JP2013045835A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2013045835A5 JP2013045835A5 JP2011181492A JP2011181492A JP2013045835A5 JP 2013045835 A5 JP2013045835 A5 JP 2013045835A5 JP 2011181492 A JP2011181492 A JP 2011181492A JP 2011181492 A JP2011181492 A JP 2011181492A JP 2013045835 A5 JP2013045835 A5 JP 2013045835A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- thin film
- electrode
- drain electrode
- film transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 31
- 239000010408 film Substances 0.000 claims 27
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 22
- 229910052760 oxygen Inorganic materials 0.000 claims 22
- 239000001301 oxygen Substances 0.000 claims 22
- 239000010409 thin film Substances 0.000 claims 20
- 229910052738 indium Inorganic materials 0.000 claims 12
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims 12
- 239000000758 substrate Substances 0.000 claims 11
- 229910052733 gallium Inorganic materials 0.000 claims 10
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 10
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 8
- 229910052718 tin Inorganic materials 0.000 claims 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 6
- 229910020923 Sn-O Inorganic materials 0.000 claims 4
- 229910007541 Zn O Inorganic materials 0.000 claims 4
- 229910052782 aluminium Inorganic materials 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 229910044991 metal oxide Inorganic materials 0.000 claims 4
- 150000004706 metal oxides Chemical class 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052725 zinc Inorganic materials 0.000 claims 2
- 239000011701 zinc Substances 0.000 claims 2
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011181492A JP5819138B2 (ja) | 2011-08-23 | 2011-08-23 | 半導体装置 |
PCT/JP2012/068167 WO2013027512A1 (ja) | 2011-08-23 | 2012-07-18 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011181492A JP5819138B2 (ja) | 2011-08-23 | 2011-08-23 | 半導体装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013045835A JP2013045835A (ja) | 2013-03-04 |
JP2013045835A5 true JP2013045835A5 (enrdf_load_stackoverflow) | 2014-04-03 |
JP5819138B2 JP5819138B2 (ja) | 2015-11-18 |
Family
ID=47746263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011181492A Expired - Fee Related JP5819138B2 (ja) | 2011-08-23 | 2011-08-23 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5819138B2 (enrdf_load_stackoverflow) |
WO (1) | WO2013027512A1 (enrdf_load_stackoverflow) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103943632B (zh) * | 2013-12-31 | 2017-03-08 | 上海天马微电子有限公司 | 一种阵列基板及其制备方法、液晶显示器 |
WO2019087937A1 (ja) * | 2017-11-02 | 2019-05-09 | 東レ株式会社 | 集積回路およびその製造方法ならびにそれを用いた無線通信装置 |
KR102727524B1 (ko) * | 2018-12-04 | 2024-11-08 | 엘지디스플레이 주식회사 | 트랜지스터, 패널 및 트랜지스터 제조방법 |
KR102567380B1 (ko) * | 2018-11-30 | 2023-08-16 | 엘지디스플레이 주식회사 | 트랜지스터, 패널 및 트랜지스터의 제조방법 |
CN110717692B (zh) * | 2019-10-23 | 2021-12-03 | 上海浦源科技有限公司 | 一种社会工业发展不均衡的饱和电力计算方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63301565A (ja) * | 1987-05-30 | 1988-12-08 | Matsushita Electric Ind Co Ltd | 薄膜集積回路 |
JPH0494165A (ja) * | 1990-08-09 | 1992-03-26 | Fujitsu Ltd | 半導体集積回路装置およびその製造方法 |
EP2515337B1 (en) * | 2008-12-24 | 2016-02-24 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit and semiconductor device |
KR101840622B1 (ko) * | 2009-12-21 | 2018-05-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 박막 트랜지스터와 그 제작 방법 |
-
2011
- 2011-08-23 JP JP2011181492A patent/JP5819138B2/ja not_active Expired - Fee Related
-
2012
- 2012-07-18 WO PCT/JP2012/068167 patent/WO2013027512A1/ja active Application Filing