JP2012503797A - 自動ダイナミック画素マップ補正および駆動信号較正 - Google Patents
自動ダイナミック画素マップ補正および駆動信号較正 Download PDFInfo
- Publication number
- JP2012503797A JP2012503797A JP2011529230A JP2011529230A JP2012503797A JP 2012503797 A JP2012503797 A JP 2012503797A JP 2011529230 A JP2011529230 A JP 2011529230A JP 2011529230 A JP2011529230 A JP 2011529230A JP 2012503797 A JP2012503797 A JP 2012503797A
- Authority
- JP
- Japan
- Prior art keywords
- image
- template
- panel
- pixel
- difference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000012937 correction Methods 0.000 title description 7
- 238000000034 method Methods 0.000 claims description 48
- 230000004044 response Effects 0.000 claims description 38
- 238000001514 detection method Methods 0.000 claims description 31
- 238000003384 imaging method Methods 0.000 claims description 10
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 3
- 230000001186 cumulative effect Effects 0.000 claims description 2
- 239000013589 supplement Substances 0.000 claims 1
- 238000004364 calculation method Methods 0.000 abstract description 5
- 230000007547 defect Effects 0.000 description 24
- 239000011521 glass Substances 0.000 description 19
- 238000012360 testing method Methods 0.000 description 19
- 238000012545 processing Methods 0.000 description 18
- 239000004973 liquid crystal related substance Substances 0.000 description 15
- 230000003287 optical effect Effects 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 238000003860 storage Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 238000005259 measurement Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000003491 array Methods 0.000 description 8
- 239000011295 pitch Substances 0.000 description 8
- 238000013507 mapping Methods 0.000 description 7
- 230000015654 memory Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 230000008439 repair process Effects 0.000 description 3
- 238000012552 review Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/3183—Generation of test inputs, e.g. test vectors, patterns or sequences
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10024108P | 2008-09-25 | 2008-09-25 | |
US61/100,241 | 2008-09-25 | ||
PCT/US2009/058254 WO2010036818A1 (en) | 2008-09-25 | 2009-09-24 | Automatic dynamic pixel map correction and drive signal calibration |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2012503797A true JP2012503797A (ja) | 2012-02-09 |
Family
ID=42060090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011529230A Withdrawn JP2012503797A (ja) | 2008-09-25 | 2009-09-24 | 自動ダイナミック画素マップ補正および駆動信号較正 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2012503797A (zh) |
KR (3) | KR101451352B1 (zh) |
CN (1) | CN102203625B (zh) |
TW (1) | TWI484159B (zh) |
WO (1) | WO2010036818A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020502825A (ja) * | 2016-12-16 | 2020-01-23 | テソロ・サイエンティフィック・インコーポレーテッド | 発光ダイオード(led)検査装置及び製造方法 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI407801B (zh) * | 2010-08-11 | 2013-09-01 | Silicon Motion Inc | 用來進行壞像素補償之方法與用來進行壞像素補償之裝置 |
US8866899B2 (en) * | 2011-06-07 | 2014-10-21 | Photon Dynamics Inc. | Systems and methods for defect detection using a whole raw image |
TWI496091B (zh) * | 2012-04-06 | 2015-08-11 | Benq Materials Corp | 薄膜檢測方法及檢測裝置 |
JP6161852B2 (ja) * | 2015-04-06 | 2017-07-12 | 三菱電機株式会社 | 非破壊検査システム及び特異点検出システム |
CN108303640B (zh) * | 2016-01-25 | 2020-06-05 | 深圳睿晟自动化技术有限公司 | 一种线路检测的方法和装置 |
KR102632426B1 (ko) * | 2019-06-05 | 2024-01-31 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 상의 결함을 식별하기 위한 방법, 및 기판 상의 결함 있는 드라이버 회로를 식별하기 위한 장치 |
