JP2013016769A - パワーモジュールパッケージ及びその製造方法 - Google Patents
パワーモジュールパッケージ及びその製造方法 Download PDFInfo
- Publication number
- JP2013016769A JP2013016769A JP2011206316A JP2011206316A JP2013016769A JP 2013016769 A JP2013016769 A JP 2013016769A JP 2011206316 A JP2011206316 A JP 2011206316A JP 2011206316 A JP2011206316 A JP 2011206316A JP 2013016769 A JP2013016769 A JP 2013016769A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- power module
- module package
- lead frame
- semiconductor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49575—Assemblies of semiconductor devices on lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
- H01L23/4334—Auxiliary members in encapsulations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49517—Additional leads
- H01L23/49531—Additional leads the additional leads being a wiring board
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49541—Geometry of the lead-frame
- H01L23/49548—Cross section geometry
- H01L23/49551—Cross section geometry characterised by bent parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/071—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next and on each other, i.e. mixed assemblies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29186—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2224/29187—Ceramics, e.g. crystalline carbides, nitrides or oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29186—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2224/29188—Glasses, e.g. amorphous oxides, nitrides or fluorides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45139—Silver (Ag) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1301—Thyristor
- H01L2924/13034—Silicon Controlled Rectifier [SCR]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
Abstract
【解決手段】本発明の一実施例によるパワーモジュールパッケージは、第1の基板110と、一面の一側または両側に前記第1の基板110との連結のためのパッド121aが形成され、他面には外部との連結のための外部接続端子123が形成された第2の基板120と、一端は前記第1の基板110上に接合され、他端は前記第2の基板120のパッド121aと接合されて、前記第1の基板110と第2の基板120とを垂直に連結するリードフレーム140と、を含む。
【選択図】図1
Description
<第1実施例>
図2は本発明の第2実施例によるパワーモジュールパッケージの構造を示す断面図である。
<第1実施例>
110 第1の基板
120 第2の基板
121a 接続パッド
121b 回路パターン
121c ビア
123 外部接続端子
130a 第1の半導体チップ
130b 第2の半導体チップ
135a、135b ワイヤ
140 リードフレーム
150 封止樹脂
Claims (20)
- 第1の基板と、
一面の一側または両側に前記第1の基板との連結のためのパッドが形成され、他面には外部との連結のための外部接続端子が形成された第2の基板と、
一端は前記第1の基板上に接合され、他端は前記第2の基板のパッドと接合されて、前記第1の基板と第2の基板とを垂直に連結するリードフレームと、
を含むパワーモジュールパッケージ。 - 前記リードフレームの他端が、前記第2の基板の一面の一側に形成されたパッドと接合される請求項1に記載のパワーモジュールパッケージ。
- 前記リードフレームの他端が、前記第2の基板の一面の両側に形成されたパッドと接合される請求項1に記載のパワーモジュールパッケージ。
- 前記第2の基板は、前記外部接続端子と電気的に連結されるように形成されたビアをさらに含む請求項1に記載のパワーモジュールパッケージ。
- 前記第2の基板のパッドと接合されるリードフレームの他端はダウンセット(down−set)形態である請求項1に記載のパワーモジュールパッケージ。
- 前記リードフレームの他端と前記第2の基板のパッドとは半田付けによって接合される請求項1に記載のパワーモジュールパッケージ。
- 前記第1の基板上に接合されたリードフレーム上に実装される第1の半導体チップと、前記第2の基板上に実装される第2の半導体チップと、をさらに含む請求項1に記載のパワーモジュールパッケージ。
