Classifications

• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/04—Coating on selected surface areas, e.g. using masks
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/04—Coating on selected surface areas, e.g. using masks
  • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
  • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
  • C23C14/50—Substrate holders
  • C23C14/505—Substrate holders for rotation of the substrates

Definitions

• the invention relates to a method and a device for coating the functional surfaces of symmetrically serrated components, in particular the tooth flanks of gears, with a coating element circulating relative to the component and emitting the coating material in the form of electrically charged particles in the direction of the component the preamble of claim 1 and 8, respectively.
• the critical circulation area in which the functional surfaces of the component are set at a shallow angle to the direction of irradiation, is masked out by a structurally simple shading of the component, thereby effectively preventing an insufficient layer adhesion and quality as a result of the incident.
• the result is an integrally bonded to the component coating with excellent tribological properties, as in particular of highly loaded gears, such as in motor vehicle transmissions are required.
• the component and the coating source are circumferentially driven relative to each other intermittently or non-uniformly with longer residence times in the rotational position of the functional surfaces used steeply to the irradiation direction, so that the main part of the coating material in an optimal with respect to layer adhesion and hardness angle range on the functional surface incident.
• the functional surfaces on only one side of the component prongs ie on toothed wheels, can be coated in a simple manner by the tooth flanks, which are more heavily loaded in the direction of travel, in that the component is half over a boundary of the circulation area is completely shadowed by the aperture.
• an ionic or plasma jet is preferably used as the coating material, which with regard to an improved contact tion is additionally deflected with an electric and / or magnetic field.
• the field is combined in a particularly preferred manner with the diaphragm in such a way that the coating beam is bundled in such a way that a portion of the coating particles otherwise captured by the diaphragm is coated to increase coating intensity on the functional surface, thus significantly increasing the coating rate.
• the flank area which is exposed to the incident coating particles at a sufficiently steep angle can be significantly increased in a simple way by the bevel gear axis being fixed in a direction of irradiation Tilting slope is inclined.
• Fig. 1a, b a tooth flank coating according to the invention a
• FIG. 2 shows an illustration, corresponding to FIG. 1, of a gear coating on a reduced scale in a second embodiment of the invention
• FIG 3 shows a third exemplary embodiment of a tooth flank coating with a device for bundling the coating jet combined with the aperture
• Fig. 4 shows a further variant of the invention for the tooth flank coating of a bevel gear.
• the in Figs. coating system shown serves for Zahnflankenbe- coating of gears 1 and includes a coating source 2, which in the Fign. Idealized as a parallelized coating jet shown, but in fact emitted much more diffuse coating beam in the form of an ionized plasma stream in the direction of the gear 1.
• the plasma particles are in a magnetic and / or electric field, for. B. by applying an electrical voltage to the gear 1, so much accelerated that they impinge on the tooth flanks 3 with high kinetic energy and form a firmly adhering, hard coating there.
• the toothed wheel 1 is rotated about the gear axis so that all the tooth flanks 3 pass successively into the coating jet of the coating source 1. In this case, however, the alignment of the tooth flanks 3 to the irradiation direction and thus also the angle of incidence of the plaque particles on the tooth flank 3 changes. In a circumferential region of the toothed wheel 1 with a tooth flank orientation flat with respect to the irradiation direction, the angle of incidence of the plasma particles becomes so small that sufficient layer adhesion and quality is achieved more.
• a flat tooth flank orientation is to be understood as an inclination of the tooth flanks 3 with respect to the direction of the incident plasma flow, which causes the plasma particles to either reflect upon the tooth flanks 3 or form a coating which does not meet the quality requirements for layer adhesion and hardness ,
• This critical angle of inclination is also dependent on the remaining process parameters and in the exemplary embodiments shown lies in the range between approximately 10 and 20 °.
• the front tooth flank 3 a moves into a rotational position shadowed by the tooth head, while the tooth flank 3 b in the direction of rotation runs into the passage region of the diaphragm 4 and is now aligned with a sufficiently large angle of inclination to the direction of irradiation ,
• the angle of incidence of the plasma stream on the tooth flank 3b becomes steeper and steeper and reaches the coating-optimal incidence angle range up to 90 °.
• the rotational movement of the toothed wheel 1 is slowed down or stopped, thereby ensuring that the main part of the coating material is deposited in a coating-optimal manner. In this way, all the tooth flanks 3 are successively coated during rotation of the gear 1.
• the coating system shown in Fig. 2 differs therefrom mainly in that the diaphragm 4 is extended on one side so as to completely shade the one gear half.
• a one-sided tooth flank coating is achieved, as is preferred for gears that are loaded in the operating state predominantly or exclusively only on one and the same tooth flank of each flank pair.
• the diaphragm 4 is combined with an electric or magnetic field guide 5, which causes a bundling of the plasma jet, such that a portion of the plasma jet, which would otherwise be intercepted by the aperture 4, while narrowing the Beschich - Cross section of the beam is also deposited coating effect on the way through the aperture passage, whereby the coating significantly increase the intensity of the incident plasma current and accordingly also the temporal coating rate.

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• Chemical & Material Sciences (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Engineering & Computer Science (AREA)
• Materials Engineering (AREA)
• Mechanical Engineering (AREA)
• Metallurgy (AREA)
• Organic Chemistry (AREA)
• Gears, Cams (AREA)
• Physical Vapour Deposition (AREA)
• Gear Transmission (AREA)

Priority Applications (4)

Applications Claiming Priority (2)

Related Child Applications (1)

Publications (1)

Family

ID=41581045

Family Applications (1)

Country Status (6)

Families Citing this family (1)

Citations (8)

Family Cites Families (15)

• 2009
  • 2009-01-09 DE DE102009004158.3A patent/DE102009004158B4/de active Active
  • 2009-12-12 JP JP2011544799A patent/JP2012514691A/ja active Pending
  • 2009-12-12 WO PCT/EP2009/008914 patent/WO2010078914A1/de not_active Ceased
  • 2009-12-12 EP EP09795701.3A patent/EP2376667B8/de active Active
  • 2009-12-12 CN CN2009801540678A patent/CN102272345A/zh active Pending
• 2011
  • 2011-07-07 US US13/178,157 patent/US20110300310A1/en not_active Abandoned

Patent Citations (8)

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