JP2012514691A - 機能表面のコーティングのための方法及び装置 - Google Patents

機能表面のコーティングのための方法及び装置 Download PDF

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Publication number
JP2012514691A
JP2012514691A JP2011544799A JP2011544799A JP2012514691A JP 2012514691 A JP2012514691 A JP 2012514691A JP 2011544799 A JP2011544799 A JP 2011544799A JP 2011544799 A JP2011544799 A JP 2011544799A JP 2012514691 A JP2012514691 A JP 2012514691A
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JP
Japan
Prior art keywords
coating
component
functional surface
bevel gear
source
Prior art date
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Pending
Application number
JP2011544799A
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English (en)
Japanese (ja)
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JP2012514691A5 (enExample
Inventor
ヨハン シュナグル
ゼルゲ クルサヴェ
ハンス−ヨアヒム シャイベ
フォルカー ヴァイナハト
Original Assignee
フラウンホッファー−ゲゼルシャフト・ツァー・フォデラング・デル・アンゲワンテン・フォーシュング・エー．ファウ．
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Publication date
Application filed by フラウンホッファー−ゲゼルシャフト・ツァー・フォデラング・デル・アンゲワンテン・フォーシュング・エー．ファウ． filed Critical フラウンホッファー−ゲゼルシャフト・ツァー・フォデラング・デル・アンゲワンテン・フォーシュング・エー．ファウ．
Publication of JP2012514691A publication Critical patent/JP2012514691A/ja
Publication of JP2012514691A5 publication Critical patent/JP2012514691A5/ja
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Gears, Cams (AREA)
  • Gear Transmission (AREA)
  • Physical Vapour Deposition (AREA)
JP2011544799A 2009-01-09 2009-12-12 機能表面のコーティングのための方法及び装置 Pending JP2012514691A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009004158.3 2009-01-09
DE102009004158.3A DE102009004158B4 (de) 2009-01-09 2009-01-09 Verfahren und Vorrichtung zur Funktionsflächenbeschichtung
PCT/EP2009/008914 WO2010078914A1 (de) 2009-01-09 2009-12-12 Verfahren und vorrichtung zur funktionsflächenbeschichtung

Publications (2)

Publication Number Publication Date
JP2012514691A true JP2012514691A (ja) 2012-06-28
JP2012514691A5 JP2012514691A5 (enExample) 2013-02-07

Family

ID=41581045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011544799A Pending JP2012514691A (ja) 2009-01-09 2009-12-12 機能表面のコーティングのための方法及び装置

Country Status (6)

Country Link
US (1) US20110300310A1 (enExample)
EP (1) EP2376667B8 (enExample)
JP (1) JP2012514691A (enExample)
CN (1) CN102272345A (enExample)
DE (1) DE102009004158B4 (enExample)
WO (1) WO2010078914A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021203709B3 (de) 2021-04-14 2022-06-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Zahnrad und Verfahren zum Herstellen eines Zahnrads

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111804A (en) * 1980-02-09 1981-09-03 Dainippon Printing Co Ltd Manufacture of body differing in optical property according to direction
JPS59139930A (ja) * 1983-01-31 1984-08-11 Konishiroku Photo Ind Co Ltd 蒸着装置
JPH04214854A (ja) * 1990-12-14 1992-08-05 Mitsubishi Heavy Ind Ltd 窒化ほう素膜の形成方法
JPH0551740A (ja) * 1991-08-20 1993-03-02 Mitsubishi Heavy Ind Ltd 複雑形状基材への薄膜形成装置
JP2005014107A (ja) * 2003-06-23 2005-01-20 Mitsubishi Materials Kobe Tools Corp 再研摩・再コーティングホブ、ホブの再研摩・再コーティング方法
JP2008223105A (ja) * 2007-03-14 2008-09-25 Toyohashi Univ Of Technology 直進プラズマによる処理装置、処理方法及び処理物

