JP2012186510A5 - - Google Patents
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- Publication number
- JP2012186510A5 JP2012186510A5 JP2012149324A JP2012149324A JP2012186510A5 JP 2012186510 A5 JP2012186510 A5 JP 2012186510A5 JP 2012149324 A JP2012149324 A JP 2012149324A JP 2012149324 A JP2012149324 A JP 2012149324A JP 2012186510 A5 JP2012186510 A5 JP 2012186510A5
- Authority
- JP
- Japan
- Prior art keywords
- line
- electrical connection
- connection line
- common
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000010410 layer Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000011229 interlayer Substances 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 7
- 239000002356 single layer Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012149324A JP5131407B2 (ja) | 1998-05-01 | 2012-07-03 | 半導体記憶装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1998122542 | 1998-05-01 | ||
| JP12254298 | 1998-05-01 | ||
| JP2012149324A JP5131407B2 (ja) | 1998-05-01 | 2012-07-03 | 半導体記憶装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009083754A Division JP2009177200A (ja) | 1998-05-01 | 2009-03-30 | 半導体記憶装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012202822A Division JP2013016846A (ja) | 1998-05-01 | 2012-09-14 | 半導体記憶装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012186510A JP2012186510A (ja) | 2012-09-27 |
| JP2012186510A5 true JP2012186510A5 (enExample) | 2012-11-08 |
| JP5131407B2 JP5131407B2 (ja) | 2013-01-30 |
Family
ID=41031892
Family Applications (8)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009083754A Withdrawn JP2009177200A (ja) | 1998-05-01 | 2009-03-30 | 半導体記憶装置 |
| JP2012102233A Expired - Lifetime JP5035764B2 (ja) | 1998-05-01 | 2012-04-27 | 半導体記憶装置 |
| JP2012149324A Expired - Lifetime JP5131407B2 (ja) | 1998-05-01 | 2012-07-03 | 半導体記憶装置 |
| JP2012202822A Withdrawn JP2013016846A (ja) | 1998-05-01 | 2012-09-14 | 半導体記憶装置 |
| JP2014069932A Expired - Lifetime JP5674249B2 (ja) | 1998-05-01 | 2014-03-28 | 半導体記憶装置 |
| JP2014177297A Withdrawn JP2014222787A (ja) | 1998-05-01 | 2014-09-01 | 半導体記憶装置 |
| JP2014177296A Expired - Lifetime JP5674251B2 (ja) | 1998-05-01 | 2014-09-01 | 半導体記憶装置 |
| JP2015188669A Withdrawn JP2016021590A (ja) | 1998-05-01 | 2015-09-25 | 半導体記憶装置 |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009083754A Withdrawn JP2009177200A (ja) | 1998-05-01 | 2009-03-30 | 半導体記憶装置 |
| JP2012102233A Expired - Lifetime JP5035764B2 (ja) | 1998-05-01 | 2012-04-27 | 半導体記憶装置 |
Family Applications After (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012202822A Withdrawn JP2013016846A (ja) | 1998-05-01 | 2012-09-14 | 半導体記憶装置 |
| JP2014069932A Expired - Lifetime JP5674249B2 (ja) | 1998-05-01 | 2014-03-28 | 半導体記憶装置 |
| JP2014177297A Withdrawn JP2014222787A (ja) | 1998-05-01 | 2014-09-01 | 半導体記憶装置 |
| JP2014177296A Expired - Lifetime JP5674251B2 (ja) | 1998-05-01 | 2014-09-01 | 半導体記憶装置 |
| JP2015188669A Withdrawn JP2016021590A (ja) | 1998-05-01 | 2015-09-25 | 半導体記憶装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (8) | JP2009177200A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220034051A (ko) * | 2019-07-11 | 2022-03-17 | 유니산티스 일렉트로닉스 싱가포르 프라이빗 리미티드 | 주상 반도체 장치와, 그 제조 방법 |
| WO2021070366A1 (ja) * | 2019-10-11 | 2021-04-15 | 株式会社ソシオネクスト | 半導体装置 |
| WO2021070367A1 (ja) * | 2019-10-11 | 2021-04-15 | 株式会社ソシオネクスト | 半導体装置 |
