JP2012089852A5 - - Google Patents

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Publication number
JP2012089852A5
JP2012089852A5 JP2011241389A JP2011241389A JP2012089852A5 JP 2012089852 A5 JP2012089852 A5 JP 2012089852A5 JP 2011241389 A JP2011241389 A JP 2011241389A JP 2011241389 A JP2011241389 A JP 2011241389A JP 2012089852 A5 JP2012089852 A5 JP 2012089852A5
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Japan
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optical system
substrate
optical
path
measuring
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JP2011241389A
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Japanese (ja)
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JP2012089852A (ja
JP5165101B2 (ja
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Priority claimed from DE102008017645A external-priority patent/DE102008017645A1/de
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Publication of JP2012089852A5 publication Critical patent/JP2012089852A5/ja
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JP2011241389A 2008-04-04 2011-11-02 マイクロリソグラフィ投影露光用の装置および基板の表面を検査するための装置 Expired - Fee Related JP5165101B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US7298008P 2008-04-04 2008-04-04
DE102008017645.1 2008-04-04
DE102008017645A DE102008017645A1 (de) 2008-04-04 2008-04-04 Vorrichtung zur mikrolithographischen Projektionsbelichtung sowie Vorrichtung zur Inspektion einer Oberfläche eines Substrats
US61/072,980 2008-04-04

Related Parent Applications (1)

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JP2011502273A Division JP4892645B2 (ja) 2008-04-04 2009-03-30 マイクロリソグラフィ投影露光用の装置および基板の表面を検査するための装置

Publications (3)

Publication Number Publication Date
JP2012089852A JP2012089852A (ja) 2012-05-10
JP2012089852A5 true JP2012089852A5 (OSRAM) 2012-06-28
JP5165101B2 JP5165101B2 (ja) 2013-03-21

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Family Applications (2)

Application Number Title Priority Date Filing Date
JP2011502273A Expired - Fee Related JP4892645B2 (ja) 2008-04-04 2009-03-30 マイクロリソグラフィ投影露光用の装置および基板の表面を検査するための装置
JP2011241389A Expired - Fee Related JP5165101B2 (ja) 2008-04-04 2011-11-02 マイクロリソグラフィ投影露光用の装置および基板の表面を検査するための装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2011502273A Expired - Fee Related JP4892645B2 (ja) 2008-04-04 2009-03-30 マイクロリソグラフィ投影露光用の装置および基板の表面を検査するための装置

Country Status (6)

Country Link
US (2) US8345267B2 (OSRAM)
JP (2) JP4892645B2 (OSRAM)
KR (1) KR101633942B1 (OSRAM)
CN (2) CN102124411B (OSRAM)
DE (1) DE102008017645A1 (OSRAM)
WO (1) WO2009121541A1 (OSRAM)

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