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1029431A (en) 1973-08-31 1978-04-11 Lawrence R. Sohm Dual mode control logic for a multi-mode copier/duplicator
JPS5620162A (en) * 1979-07-26 1981-02-25 Fujitsu Ltd Vapor depositing method
US4539461A (en) * 1983-12-21 1985-09-03 The Garrett Corporation Method and apparatus for laser gear hardening
US4508612A (en) 1984-03-07 1985-04-02 International Business Machines Corporation Shield for improved magnetron sputter deposition into surface recesses
JP2582552B2 (ja) 1986-05-29 1997-02-19 三菱電機株式会社 イオン注入装置
JPS63137161A (ja) 1986-11-28 1988-06-09 Mitsubishi Electric Corp シヤフトの被膜形成法
US5288556A (en) * 1987-03-31 1994-02-22 Lemelson Jerome H Gears and gear assemblies
JPH04183848A (ja) 1990-11-16 1992-06-30 Mitsubishi Heavy Ind Ltd 窒化ホウ素成膜方法
US5482602A (en) * 1993-11-04 1996-01-09 United Technologies Corporation Broad-beam ion deposition coating methods for depositing diamond-like-carbon coatings on dynamic surfaces
DE4412906C1 (de) 1994-04-14 1995-07-13 Fraunhofer Ges Forschung Verfahren und Einrichtung für die ionengestützte Vakuumbeschichtung
GB9503305D0 (en) * 1995-02-20 1995-04-12 Univ Nanyang Filtered cathodic arc source
US5685797A (en) * 1995-05-17 1997-11-11 United Technologies Corporation Coated planet gear journal bearing and process of making same
US20060228497A1 (en) * 2002-05-08 2006-10-12 Satyendra Kumar Plasma-assisted coating
WO2005046957A1 (ja) * 2003-11-14 2005-05-26 Ogura Clutch Co., Ltd. 樹脂コーティング方法とインサート成形品並びに樹脂被覆金属歯車類
DE102004052866A1 (de) * 2004-11-02 2006-05-11 Hnp Mikrosysteme Gmbh Diamantbeschichtung von Verdrängerkomponenten, wie Zahnkomponenten, für eine chemische Beständigkeit und tribologischen Verschleißschutz in einer Verdrängereinheit
US8707528B2 (en) * 2005-07-28 2014-04-29 Klingelnberg Gmbh Universal machine for the soft machining of bevel gears and corresponding method
DE102007051023A1 (de) 2007-10-25 2009-04-30 Bayerische Motoren Werke Aktiengesellschaft Verfahren zum Beschichten einer Oberfläche eines Bauteils

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111804A (en) * 1980-02-09 1981-09-03 Dainippon Printing Co Ltd Manufacture of body differing in optical property according to direction
JPS59139930A (ja) * 1983-01-31 1984-08-11 Konishiroku Photo Ind Co Ltd 蒸着装置
JPH04214854A (ja) * 1990-12-14 1992-08-05 Mitsubishi Heavy Ind Ltd 窒化ほう素膜の形成方法
JPH0551740A (ja) * 1991-08-20 1993-03-02 Mitsubishi Heavy Ind Ltd 複雑形状基材への薄膜形成装置
JP2005014107A (ja) * 2003-06-23 2005-01-20 Mitsubishi Materials Kobe Tools Corp 再研摩・再コーティングホブ、ホブの再研摩・再コーティング方法
JP2008223105A (ja) * 2007-03-14 2008-09-25 Toyohashi Univ Of Technology 直進プラズマによる処理装置、処理方法及び処理物

Also Published As

Publication number Publication date
WO2010078914A1 (de) 2010-07-15
CN102272345A (zh) 2011-12-07
DE102009004158A1 (de) 2010-07-15
EP2376667A1 (de) 2011-10-19
DE102009004158B4 (de) 2023-03-30
US20110300310A1 (en) 2011-12-08
EP2376667B1 (de) 2016-03-16
EP2376667B8 (de) 2016-05-18

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