JP2012191005A5 - - Google Patents
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- Publication number
- JP2012191005A5 JP2012191005A5 JP2011053237A JP2011053237A JP2012191005A5 JP 2012191005 A5 JP2012191005 A5 JP 2012191005A5 JP 2011053237 A JP2011053237 A JP 2011053237A JP 2011053237 A JP2011053237 A JP 2011053237A JP 2012191005 A5 JP2012191005 A5 JP 2012191005A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- layers
- forming
- layer
- fixed charge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000003287 optical effect Effects 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 claims 2
- 238000003384 imaging method Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011053237A JP2012191005A (ja) | 2011-03-10 | 2011-03-10 | 固体撮像素子、固体撮像素子の製造方法および撮像装置 |
| TW101104780A TW201242000A (en) | 2011-03-10 | 2012-02-14 | Solid-state imaging device, method of manufacturing solid-state imaging device, and imaging apparatus |
| KR1020120016885A KR20120103448A (ko) | 2011-03-10 | 2012-02-20 | 고체 촬상 소자, 고체 촬상 소자의 제조 방법 및 촬상 장치 |
| US13/402,257 US8729450B2 (en) | 2011-03-10 | 2012-02-22 | Solid-state imaging device, method of manufacturing solid-state imaging device, and imaging apparatus |
| CN201210051688.7A CN102683361B (zh) | 2011-03-10 | 2012-03-01 | 固体摄像器件、固体摄像器件的制造方法和摄像装置 |
| US14/246,654 US9653502B2 (en) | 2011-03-10 | 2014-04-07 | Solid-state imaging device, method of manufacturing solid-state imaging device, and imaging apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011053237A JP2012191005A (ja) | 2011-03-10 | 2011-03-10 | 固体撮像素子、固体撮像素子の製造方法および撮像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012191005A JP2012191005A (ja) | 2012-10-04 |
| JP2012191005A5 true JP2012191005A5 (enExample) | 2014-04-10 |
Family
ID=46794659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011053237A Abandoned JP2012191005A (ja) | 2011-03-10 | 2011-03-10 | 固体撮像素子、固体撮像素子の製造方法および撮像装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US8729450B2 (enExample) |
| JP (1) | JP2012191005A (enExample) |
| KR (1) | KR20120103448A (enExample) |
| CN (1) | CN102683361B (enExample) |
| TW (1) | TW201242000A (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7442629B2 (en) | 2004-09-24 | 2008-10-28 | President & Fellows Of Harvard College | Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate |
| US7057256B2 (en) | 2001-05-25 | 2006-06-06 | President & Fellows Of Harvard College | Silicon-based visible and near-infrared optoelectric devices |
| JP5418049B2 (ja) * | 2009-08-03 | 2014-02-19 | ソニー株式会社 | 固体撮像素子及びその製造方法、撮像装置 |
| US8692198B2 (en) | 2010-04-21 | 2014-04-08 | Sionyx, Inc. | Photosensitive imaging devices and associated methods |
| CN106449684B (zh) | 2010-06-18 | 2019-09-27 | 西奥尼克斯公司 | 高速光敏设备及相关方法 |
| US9496308B2 (en) | 2011-06-09 | 2016-11-15 | Sionyx, Llc | Process module for increasing the response of backside illuminated photosensitive imagers and associated methods |
| CN103946867A (zh) | 2011-07-13 | 2014-07-23 | 西奥尼克斯公司 | 生物计量成像装置和相关方法 |
| US9064764B2 (en) | 2012-03-22 | 2015-06-23 | Sionyx, Inc. | Pixel isolation elements, devices, and associated methods |
