 firing Methods 0.000 description 7
- 238000002844 melting Methods 0.000 description 7
- 230000008018 melting Effects 0.000 description 7
- -1 polyethylene carbonate Polymers 0.000 description 7
- ZUAURMBNZUCEAF-UHFFFAOYSA-N 2-(2-phenoxyethoxy)ethanol Chemical compound OCCOCCOC1=CC=CC=C1 ZUAURMBNZUCEAF-UHFFFAOYSA-N 0.000 description 6
- QCDWFXQBSFUVSP-UHFFFAOYSA-N 2-phenoxyethanol Chemical compound OCCOC1=CC=CC=C1 QCDWFXQBSFUVSP-UHFFFAOYSA-N 0.000 description 6
- CUZKCNWZBXLAJX-UHFFFAOYSA-N 2-phenylmethoxyethanol Chemical compound OCCOCC1=CC=CC=C1 CUZKCNWZBXLAJX-UHFFFAOYSA-N 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 239000011164 primary particle Substances 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 5
- 229910000166 zirconium phosphate Inorganic materials 0.000 description 5
- LEHFSLREWWMLPU-UHFFFAOYSA-B zirconium(4+);tetraphosphate Chemical compound [Zr+4].[Zr+4].[Zr+4].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O LEHFSLREWWMLPU-UHFFFAOYSA-B 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 4
- 229910018068 Li 2 O Inorganic materials 0.000 description 4
- 239000011324 bead Substances 0.000 description 4
- 230000006378 damage Effects 0.000 description 4
- 230000009477 glass transition Effects 0.000 description 4
- 238000007561 laser diffraction method Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 4
- 229910001887 tin oxide Inorganic materials 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 241000519995 Stachys sylvatica Species 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 230000001186 cumulative effect Effects 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007496 glass forming Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910000314 transition metal oxide Inorganic materials 0.000 description 3
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- CNLWCVNCHLKFHK-UHFFFAOYSA-N aluminum;lithium;dioxido(oxo)silane Chemical compound [Li+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O CNLWCVNCHLKFHK-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229930188620 butyrolactone Natural products 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229910052878 cordierite Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
- IEJIGPNLZYLLBP-UHFFFAOYSA-N dimethyl carbonate Chemical compound COC(=O)OC IEJIGPNLZYLLBP-UHFFFAOYSA-N 0.000 description 1
- OJLGWNFZMTVNCX-UHFFFAOYSA-N dioxido(dioxo)tungsten;zirconium(4+) Chemical compound [Zr+4].[O-][W]([O-])(=O)=O.[O-][W]([O-])(=O)=O OJLGWNFZMTVNCX-UHFFFAOYSA-N 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229910000174 eucryptite Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000001023 inorganic pigment Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000003273 ketjen black Substances 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000006072 paste Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920000379 polypropylene carbonate Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
- 229910000500 β-quartz Inorganic materials 0.000 description 1
- 229910052644 β-spodumene Inorganic materials 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
- Joining Of Glass To Other Materials (AREA)
- Glass Compositions (AREA)
Abstract
