JP2012518788A - 磁場感知デバイス - Google Patents

磁場感知デバイス Download PDF

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Publication number
JP2012518788A
JP2012518788A JP2011551114A JP2011551114A JP2012518788A JP 2012518788 A JP2012518788 A JP 2012518788A JP 2011551114 A JP2011551114 A JP 2011551114A JP 2011551114 A JP2011551114 A JP 2011551114A JP 2012518788 A JP2012518788 A JP 2012518788A
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JP
Japan
Prior art keywords
current
sensing
sensor
sensing elements
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011551114A
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English (en)
Japanese (ja)
Other versions
JP2012518788A5 (enExample
Inventor
ジー． メイザー、フィリップ
エム． スローター、ジョン
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Everspin Technologies Inc
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Everspin Technologies Inc
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Publication date
Application filed by Everspin Technologies Inc filed Critical Everspin Technologies Inc
Publication of JP2012518788A publication Critical patent/JP2012518788A/ja
Publication of JP2012518788A5 publication Critical patent/JP2012518788A5/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
    • G01R33/05—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle in thin-film element

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
JP2011551114A 2009-02-25 2010-02-08 磁場感知デバイス Pending JP2012518788A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/392,638 2009-02-25
US12/392,638 US7977941B2 (en) 2009-02-25 2009-02-25 Magnetic field sensing device
PCT/US2010/023444 WO2010098967A1 (en) 2009-02-25 2010-02-08 Magnetic field sensing device

Publications (2)

Publication Number Publication Date
JP2012518788A true JP2012518788A (ja) 2012-08-16
JP2012518788A5 JP2012518788A5 (enExample) 2013-03-28

Family

ID=42630392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011551114A Pending JP2012518788A (ja) 2009-02-25 2010-02-08 磁場感知デバイス

Country Status (7)

Country Link
US (1) US7977941B2 (enExample)
JP (1) JP2012518788A (enExample)
KR (1) KR101739261B1 (enExample)
CN (2) CN104865539B (enExample)
DE (1) DE112010000890T5 (enExample)
TW (1) TWI487928B (enExample)
WO (1) WO2010098967A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017173326A (ja) * 2016-03-23 2017-09-28 アナログ・デヴァイシズ・グローバル 磁界検出器のためのオフセット補償

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2009110119A1 (ja) * 2008-03-06 2011-07-14 富士電機ホールディングス株式会社 強磁性トンネル接合素子および強磁性トンネル接合素子の駆動方法
US8390283B2 (en) 2009-09-25 2013-03-05 Everspin Technologies, Inc. Three axis magnetic field sensor
US20110169488A1 (en) * 2010-01-08 2011-07-14 Everspin Technologies, Inc. Method and structure for testing and calibrating magnetic field sensing device
US8518734B2 (en) * 2010-03-31 2013-08-27 Everspin Technologies, Inc. Process integration of a single chip three axis magnetic field sensor
US20120068698A1 (en) * 2010-09-17 2012-03-22 Industrial Technology Research Institute Structure of tmr and fabrication method of integrated 3-axis magnetic field sensor and sensing circuit
US8890266B2 (en) * 2011-01-31 2014-11-18 Everspin Technologies, Inc. Fabrication process and layout for magnetic sensor arrays
TWI420128B (zh) * 2011-10-28 2013-12-21 Isentek Inc 磁感測裝置
US9739808B2 (en) * 2011-11-29 2017-08-22 Honeywell International Inc. Devices, methods, and systems for sensing current
JP5849654B2 (ja) * 2011-11-30 2016-02-03 株式会社リコー 電流センサ
JP5857687B2 (ja) * 2011-11-30 2016-02-10 株式会社リコー 電流検知装置、電流検知素子および電流検知方法
US9411024B2 (en) 2012-04-20 2016-08-09 Infineon Technologies Ag Magnetic field sensor having XMR elements in a full bridge circuit having diagonal elements sharing a same shape anisotropy
JP5590349B2 (ja) * 2012-07-18 2014-09-17 Ｔｄｋ株式会社 磁気センサシステム
US9865650B2 (en) * 2012-12-20 2018-01-09 Mark B. Johnson Magnetic tunnel junction based logic circuits
US9754997B2 (en) * 2012-12-20 2017-09-05 Mark B. Johnson Magnetic tunnel junction based reconfigurable processing system and components
US9341684B2 (en) 2013-03-13 2016-05-17 Plures Technologies, Inc. Magnetic field sensing apparatus and methods
US9134385B2 (en) * 2013-05-09 2015-09-15 Honeywell International Inc. Magnetic-field sensing device
US9519034B2 (en) * 2014-05-15 2016-12-13 Everspin Technologies, Inc. Bipolar chopping for 1/F noise and offset reduction in magnetic field sensors
US10012707B2 (en) * 2015-04-29 2018-07-03 Everspin Technologies, Inc. Magnetic field sensor with 3-axes self test
US10809320B2 (en) 2015-04-29 2020-10-20 Everspin Technologies, Inc. Magnetic field sensor with increased SNR
EP3104187A1 (en) * 2015-06-09 2016-12-14 International Iberian Nanotechnology Laboratory Magnetoresistive sensor
ITUB20153317A1 (it) 2015-09-01 2017-03-01 St Microelectronics Srl Procedimento di calibrazione per dispositivi sensori di campo magnetico, sistema, apparecchiatura e prodotto informatico corrispondenti
CN105574982B (zh) * 2016-01-12 2018-09-25 深圳粤宝电子科技有限公司 一种线圈磁芯全桥结构的读磁器
US10782153B2 (en) 2016-03-08 2020-09-22 Analog Devices Global Multiturn sensor arrangement and readout
US10067201B2 (en) * 2016-04-14 2018-09-04 Texas Instruments Incorporated Wiring layout to reduce magnetic field
DE102016208314A1 (de) 2016-05-13 2017-11-16 Robert Bosch Gmbh Magnetfeldsensor und Verfahren zum Messen eines äußeren Magnetfeldes
CN107037380B (zh) * 2016-11-18 2019-03-19 清华大学 一种宽磁场范围测量方法及装置
CN108469595B (zh) 2017-02-23 2020-08-11 爱盛科技股份有限公司 磁场感测装置及感测方法
RU2643233C1 (ru) * 2017-04-04 2018-01-31 Федеральное государственное унитарное предприятие федеральный научно-производственный центр "Производственное объединение "Старт" им. М.В. Проценко" (ФГУП ФНПЦ ПО "Старт" им. М.В. Проценко") Устройство для автоматического мониторинга магнитных полей
US10739165B2 (en) 2017-07-05 2020-08-11 Analog Devices Global Magnetic field sensor
US10794968B2 (en) * 2017-08-24 2020-10-06 Everspin Technologies, Inc. Magnetic field sensor and method of manufacture
US10615887B1 (en) * 2018-09-24 2020-04-07 Seagate Technology Llc Mitigation of noise generated by random excitation of asymmetric oscillation modes
US11460521B2 (en) 2019-03-18 2022-10-04 Analog Devices International Unlimited Company Multiturn sensor arrangement
EP3957958B1 (en) * 2019-08-05 2023-05-10 Shenzhen Goodix Technology Co., Ltd. Detection circuit of bridge sensor, chip and detection system
US11598828B2 (en) * 2019-08-26 2023-03-07 Western Digital Technologies, Inc. Magnetic sensor array with different RA TMR film
CN112462125B (zh) * 2020-11-14 2024-09-10 武汉启亦电气有限公司 一种双气息的钳形电流表
US11815568B2 (en) 2020-12-28 2023-11-14 Stmicroelectronics, Inc. System and method for fast magnetometer calibration using gyroscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06235759A (ja) * 1992-12-31 1994-08-23 Honeywell Inc 磁化切換え形閉ループ磁力計
JPH06275887A (ja) * 1993-03-19 1994-09-30 Fujitsu Ltd 磁気抵抗素子