- 前記第1の半導体チップは電力素子であり、前記第2の半導体チップは前記電力素子の駆動を制御するための制御素子である請求項7に記載のパワーモジュールパッケージ。
- 前記第1の基板は陽極酸化層を有する金属基板である請求項1に記載のパワーモジュールパッケージ。
- 前記第2の基板は印刷回路基板(Printed Circuit Board:PCB)である請求項1に記載のパワーモジュールパッケージ。
- 前記第1の基板の側面から前記第2の基板の側面まで包むように形成された封止樹脂をさらに含み、前記第1の基板及び第2の基板は前記リードフレームによって連結される請求項1に記載のパワーモジュールパッケージ。
- リードフレームの一端が接合された第1の基板を準備する段階と、
一面の一側または両側には前記第1の基板との連結のためのパッドが形成され、他面には外部との連結のための外部接続端子が形成された第2の基板を準備する段階と、
前記リードフレームの他端と前記第2の基板のパッドとを接合し、前記第1の基板と第2の基板とを垂直に連結する段階と、
を含むパワーモジュールパッケージの製造方法。 - 前記第1の基板と第2の基板とを垂直に連結する段階は、
前記リードフレームの他端と前記第2の基板の一側に形成されたパッドとを接合して行われる請求項12に記載にパワーモジュールパッケージの製造方法。 - 前記第1の基板と第2の基板とを垂直に連結する段階は、
前記リードフレームの他端と前記第2の基板の両側に形成されたパッドとを接合して行われる請求項12に記載のパワーモジュールパッケージの製造方法。 - 前記第2の基板を準備する段階は、
前記第2の基板に前記外部接続端子と電気的に連結されるビアを形成する段階をさらに含む請求項12に記載のパワーモジュールパッケージの製造方法。 - 前記第1の基板を準備する段階の後に、
前記第1の基板に接合されたリードフレーム上に第1の半導体チップを実装する段階をさらに含む請求項12に記載のパワーモジュールパッケージの製造方法。 - 前記第2の基板を準備する段階の後に、
前記第2の基板の上部に第2の半導体チップを実装する段階をさらに含む請求項12に記載のパワーモジュールパッケージの製造方法。 - 前記第1の基板と第2の基板とを垂直に連結する段階の後に、
前記第1の基板の側面から前記第2の基板の側面まで包む封止樹脂を形成する段階をさらに含む請求項12に記載のパワーモジュールパッケージの製造方法。 - 前記第1の基板は陽極酸化層を有する金属基板である請求項12に記載のパワーモジュールパッケージの製造方法。
- 前記第2の基板は印刷回路基板(Printed Circuit Board:PCB)である請求項12に記載のパワーモジュールパッケージの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020110066046A KR101321277B1 (ko) | 2011-07-04 | 2011-07-04 | 전력 모듈 패키지 및 그 제조방법 |
KR10-2011-0066046 | 2011-07-04 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013158335A Division JP2013254973A (ja) | 2011-07-04 | 2013-07-30 | パワーモジュールパッケージの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2013016769A true JP2013016769A (ja) | 2013-01-24 |
Family
ID=47438149
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011206316A Pending JP2013016769A (ja) | 2011-07-04 | 2011-09-21 | パワーモジュールパッケージ及びその製造方法 |
JP2013158335A Pending JP2013254973A (ja) | 2011-07-04 | 2013-07-30 | パワーモジュールパッケージの製造方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013158335A Pending JP2013254973A (ja) | 2011-07-04 | 2013-07-30 | パワーモジュールパッケージの製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8664755B2 (ja) |
JP (2) | JP2013016769A (ja) |
KR (1) | KR101321277B1 (ja) |
CN (1) | CN102867815A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015052880A1 (ja) * | 2013-10-08 | 2015-04-16 | 株式会社デンソー | 半導体装置及びその製造方法 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101222809B1 (ko) * | 2011-06-16 | 2013-01-15 | 삼성전기주식회사 | 전력 모듈 패키지 및 그 제조방법 |
CN104465603A (zh) * | 2013-09-23 | 2015-03-25 | 台达电子企业管理(上海)有限公司 | 功率模块 |
CN106601694B (zh) * | 2015-10-16 | 2020-09-15 | 台达电子工业股份有限公司 | 堆叠结构及其制造方法 |
JP6770456B2 (ja) * | 2017-02-17 | 2020-10-14 | ルネサスエレクトロニクス株式会社 | 電子装置 |
CN109427744B (zh) * | 2017-08-22 | 2023-11-24 | 比亚迪半导体股份有限公司 | Ipm模块、车辆及ipm模块的制作方法 |
EP3659177B1 (en) | 2017-08-25 | 2023-10-25 | Huawei Technologies Co., Ltd. | Semiconductor module and method for manufacturing the same |