US20230153977A1 (en) * | 2021-11-17 | 2023-05-18 | Orbotech Ltd. | Panel design to improve accurate defect location report |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4805123B1 (en) * | 1986-07-14 | 1998-10-13 | Kla Instr Corp | Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems |
IL99823A0 (en) * | 1990-11-16 | 1992-08-18 | Orbot Instr Ltd | Optical inspection method and apparatus |
US5235272A (en) * | 1991-06-17 | 1993-08-10 | Photon Dynamics, Inc. | Method and apparatus for automatically inspecting and repairing an active matrix LCD panel |
US5337151A (en) * | 1992-07-28 | 1994-08-09 | Optical Radiation Corporation | Double-sided circuit board exposure machine and method with optical registration and material variation compensation |
KR100189178B1 (ko) * | 1995-05-19 | 1999-06-01 | 오우라 히로시 | 패널 화질 검사 장치 및 화질 보정 방법 |
JP4275345B2 (ja) | 2002-01-30 | 2009-06-10 | 株式会社日立製作所 | パターン検査方法及びパターン検査装置 |
US20060045383A1 (en) * | 2004-08-31 | 2006-03-02 | Picciotto Carl E | Displacement estimation system and method |
JP3918854B2 (ja) * | 2004-09-06 | 2007-05-23 | オムロン株式会社 | 基板検査方法および基板検査装置 |
US7468611B2 (en) * | 2006-10-20 | 2008-12-23 | Photon Dynamics, Inc. | Continuous linear scanning of large flat panel media |
-
2009
- 2009-09-24 KR KR1020117009439A patent/KR101451352B1/ko active IP Right Grant
- 2009-09-24 TW TW098132274A patent/TWI484159B/zh active
- 2009-09-24 JP JP2011529230A patent/JP2012503797A/ja not_active Withdrawn
- 2009-09-24 CN CN200980142437.6A patent/CN102203625B/zh active Active
- 2009-09-24 KR KR1020147020200A patent/KR20140108694A/ko not_active Application Discontinuation
- 2009-09-24 WO PCT/US2009/058254 patent/WO2010036818A1/en active Application Filing
- 2009-09-24 KR KR1020167033669A patent/KR20160142412A/ko not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020502825A (ja) * | 2016-12-16 | 2020-01-23 | テソロ・サイエンティフィック・インコーポレーテッド | 発光ダイオード(led)検査装置及び製造方法 |
JP7232193B2 (ja) | 2016-12-16 | 2023-03-02 | アップル インコーポレイテッド | 発光ダイオード(led)検査装置及び製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102203625B (zh) | 2014-04-09 |
KR20140108694A (ko) | 2014-09-12 |
TW201017155A (en) | 2010-05-01 |
KR20110070886A (ko) | 2011-06-24 |
WO2010036818A1 (en) | 2010-04-01 |
KR20160142412A (ko) | 2016-12-12 |
TWI484159B (zh) | 2015-05-11 |
CN102203625A (zh) | 2011-09-28 |
KR101451352B1 (ko) | 2014-10-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI484159B (zh) | 用以測定或識別平板顯示器或其像素之位置的方法及裝置 | |
KR101955052B1 (ko) | 전체 원 화상을 사용하여 결함을 검출하는 시스템 및 방법 | |
US9087367B2 (en) | Determining design coordinates for wafer defects | |
CN101996398B (zh) | 用于晶圆对准的图像匹配方法及设备 | |
US20090175530A1 (en) | Methods and apparatuses for detecting pattern errors | |
TWI808265B (zh) | 用於半導體基板之臨界尺寸量測的以深度學習為基礎之自適應關注區域 | |
TW200421857A (en) | Method and apparatus for optical inspecting of a display | |
CN1573482A (zh) | 检查和修补液晶显示器件的方法和装置 | |
TWI693629B (zh) | 基板檢查裝置、基板處理裝置及基板檢查方法 | |
TW202109596A (zh) | 帶電粒子束系統,及疊合錯位量測定方法 | |
JP5153212B2 (ja) | 荷電粒子線装置 | |
JP2007334262A (ja) | Tftアレイ基板の欠陥検出方法、およびtftアレイ基板の欠陥検出装置 | |
WO2011070663A1 (ja) | Tft基板検査装置およびtft基板検査方法 | |
TW201528235A (zh) | 用於平板裝置中之週邊電路之直接測試 | |
JP5459469B2 (ja) | Tftアレイの検査方法、およびtftアレイの検査装置 | |
JP2009079915A (ja) | 微小寸法測定方法および測定装置 | |
CN105046695B (zh) | 基于一维图像的投射电容触摸屏ito电路缺陷检测方法 | |
US20230153977A1 (en) | Panel design to improve accurate defect location report | |
JP4761663B2 (ja) | パターン検査における画像処理方法及びパターン検査装置 | |
JP5472636B2 (ja) | Tftアレイ検査装置およびtftアレイ検査方法 | |
JP4788904B2 (ja) | Tftアレイの欠陥検出方法及びtftアレイ欠陥検出装置 | |
JP2011247603A (ja) | 荷電粒子線を用いた試料検査方法および検査装置ならびに欠陥レビュー装置 | |
JP2001126066A (ja) | 集積回路の画像位置ずれ算出装置及び算出方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20121204 |