| CN114586144B (zh) * | 2019-10-25 | 2024-10-29 | 株式会社索思未来 | 半导体装置 |
| CN114762113B (zh) * | 2019-12-05 | 2024-11-01 | 株式会社索思未来 | 半导体装置 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5055716A (en) * | 1990-05-15 | 1991-10-08 | Siarc | Basic cell for bicmos gate array |
| JPH04145656A (ja) * | 1990-10-08 | 1992-05-19 | Nec Corp | 半導体記憶装置及びその製造方法 |
| JPH05136373A (ja) * | 1990-11-21 | 1993-06-01 | Ricoh Co Ltd | 半導体集積回路装置及びその製造方法 |
| US5287304A (en) * | 1990-12-31 | 1994-02-15 | Texas Instruments Incorporated | Memory cell circuit and array |
| JPH04257258A (ja) * | 1991-02-08 | 1992-09-11 | Nec Corp | Mos型スタティックメモリ |
| US5166902A (en) * | 1991-03-18 | 1992-11-24 | United Technologies Corporation | SRAM memory cell |
| GB2254487B (en) * | 1991-03-23 | 1995-06-21 | Sony Corp | Full CMOS type static random access memories |
| JPH05136372A (ja) * | 1991-11-12 | 1993-06-01 | Sony Corp | スタテイツクramのメモリセルおよびそのメモリセルアレイ |
| EP0562207B1 (en) * | 1992-03-27 | 1996-06-05 | International Business Machines Corporation | Method of forming thin film pseudo-planar PFET devices and structures resulting therefrom |
| JPH05299621A (ja) * | 1992-04-20 | 1993-11-12 | Mitsubishi Electric Corp | 半導体メモリ装置およびゲートアレイ装置 |
| JPH06104420A (ja) * | 1992-09-22 | 1994-04-15 | Toshiba Corp | 半導体装置およびその製造方法 |
| JP2705874B2 (ja) * | 1992-12-18 | 1998-01-28 | 川崎製鉄株式会社 | 半導体集積回路 |
| JP3237346B2 (ja) * | 1993-10-29 | 2001-12-10 | ソニー株式会社 | 半導体記憶装置 |
| JPH07130877A (ja) * | 1993-11-05 | 1995-05-19 | Sony Corp | 完全cmos型スタティック記憶セル |
| JPH07161839A (ja) * | 1993-12-06 | 1995-06-23 | Sony Corp | 完全cmos型sram装置 |
| JP3294041B2 (ja) * | 1994-02-21 | 2002-06-17 | 株式会社東芝 | 半導体装置 |
| JP3426711B2 (ja) * | 1994-07-05 | 2003-07-14 | 株式会社日立製作所 | 半導体集積回路装置およびその製造方法 |
| JPH08288407A (ja) * | 1995-04-12 | 1996-11-01 | Sony Corp | 半導体メモリ装置およびその製造方法 |
| JPH09172078A (ja) * | 1995-12-20 | 1997-06-30 | Fujitsu Ltd | 半導体装置の配線構造及びその形成方法 |
| US5719079A (en) * | 1996-05-28 | 1998-02-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of making a semiconductor device having high density 4T SRAM in logic with salicide process |
| JPH1056078A (ja) * | 1996-08-08 | 1998-02-24 | Fujitsu Ltd | 半導体装置 |
| JPH1093024A (ja) * | 1996-09-11 | 1998-04-10 | Hitachi Ltd | 半導体集積回路装置 |
| JPH10163344A (ja) * | 1996-12-05 | 1998-06-19 | Hitachi Ltd | 半導体集積回路装置およびその製造方法 |
| JP3523762B2 (ja) * | 1996-12-19 | 2004-04-26 | 株式会社東芝 | 半導体記憶装置 |
| JPH10326896A (ja) * | 1997-03-25 | 1998-12-08 | Toshiba Corp | 半導体装置及びその製造方法 |
| US6005296A (en) * | 1997-05-30 | 1999-12-21 | Stmicroelectronics, Inc. | Layout for SRAM structure |
| JP3363750B2 (ja) * | 1997-08-15 | 2003-01-08 | 株式会社日立製作所 | 半導体集積回路装置の製造方法 |
-
2009
- 2009-03-30 JP JP2009083754A patent/JP2009177200A/ja not_active Withdrawn
-
2012
- 2012-04-27 JP JP2012102233A patent/JP5035764B2/ja not_active Expired - Lifetime
- 2012-07-03 JP JP2012149324A patent/JP5131407B2/ja not_active Expired - Lifetime
- 2012-09-14 JP JP2012202822A patent/JP2013016846A/ja not_active Withdrawn
-
2014
- 2014-03-28 JP JP2014069932A patent/JP5674249B2/ja not_active Expired - Lifetime
- 2014-09-01 JP JP2014177297A patent/JP2014222787A/ja not_active Withdrawn
- 2014-09-01 JP JP2014177296A patent/JP5674251B2/ja not_active Expired - Lifetime
-
2015
- 2015-09-25 JP JP2015188669A patent/JP2016021590A/ja not_active Withdrawn
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