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5247278A (en) 1991-11-26 1993-09-21 Honeywell Inc. Magnetic field sensing device
DE69530726T2 (de) 1994-02-28 2004-03-11 Koninklijke Philips Electronics N.V. Messgerät für magnetische felder
DE69702919T2 (de) * 1997-12-22 2001-01-25 Tesa Brown & Sharpe Sa Schaltung für Dimensionsmessgerät mit magnetoresistiven Elektroden
US6999285B2 (en) 2003-10-27 2006-02-14 Hitachi Global Storage Technologies Netherlands B.V. Spin valve transistor with differential detection and method of making
WO2005064357A2 (en) * 2003-12-23 2005-07-14 Koninklijke Philips Electronics N.V. Flux guides for magnetic field sensors and memories
US7120048B2 (en) 2004-06-21 2006-10-10 Honeywell International Inc. Nonvolatile memory vertical ring bit and write-read structure
JP2006086362A (ja) 2004-09-16 2006-03-30 Toshiba Corp 磁気記憶装置
JP2008515043A (ja) * 2004-09-27 2008-05-08 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 入力装置用の磁気センサ
KR20070087628A (ko) * 2004-12-28 2007-08-28 코닌클리케 필립스 일렉트로닉스 엔.브이. 조정 가능한 특성을 지닌 브릿지-유형의 센서
US7444738B2 (en) * 2005-07-29 2008-11-04 Everspin Technologies, Inc. Method for tunnel junction sensor with magnetic cladding
US7220602B2 (en) 2005-07-29 2007-05-22 Freescale Semiconductor, Inc. Magnetic tunnel junction sensor method
JP4508058B2 (ja) * 2005-09-26 2010-07-21 三菱電機株式会社 磁界検出装置およびその製造方法
US7271011B2 (en) * 2005-10-28 2007-09-18 Freescale Semiconductor, Inc. Methods of implementing magnetic tunnel junction current sensors
US7547480B2 (en) 2005-10-28 2009-06-16 Everspin Technologies, Inc. Magnetic tunnel junction pressure sensors and methods

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06235759A (ja) * 1992-12-31 1994-08-23 Honeywell Inc 磁化切換え形閉ループ磁力計
JPH06275887A (ja) * 1993-03-19 1994-09-30 Fujitsu Ltd 磁気抵抗素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017173326A (ja) * 2016-03-23 2017-09-28 アナログ・デヴァイシズ・グローバル 磁界検出器のためのオフセット補償

Also Published As

Publication number Publication date
TW201038957A (en) 2010-11-01
WO2010098967A1 (en) 2010-09-02
CN104865539B (zh) 2017-12-22
CN102292648B (zh) 2015-06-03
CN102292648A (zh) 2011-12-21
DE112010000890T5 (de) 2012-09-06
CN104865539A (zh) 2015-08-26
KR101739261B1 (ko) 2017-05-24
TWI487928B (zh) 2015-06-11
US20100213933A1 (en) 2010-08-26
KR20110127638A (ko) 2011-11-25
US7977941B2 (en) 2011-07-12

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