| KR102350138B1 (ko) * | 2013-03-29 | 2022-01-14 | 소니그룹주식회사 | 촬상 소자 및 촬상 장치 |
| JP2015012303A (ja) * | 2013-06-26 | 2015-01-19 | ソニー株式会社 | 固体撮像装置および電子機器 |
| US9209345B2 (en) | 2013-06-29 | 2015-12-08 | Sionyx, Inc. | Shallow trench textured regions and associated methods |
| JP6465545B2 (ja) * | 2013-09-27 | 2019-02-06 | ソニー株式会社 | 撮像素子およびその製造方法ならびに電子機器 |
| JP6257525B2 (ja) * | 2014-01-27 | 2018-01-10 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| US9888198B2 (en) * | 2014-06-03 | 2018-02-06 | Semiconductor Components Industries, Llc | Imaging systems having image sensor pixel arrays with sub-pixel resolution capabilities |
| KR102201594B1 (ko) * | 2014-09-18 | 2021-01-11 | 에스케이하이닉스 주식회사 | 반사방지층을 갖는 이미지 센서 및 그 제조 방법 |
| KR20160100569A (ko) | 2015-02-16 | 2016-08-24 | 삼성전자주식회사 | 이미지 센서 및 이미지 센서를 포함하는 촬상 장치 |
| CN107924929B (zh) * | 2015-09-17 | 2022-10-18 | 索尼半导体解决方案公司 | 固体摄像器件、电子设备以及固体摄像器件的制造方法 |
| KR102666073B1 (ko) | 2016-12-28 | 2024-05-17 | 삼성전자주식회사 | 이미지 센서 |
| KR102495573B1 (ko) | 2017-07-21 | 2023-02-03 | 삼성전자주식회사 | 이미지 센서 |
| KR102534249B1 (ko) | 2018-01-12 | 2023-05-18 | 삼성전자주식회사 | 이미지 센서 |
| JP2020145397A (ja) * | 2018-10-17 | 2020-09-10 | キヤノン株式会社 | 光電変換装置、および、それを含む機器 |
| US11244978B2 (en) | 2018-10-17 | 2022-02-08 | Canon Kabushiki Kaisha | Photoelectric conversion apparatus and equipment including the same |
| US11121160B2 (en) | 2018-10-17 | 2021-09-14 | Canon Kabushiki Kaisha | Photoelectric conversion apparatus and equipment comprising a light shielding part in a light receiving region and a light shielding film in a light shielded region |
| WO2020220155A1 (zh) * | 2019-04-28 | 2020-11-05 | 深圳市大疆创新科技有限公司 | 图像传感器芯片、制造方法、图像传感器及拍摄装置 |
| JP7414492B2 (ja) * | 2019-11-29 | 2024-01-16 | キヤノン株式会社 | 光電変換装置、光電変換装置の製造方法 |
| JP7520558B2 (ja) * | 2020-04-07 | 2024-07-23 | キヤノン株式会社 | 光電変換装置および機器 |
| JP2023073713A (ja) * | 2021-11-16 | 2023-05-26 | ソニーセミコンダクタソリューションズ株式会社 | 光検出装置及び電子機器 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4311419B2 (ja) * | 2006-08-02 | 2009-08-12 | ソニー株式会社 | 固体撮像装置 |
| TWI436474B (zh) * | 2007-05-07 | 2014-05-01 | Sony Corp | A solid-state image pickup apparatus, a manufacturing method thereof, and an image pickup apparatus |
| JP2009070912A (ja) * | 2007-09-11 | 2009-04-02 | Fujifilm Corp | 固体撮像素子及び撮像装置 |
| JP5151375B2 (ja) * | 2007-10-03 | 2013-02-27 | ソニー株式会社 | 固体撮像装置およびその製造方法および撮像装置 |
| US8003428B2 (en) * | 2008-03-27 | 2011-08-23 | International Business Machines Corporation | Method of forming an inverted lens in a semiconductor structure |
| JP5347999B2 (ja) | 2009-03-12 | 2013-11-20 | ソニー株式会社 | 固体撮像素子及びその製造方法、撮像装置 |
| JP5418049B2 (ja) * | 2009-08-03 | 2014-02-19 | ソニー株式会社 | 固体撮像素子及びその製造方法、撮像装置 |
-
2011
- 2011-03-10 JP JP2011053237A patent/JP2012191005A/ja not_active Abandoned
-
2012
- 2012-02-14 TW TW101104780A patent/TW201242000A/zh unknown
- 2012-02-20 KR KR1020120016885A patent/KR20120103448A/ko not_active Withdrawn
- 2012-02-22 US US13/402,257 patent/US8729450B2/en active Active
- 2012-03-01 CN CN201210051688.7A patent/CN102683361B/zh not_active Expired - Fee Related
-
2014
- 2014-04-07 US US14/246,654 patent/US9653502B2/en not_active Expired - Fee Related