【解決手段】本発明の封着材料層付きガラス基板は、封着材料を焼結させた封着材料層を備える封着材料層付きガラス基板において、真空熱処理されてなると共に、レーザ封着に用いることを特徴とする。また、本発明の封着材料は、ガラス粉末を含む封着材料において、真空熱処理されてなると共に、レーザ封着に用いることを特徴とする。
【選択図】図1
Description
A:Li、Na、K、Mg、Ca、Sr、Ba、Zn、Cu、Ni、Mn等
B:Zr、Ti、Sn、Nb、Al、Sc、Y等
M:P、Si、W、Mo等
若しくはこれらの固溶体が使用可能である。
Claims (11)
- 封着材料を焼結させた封着材料層を備える封着材料層付きガラス基板において、
真空熱処理されてなると共に、レーザ封着に用いることを特徴とする封着材料層付きガラス基板。 - 封着材料が真空熱処理されてなることを特徴とする請求項1に記載の封着材料層付きガラス基板。
- 封着材料層が真空熱処理されてなることを特徴とする請求項1又は2に記載の封着材料層付きガラス基板。
- 真空熱処理の温度が、(封着材料の軟化点+50℃)以下であることを特徴とする請求項1〜3の何れか一項に記載の封着材料層付きガラス基板。
- 封着材料が、ガラス粉末を含む無機粉末 99〜99.95質量%と、顔料 0.05〜1質量%とを含有することを特徴とする請求項1〜4の何れか一項に記載の封着材料層付きガラス基板。
- ガラス粉末が、ガラス組成として、下記酸化物換算のモル%で、SnO 35〜70%、P2O5 10〜30%を含有することを特徴とする請求項1〜5の何れか一項に記載の封着材料層付きガラス基板。
- 顔料が、C(カーボン)、Co3O4、CuO、Cr2O3、Fe2O3、MnO2、SnO、TinO2n−1(nは整数)から選ばれる一種又は二種以上であることを特徴とする請求項1〜6の何れか一項に記載の封着材料層付きガラス基板。
- 無機粉末が、更に耐火性フィラーを0.1〜60体積%を含むことを特徴とする請求項1〜7の何れか一項に記載の封着材料層付きガラス基板。
- 不活性雰囲気のレーザ封着に用いることを特徴とする請求項1〜8の何れか一項に記載の封着材料層付きガラス基板。
- 有機ELデバイスの封着に用いることを特徴とする請求項1〜9の何れか一項に記載の封着材料層付きガラス基板。
- ガラス粉末を含む封着材料において、
真空熱処理されてなると共に、レーザ封着に用いることを特徴とする封着材料。
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JP2011192512A JP5874250B2 (ja) | 2011-09-05 | 2011-09-05 | レーザ封着用封着材料層付きガラス基板の製造方法 |
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JP2011192512A JP5874250B2 (ja) | 2011-09-05 | 2011-09-05 | レーザ封着用封着材料層付きガラス基板の製造方法 |
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JP2013053046A true JP2013053046A (ja) | 2013-03-21 |
JP5874250B2 JP5874250B2 (ja) | 2016-03-02 |
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JP2000215794A (ja) * | 1999-01-22 | 2000-08-04 | Canon Inc | 画像表示装置の製造方法 |
JP2001163637A (ja) * | 1999-12-08 | 2001-06-19 | Noritake Co Ltd | ガラス膜の焼成方法および連続焼成装置 |
JP2008037740A (ja) * | 2006-07-11 | 2008-02-21 | Nippon Electric Glass Co Ltd | 封着用ガラス組成物および封着材料 |
JP2008115057A (ja) * | 2006-11-07 | 2008-05-22 | Electric Power Dev Co Ltd | 封止材料、ガラスパネルの製造方法および色素増感太陽電池 |
JP2008166197A (ja) * | 2006-12-28 | 2008-07-17 | Univ Of Tokyo | パネル体の製造方法 |
JP2008218393A (ja) * | 2007-02-28 | 2008-09-18 | Corning Inc | 発光ディスプレイ装置のためのシールおよび方法 |
JP2009001433A (ja) * | 2007-06-19 | 2009-01-08 | Nippon Electric Glass Co Ltd | 封着材料 |
JP2011505667A (ja) * | 2007-11-30 | 2011-02-24 | コーニング インコーポレイテッド | 電子部品をパッケージする方法および装置 |
WO2011122218A1 (ja) * | 2010-03-29 | 2011-10-06 | 日本電気硝子株式会社 | 封着材料及びこれを用いたペースト材料 |
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2011
- 2011-09-05 JP JP2011192512A patent/JP5874250B2/ja not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000215794A (ja) * | 1999-01-22 | 2000-08-04 | Canon Inc | 画像表示装置の製造方法 |
JP2001163637A (ja) * | 1999-12-08 | 2001-06-19 | Noritake Co Ltd | ガラス膜の焼成方法および連続焼成装置 |
JP2008037740A (ja) * | 2006-07-11 | 2008-02-21 | Nippon Electric Glass Co Ltd | 封着用ガラス組成物および封着材料 |
JP2008115057A (ja) * | 2006-11-07 | 2008-05-22 | Electric Power Dev Co Ltd | 封止材料、ガラスパネルの製造方法および色素増感太陽電池 |
JP2008166197A (ja) * | 2006-12-28 | 2008-07-17 | Univ Of Tokyo | パネル体の製造方法 |
JP2008218393A (ja) * | 2007-02-28 | 2008-09-18 | Corning Inc | 発光ディスプレイ装置のためのシールおよび方法 |
JP2009001433A (ja) * | 2007-06-19 | 2009-01-08 | Nippon Electric Glass Co Ltd | 封着材料 |
JP2011505667A (ja) * | 2007-11-30 | 2011-02-24 | コーニング インコーポレイテッド | 電子部品をパッケージする方法および装置 |
WO2011122218A1 (ja) * | 2010-03-29 | 2011-10-06 | 日本電気硝子株式会社 | 封着材料及びこれを用いたペースト材料 |
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