JP2012058024A - 圧力センサー - Google Patents
圧力センサー Download PDFInfo
- Publication number
- JP2012058024A JP2012058024A JP2010200055A JP2010200055A JP2012058024A JP 2012058024 A JP2012058024 A JP 2012058024A JP 2010200055 A JP2010200055 A JP 2010200055A JP 2010200055 A JP2010200055 A JP 2010200055A JP 2012058024 A JP2012058024 A JP 2012058024A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensitive element
- receiving means
- thermal expansion
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000463 material Substances 0.000 claims abstract description 74
- 230000002093 peripheral effect Effects 0.000 claims abstract description 27
- 238000006073 displacement reaction Methods 0.000 claims abstract description 20
- 229910001220 stainless steel Inorganic materials 0.000 claims description 14
- 239000010935 stainless steel Substances 0.000 claims description 13
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 238000001514 detection method Methods 0.000 description 24
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 230000008602 contraction Effects 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 241000405147 Hermes Species 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 150000002816 nickel compounds Chemical class 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010200055A JP2012058024A (ja) | 2010-09-07 | 2010-09-07 | 圧力センサー |
| US13/179,992 US20120055267A1 (en) | 2010-09-07 | 2011-07-11 | Pressure sensor |
| CN2011102256432A CN102401716A (zh) | 2010-09-07 | 2011-08-03 | 压力传感器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010200055A JP2012058024A (ja) | 2010-09-07 | 2010-09-07 | 圧力センサー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012058024A true JP2012058024A (ja) | 2012-03-22 |
| JP2012058024A5 JP2012058024A5 (enExample) | 2013-10-03 |
Family
ID=45769675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010200055A Withdrawn JP2012058024A (ja) | 2010-09-07 | 2010-09-07 | 圧力センサー |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20120055267A1 (enExample) |
| JP (1) | JP2012058024A (enExample) |
| CN (1) | CN102401716A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117547628B (zh) * | 2024-01-10 | 2024-03-08 | 厦门小米豆物联科技有限公司 | 一种全自动高压灭菌器 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2935476B2 (de) * | 1979-09-01 | 1981-07-09 | Hottinger Baldwin Messtechnik Gmbh, 6100 Darmstadt | Flüssigkeitsgefüllter Differenzdruckaufnehmer |
| US4382385A (en) * | 1980-04-17 | 1983-05-10 | Paroscientific, Inc. | Digital differential pressure transducer |
| AU2001234959A1 (en) * | 2000-02-11 | 2001-08-20 | Rosemount, Inc. | Oil-less differential pressure sensor |
| AUPQ605900A0 (en) * | 2000-03-06 | 2000-03-30 | Silverbrook Research Pty Ltd | Thermal expansion compensation for printhead assemblies |
| EP1662242B1 (en) * | 2004-11-25 | 2008-07-30 | Gefran S.p.A. | Pressure sensor with compensation of the thermal expansion of its housing |
| JP2007057395A (ja) * | 2005-08-24 | 2007-03-08 | Epson Toyocom Corp | 圧力センサ |
| JP3969442B2 (ja) * | 2005-09-26 | 2007-09-05 | エプソントヨコム株式会社 | 圧力センサ |
| JP2008232886A (ja) * | 2007-03-22 | 2008-10-02 | Epson Toyocom Corp | 圧力センサ |
| JP4332859B2 (ja) * | 2007-04-27 | 2009-09-16 | エプソントヨコム株式会社 | 圧力センサ |
| CN100531989C (zh) * | 2007-11-06 | 2009-08-26 | 北京有色金属研究总院 | C/C复合材料、C/SiC复合材料与金属的连接方法 |
| JP2010019826A (ja) * | 2008-03-25 | 2010-01-28 | Epson Toyocom Corp | 圧力センサ |
| JP2009258085A (ja) * | 2008-03-25 | 2009-11-05 | Epson Toyocom Corp | 圧力センサおよびその製造方法 |
| JP2010019829A (ja) * | 2008-06-11 | 2010-01-28 | Epson Toyocom Corp | 圧力センサー |
| JP2010019828A (ja) * | 2008-06-11 | 2010-01-28 | Epson Toyocom Corp | 圧力センサー用ダイアフラムおよび圧力センサー |
| JP2010019827A (ja) * | 2008-06-11 | 2010-01-28 | Epson Toyocom Corp | 圧力センサー |
| JP5187529B2 (ja) * | 2008-07-22 | 2013-04-24 | セイコーエプソン株式会社 | 圧力センサー |
| JP5305028B2 (ja) * | 2008-10-16 | 2013-10-02 | セイコーエプソン株式会社 | 圧力センサー |
| JP4973718B2 (ja) * | 2009-01-27 | 2012-07-11 | セイコーエプソン株式会社 | 圧力検出ユニット、及び圧力センサー |
| JP4998860B2 (ja) * | 2009-02-26 | 2012-08-15 | セイコーエプソン株式会社 | 圧力センサー素子、圧力センサー |
| JP4756394B2 (ja) * | 2009-03-04 | 2011-08-24 | セイコーエプソン株式会社 | 圧力センサー |
| JP2011221007A (ja) * | 2010-03-25 | 2011-11-04 | Seiko Epson Corp | 圧力検出装置 |
| JP2012093135A (ja) * | 2010-10-25 | 2012-05-17 | Seiko Epson Corp | 圧力センサー |
-
2010
- 2010-09-07 JP JP2010200055A patent/JP2012058024A/ja not_active Withdrawn
-
2011
- 2011-07-11 US US13/179,992 patent/US20120055267A1/en not_active Abandoned
- 2011-08-03 CN CN2011102256432A patent/CN102401716A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20120055267A1 (en) | 2012-03-08 |
| CN102401716A (zh) | 2012-04-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130821 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130821 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140221 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140318 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20140407 |