US10418343B2 (en) | 2017-12-05 | 2019-09-17 | Infineon Technologies Ag | Package-in-package structure for semiconductor devices and methods of manufacture |
CN109300883A (zh) * | 2018-10-31 | 2019-02-01 | 广东美的制冷设备有限公司 | 高集成电控板和电器 |
KR20240003259A (ko) * | 2022-06-30 | 2024-01-08 | 주식회사 아모그린텍 | 파워모듈 및 그 제조방법 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0430566A (ja) * | 1990-05-28 | 1992-02-03 | Sanyo Electric Co Ltd | 高出力用混成集積回路装置 |
JPH1093015A (ja) * | 1996-09-11 | 1998-04-10 | Hitachi Ltd | 半導体装置 |
JP2000091499A (ja) * | 1998-09-11 | 2000-03-31 | Hitachi Ltd | パワー半導体モジュール並びにそれを用いた電動機駆動システム |
JP2000228492A (ja) * | 1999-02-05 | 2000-08-15 | Hitachi Ltd | 樹脂封止した半導体装置 |
JP2001501376A (ja) * | 1996-09-30 | 2001-01-30 | シーメンス アクチエンゲゼルシヤフト | サンドイッチ構造のマイクロエレクトロニクス構成部材 |
JP2004349400A (ja) * | 2003-05-21 | 2004-12-09 | Matsushita Electric Ind Co Ltd | 熱伝導性回路基板およびそれを用いたパワーモジュール |
WO2007026944A1 (ja) * | 2005-08-31 | 2007-03-08 | Sanyo Electric Co., Ltd. | 回路装置およびその製造方法 |
JP2007251176A (ja) * | 2006-03-17 | 2007-09-27 | Samsung Electro-Mechanics Co Ltd | 陽極酸化金属基板モジュール |
JP2011044452A (ja) * | 2009-08-19 | 2011-03-03 | Denso Corp | 電子装置およびその製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5403782A (en) * | 1992-12-21 | 1995-04-04 | Sgs-Thomson Microelectronics, Inc. | Surface mountable integrated circuit package with integrated battery mount |
JPH07161899A (ja) * | 1993-12-10 | 1995-06-23 | Fujitsu Ltd | 回路基板のリード |
JPH0864722A (ja) * | 1994-08-26 | 1996-03-08 | Sanyo Electric Co Ltd | 混成集積回路装置 |
JP3516789B2 (ja) * | 1995-11-15 | 2004-04-05 | 三菱電機株式会社 | 半導体パワーモジュール |
US5994166A (en) * | 1997-03-10 | 1999-11-30 | Micron Technology, Inc. | Method of constructing stacked packages |
KR100267220B1 (ko) * | 1997-12-05 | 2000-10-16 | 김영환 | 반도체소자패키지및그의제조방법 |
JP2004281919A (ja) * | 2003-03-18 | 2004-10-07 | Seiko Epson Corp | 半導体装置、電子デバイス、電子機器、半導体装置の製造方法および電子デバイスの製造方法 |
JP4272968B2 (ja) * | 2003-10-16 | 2009-06-03 | エルピーダメモリ株式会社 | 半導体装置および半導体チップ制御方法 |
TWI226110B (en) | 2004-03-17 | 2005-01-01 | Cyntec Co Ltd | Package with stacked substrates |
US7550834B2 (en) * | 2006-06-29 | 2009-06-23 | Sandisk Corporation | Stacked, interconnected semiconductor packages |
JP5319908B2 (ja) * | 2007-10-31 | 2013-10-16 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 回路装置 |
-
2011
- 2011-07-04 KR KR1020110066046A patent/KR101321277B1/ko not_active IP Right Cessation
- 2011-09-21 JP JP2011206316A patent/JP2013016769A/ja active Pending
- 2011-09-28 US US13/247,603 patent/US8664755B2/en not_active Expired - Fee Related
- 2011-10-24 CN CN2011103260882A patent/CN102867815A/zh active Pending
-
2013
- 2013-07-30 JP JP2013158335A patent/JP2013254973A/ja active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0430566A (ja) * | 1990-05-28 | 1992-02-03 | Sanyo Electric Co Ltd | 高出力用混成集積回路装置 |
