JP2013002921A - 測定装置 - Google Patents

測定装置 Download PDF

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Publication number
JP2013002921A
JP2013002921A JP2011133543A JP2011133543A JP2013002921A JP 2013002921 A JP2013002921 A JP 2013002921A JP 2011133543 A JP2011133543 A JP 2011133543A JP 2011133543 A JP2011133543 A JP 2011133543A JP 2013002921 A JP2013002921 A JP 2013002921A
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JP
Japan
Prior art keywords
signal
frequency
component
error component
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011133543A
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English (en)
Japanese (ja)
Other versions
JP2013002921A5 (enExample
Inventor
Yoshiyuki Okada
芳幸 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011133543A priority Critical patent/JP2013002921A/ja
Priority to US13/483,615 priority patent/US20120320381A1/en
Publication of JP2013002921A publication Critical patent/JP2013002921A/ja
Publication of JP2013002921A5 publication Critical patent/JP2013002921A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02059—Reducing effect of parasitic reflections, e.g. cyclic errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Mathematical Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP2011133543A 2011-06-15 2011-06-15 測定装置 Pending JP2013002921A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011133543A JP2013002921A (ja) 2011-06-15 2011-06-15 測定装置
US13/483,615 US20120320381A1 (en) 2011-06-15 2012-05-30 Measurement apparatus and measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011133543A JP2013002921A (ja) 2011-06-15 2011-06-15 測定装置

Publications (2)

Publication Number Publication Date
JP2013002921A true JP2013002921A (ja) 2013-01-07
JP2013002921A5 JP2013002921A5 (enExample) 2014-07-10

Family

ID=47353441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011133543A Pending JP2013002921A (ja) 2011-06-15 2011-06-15 測定装置

Country Status (2)

Country Link
US (1) US20120320381A1 (enExample)
JP (1) JP2013002921A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9207062B2 (en) * 2012-12-10 2015-12-08 The Johns Hopkins University Distortion corrected optical coherence tomography system
CN103267965B (zh) * 2013-05-20 2015-01-28 中国路桥工程有限责任公司 一种多目标微变测量数据处理系统及方法
EP2853905B1 (en) * 2013-09-30 2018-09-19 Airbus Defence and Space Limited Phase angle measurement using residue number system analogue-to-digital conversion
US10642243B2 (en) * 2018-03-01 2020-05-05 Semiconductor Components Industries, Llc Methods and apparatus for an encoder
CN112816913A (zh) * 2021-01-28 2021-05-18 厦门拓宝科技有限公司 一种单相交流电压信号掉电快速检测方法、装置、存储介质、程序产品及终端设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09189537A (ja) * 1996-01-06 1997-07-22 Canon Inc 光へテロダイン干渉を利用する測定方法及びそれを用いた測定装置
JP2003028717A (ja) * 2001-07-13 2003-01-29 Advantest Corp 光波長測定装置、方法、プログラムおよび該プログラムを記録した記録媒体
US20030030816A1 (en) * 2001-08-11 2003-02-13 Eom Tae Bong Nonlinearity error correcting method and phase angle measuring method for displacement measurement in two-freqency laser interferometer and displacement measurement system using the same
JP2006170796A (ja) * 2004-12-15 2006-06-29 National Institute Of Advanced Industrial & Technology 光干渉計の周期誤差低減方法および装置
JP2008510170A (ja) * 2004-08-16 2008-04-03 ザイゴ コーポレーション 干渉計システムにおける周期誤差補正

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6597459B2 (en) * 2000-05-16 2003-07-22 Zygo Corporation Data age adjustments
US7126695B2 (en) * 2003-10-10 2006-10-24 The Boeing Company Heterodyne frequency modulated signal demodulator and method of operating the same
US7576868B2 (en) * 2007-06-08 2009-08-18 Zygo Corporation Cyclic error compensation in interferometry systems

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09189537A (ja) * 1996-01-06 1997-07-22 Canon Inc 光へテロダイン干渉を利用する測定方法及びそれを用いた測定装置
JP2003028717A (ja) * 2001-07-13 2003-01-29 Advantest Corp 光波長測定装置、方法、プログラムおよび該プログラムを記録した記録媒体
US20030030816A1 (en) * 2001-08-11 2003-02-13 Eom Tae Bong Nonlinearity error correcting method and phase angle measuring method for displacement measurement in two-freqency laser interferometer and displacement measurement system using the same
JP2008510170A (ja) * 2004-08-16 2008-04-03 ザイゴ コーポレーション 干渉計システムにおける周期誤差補正
JP2006170796A (ja) * 2004-12-15 2006-06-29 National Institute Of Advanced Industrial & Technology 光干渉計の周期誤差低減方法および装置

Also Published As

Publication number Publication date
US20120320381A1 (en) 2012-12-20

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