JP2012035336A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2012035336A5 JP2012035336A5 JP2010174673A JP2010174673A JP2012035336A5 JP 2012035336 A5 JP2012035336 A5 JP 2012035336A5 JP 2010174673 A JP2010174673 A JP 2010174673A JP 2010174673 A JP2010174673 A JP 2010174673A JP 2012035336 A5 JP2012035336 A5 JP 2012035336A5
- Authority
- JP
- Japan
- Prior art keywords
- water
- fixed abrasive
- mass
- processing liquid
- soluble
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims 9
- 239000012530 fluid Substances 0.000 claims 4
- 238000003754 machining Methods 0.000 claims 3
- 150000002334 glycols Chemical class 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000006061 abrasive grain Substances 0.000 claims 1
- 150000001447 alkali salts Chemical class 0.000 claims 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims 1
- 229920001577 copolymer Polymers 0.000 claims 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims 1
- -1 glycol ethers Chemical class 0.000 claims 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 claims 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 claims 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229920003169 water-soluble polymer Polymers 0.000 claims 1
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010174673A JP5420498B2 (ja) | 2010-08-03 | 2010-08-03 | 固定砥粒ワイヤソー用水溶性加工液 |
| SG2012096475A SG186486A1 (en) | 2010-08-03 | 2011-07-29 | Aqueous processing solution for fixed abrasive grain wire saw |
| CN201180036629.6A CN103025486B (zh) | 2010-08-03 | 2011-07-29 | 固结磨料线锯用水溶性加工液 |
| KR1020137001523A KR101788901B1 (ko) | 2010-08-03 | 2011-07-29 | 고정 지립 와이어 소용 수용성 가공액 |
| PH1/2013/500021A PH12013500021B1 (en) | 2010-08-03 | 2011-07-29 | Water-soluble working fluid for fixed-abrasive wire saw |
| PCT/JP2011/067457 WO2012017947A1 (ja) | 2010-08-03 | 2011-07-29 | 固定砥粒ワイヤソー用水溶性加工液 |
| EP11814573.9A EP2602058A4 (en) | 2010-08-03 | 2011-07-29 | AQUEOUS PROCESSING SOLUTION FOR FIXED ABRASIVE GRAIN CUTTING CABLE |
| TW100127516A TWI522457B (zh) | 2010-08-03 | 2011-08-03 | 固定研磨粒細線切割器用水溶性加工液 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010174673A JP5420498B2 (ja) | 2010-08-03 | 2010-08-03 | 固定砥粒ワイヤソー用水溶性加工液 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012035336A JP2012035336A (ja) | 2012-02-23 |
| JP2012035336A5 true JP2012035336A5 (enrdf_load_stackoverflow) | 2013-07-25 |
| JP5420498B2 JP5420498B2 (ja) | 2014-02-19 |
Family
ID=45559447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010174673A Active JP5420498B2 (ja) | 2010-08-03 | 2010-08-03 | 固定砥粒ワイヤソー用水溶性加工液 |
Country Status (8)
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012172117A (ja) * | 2011-02-23 | 2012-09-10 | Yushiro Chemical Industry Co Ltd | 固定砥粒ワイヤソー用水溶性加工液 |
| JP6039935B2 (ja) * | 2012-06-29 | 2016-12-07 | 出光興産株式会社 | 水性加工液 |
| JP6819619B2 (ja) * | 2018-01-22 | 2021-01-27 | 信越半導体株式会社 | ワーク切断方法及びワイヤソー |
| CN110497546A (zh) * | 2019-08-26 | 2019-11-26 | 哈尔滨商业大学 | 游离-固结复合磨料多线切割硅片的方法及设备 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6243482A (ja) * | 1985-08-21 | 1987-02-25 | Sanyo Chem Ind Ltd | 研磨加工液 |
| CN1057478A (zh) * | 1990-06-22 | 1992-01-01 | 薛志纯 | 金属切削液 |
| US5401428A (en) * | 1993-10-08 | 1995-03-28 | Monsanto Company | Water soluble metal working fluids |
| JP3869520B2 (ja) * | 1997-03-21 | 2007-01-17 | 株式会社ネオス | ワイヤソー用水溶性切削液 |
| JP2000296455A (ja) * | 1999-04-09 | 2000-10-24 | Tokyo Seimitsu Co Ltd | 固定砥粒マルチワイヤソー |
| JP2001054850A (ja) | 1999-08-11 | 2001-02-27 | Osaka Diamond Ind Co Ltd | 固定砥粒ワイヤーソーによる硬脆材料の切断加工法 |
| JP2002096251A (ja) * | 1999-09-17 | 2002-04-02 | Sumitomo Special Metals Co Ltd | 希土類合金の切断方法および切断装置 |
| JP2001138205A (ja) * | 1999-11-08 | 2001-05-22 | Sumitomo Special Metals Co Ltd | 希土類合金の切断方法および切断装置 |
| JP2002167589A (ja) * | 2000-11-30 | 2002-06-11 | Nippon Shokubai Co Ltd | 金属加工油剤 |
| JP4497767B2 (ja) | 2001-09-06 | 2010-07-07 | ユシロ化学工業株式会社 | 固定砥粒ワイヤソー用水溶性加工液組成物 |
| TW575660B (en) * | 2001-09-07 | 2004-02-11 | Dai Ichi Kogyo Seiyaku Co Ltd | Nonflammable water-based cutting fluid composition and nonflammable water-based cutting fluid |
| JP2008161992A (ja) * | 2006-12-28 | 2008-07-17 | Asahi Diamond Industrial Co Ltd | 被加工部材の切断方法およびウェハの製造方法 |
| JP4874853B2 (ja) * | 2007-04-09 | 2012-02-15 | Ｄｏｗａホールディングス株式会社 | 焼結希土類磁石合金の切断法 |
| JP5253765B2 (ja) * | 2007-07-05 | 2013-07-31 | 株式会社Ａｄｅｋａ | ダイシング切削水用添加剤及びそれを使用した切削加工方法 |
| US8157876B2 (en) * | 2007-07-31 | 2012-04-17 | Cabot Microelectronics Corporation | Slurry composition containing non-ionic polymer and method for use |
| US20090149359A1 (en) * | 2007-12-10 | 2009-06-11 | Hundley Lloyd E | Formulation of a metal working fluid |
-
2010
- 2010-08-03 JP JP2010174673A patent/JP5420498B2/ja active Active
-
2011
- 2011-07-29 SG SG2012096475A patent/SG186486A1/en unknown
- 2011-07-29 KR KR1020137001523A patent/KR101788901B1/ko active Active
- 2011-07-29 EP EP11814573.9A patent/EP2602058A4/en not_active Withdrawn
- 2011-07-29 CN CN201180036629.6A patent/CN103025486B/zh active Active
- 2011-07-29 PH PH1/2013/500021A patent/PH12013500021B1/en unknown
- 2011-07-29 WO PCT/JP2011/067457 patent/WO2012017947A1/ja active Application Filing
- 2011-08-03 TW TW100127516A patent/TWI522457B/zh active