JP2013018065A5 - - Google Patents
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- JP2013018065A5 JP2013018065A5 JP2011152022A JP2011152022A JP2013018065A5 JP 2013018065 A5 JP2013018065 A5 JP 2013018065A5 JP 2011152022 A JP2011152022 A JP 2011152022A JP 2011152022 A JP2011152022 A JP 2011152022A JP 2013018065 A5 JP2013018065 A5 JP 2013018065A5
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- JP
- Japan
- Prior art keywords
- carrier
- static pressure
- fixing
- pin
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011152022A JP5627114B2 (ja) | 2011-07-08 | 2011-07-08 | 薄板状ワークの研削方法及び両頭平面研削盤 |
SG2012046975A SG187316A1 (en) | 2011-07-08 | 2012-06-22 | Method for grinding thin sheet-like workpiece and double-end surface grinder |
KR1020120069087A KR101911553B1 (ko) | 2011-07-08 | 2012-06-27 | 박판형 워크의 연삭 방법 및 양두 평면 연삭기 |
EP12175279.4A EP2543475B1 (en) | 2011-07-08 | 2012-07-06 | Method for grinding thin sheet-like workpiece and double-end surface grinder |
TW101124333A TWI604918B (zh) | 2011-07-08 | 2012-07-06 | 薄板狀工件之研磨方法及雙面平面磨床 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011152022A JP5627114B2 (ja) | 2011-07-08 | 2011-07-08 | 薄板状ワークの研削方法及び両頭平面研削盤 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013018065A JP2013018065A (ja) | 2013-01-31 |
JP2013018065A5 true JP2013018065A5 (zh) | 2013-09-26 |
JP5627114B2 JP5627114B2 (ja) | 2014-11-19 |
Family
ID=46507898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011152022A Active JP5627114B2 (ja) | 2011-07-08 | 2011-07-08 | 薄板状ワークの研削方法及び両頭平面研削盤 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP2543475B1 (zh) |
JP (1) | JP5627114B2 (zh) |
KR (1) | KR101911553B1 (zh) |
SG (1) | SG187316A1 (zh) |
TW (1) | TWI604918B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5724958B2 (ja) * | 2012-07-03 | 2015-05-27 | 信越半導体株式会社 | 両頭研削装置及びワークの両頭研削方法 |
CN104259984A (zh) * | 2014-09-18 | 2015-01-07 | 洛阳巨优机床有限公司 | 一种往复式双端面磨床往复送料板一浮一定式装置 |
CN104369058A (zh) * | 2014-11-27 | 2015-02-25 | 石家庄轴设机电设备有限公司 | 滚子双端面磨床支撑及其使用方法 |
CN115741453B (zh) * | 2022-11-30 | 2024-02-27 | 大连理工大学 | 一种多传感器融合的智能双面研磨机 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3431681A (en) * | 1965-07-23 | 1969-03-11 | Landis Tool Co | Work support shoe assembly |
JP3673904B2 (ja) | 1996-12-03 | 2005-07-20 | 光洋機械工業株式会社 | 薄板円板状ワークの両面研削装置 |
JP3702379B2 (ja) | 1996-12-13 | 2005-10-05 | 光洋機械工業株式会社 | 薄板円板状ワークの両面研削装置 |
JP2002036078A (ja) * | 2001-06-25 | 2002-02-05 | Koyo Mach Ind Co Ltd | 薄板円板状ワークの両面研削装置 |
JP3993856B2 (ja) * | 2004-01-22 | 2007-10-17 | 光洋機械工業株式会社 | 両頭平面研削装置 |
JP4143563B2 (ja) * | 2004-03-16 | 2008-09-03 | 住友重機械工業株式会社 | ワーク保持装置及び両面加工装置 |
JP4780142B2 (ja) * | 2008-05-22 | 2011-09-28 | 信越半導体株式会社 | ウェーハの製造方法 |
JP2010042488A (ja) * | 2008-08-15 | 2010-02-25 | Mori Seiki Co Ltd | ワーク受け及びこれを備えた研削盤 |
-
2011
- 2011-07-08 JP JP2011152022A patent/JP5627114B2/ja active Active
-
2012
- 2012-06-22 SG SG2012046975A patent/SG187316A1/en unknown
- 2012-06-27 KR KR1020120069087A patent/KR101911553B1/ko active IP Right Grant
- 2012-07-06 TW TW101124333A patent/TWI604918B/zh active
- 2012-07-06 EP EP12175279.4A patent/EP2543475B1/en active Active
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