JPH1093015A (ja) * | 1996-09-11 | 1998-04-10 | Hitachi Ltd | 半導体装置 |
JP2001501376A (ja) * | 1996-09-30 | 2001-01-30 | シーメンス アクチエンゲゼルシヤフト | サンドイッチ構造のマイクロエレクトロニクス構成部材 |
JP2000091499A (ja) * | 1998-09-11 | 2000-03-31 | Hitachi Ltd | パワー半導体モジュール並びにそれを用いた電動機駆動システム |
JP2000228492A (ja) * | 1999-02-05 | 2000-08-15 | Hitachi Ltd | 樹脂封止した半導体装置 |
JP2004349400A (ja) * | 2003-05-21 | 2004-12-09 | Matsushita Electric Ind Co Ltd | 熱伝導性回路基板およびそれを用いたパワーモジュール |
WO2007026944A1 (ja) * | 2005-08-31 | 2007-03-08 | Sanyo Electric Co., Ltd. | 回路装置およびその製造方法 |
JP2007251176A (ja) * | 2006-03-17 | 2007-09-27 | Samsung Electro-Mechanics Co Ltd | 陽極酸化金属基板モジュール |
JP2011044452A (ja) * | 2009-08-19 | 2011-03-03 | Denso Corp | 電子装置およびその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015052880A1 (ja) * | 2013-10-08 | 2015-04-16 | 株式会社デンソー | 半導体装置及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR101321277B1 (ko) | 2013-10-28 |
US20130009290A1 (en) | 2013-01-10 |
CN102867815A (zh) | 2013-01-09 |
US8664755B2 (en) | 2014-03-04 |
JP2013254973A (ja) | 2013-12-19 |
KR20130004779A (ko) | 2013-01-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2013254973A (ja) | パワーモジュールパッケージの製造方法 | |
KR101321282B1 (ko) | 전력 모듈 패키지 및 이를 구비한 시스템 모듈 | |
US8058722B2 (en) | Power semiconductor module and method of manufacturing the same | |
KR101222831B1 (ko) | 전력 모듈 패키지 | |
KR101255946B1 (ko) | 전력 모듈 패키지 | |
KR101224702B1 (ko) | 파워소자 패키지모듈 및 그의 제조방법 | |
JP5497690B2 (ja) | パワーパッケージモジュール | |
US20130105956A1 (en) | Power module package and method for manufacturing the same | |
US9105611B2 (en) | Power module package | |
US20150270201A1 (en) | Semiconductor module package and method of manufacturing the same | |
KR20130045596A (ko) | 전력 모듈 패키지 및 그 제조방법 | |
TW201216446A (en) | Power module | |
KR101994727B1 (ko) | 전력 모듈 패키지 및 그 제조방법 | |
KR20180087330A (ko) | 파워 모듈의 양면 냉각을 위한 금속 슬러그 | |
JP2013008748A (ja) | 半導体装置 | |
JP2010251582A (ja) | Dc−dcコンバータ | |
KR101216777B1 (ko) | 전력 모듈 패키지 및 그 제조방법 | |
KR101067138B1 (ko) | 파워 모듈 및 그 제조방법 | |
CN220121824U (zh) | 一种具有新型散热结构的功率模块 | |
KR20150061441A (ko) | 패키지 기판 및 그 제조방법 및 그를 이용한 전력 모듈 패키지 | |
CN216413085U (zh) | 半导体电路 | |
KR101067190B1 (ko) | 파워 패키지 모듈 및 그 제조방법 | |
CN114050134A (zh) | 半导体电路 | |
KR20130055358A (ko) | 전력 모듈 패키지 및 그 제조방법 | |
KR101474618B1 (ko) | 전력 모듈 패키지 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130419 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130430 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130730 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131203 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20140303 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140306 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20140610 |