JP2012019208A5 - - Google Patents
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- Publication number
- JP2012019208A5 JP2012019208A5 JP2011128179A JP2011128179A JP2012019208A5 JP 2012019208 A5 JP2012019208 A5 JP 2012019208A5 JP 2011128179 A JP2011128179 A JP 2011128179A JP 2011128179 A JP2011128179 A JP 2011128179A JP 2012019208 A5 JP2012019208 A5 JP 2012019208A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- forming
- layer
- separation groove
- conductive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 35
- 238000000926 separation method Methods 0.000 claims 9
- 239000011347 resin Substances 0.000 claims 5
- 229920005989 resin Polymers 0.000 claims 5
- 238000006243 chemical reaction Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 1
- 238000002955 isolation Methods 0.000 claims 1
- 230000007847 structural defect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011128179A JP5700665B2 (ja) | 2010-06-09 | 2011-06-08 | 光電変換装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010131841 | 2010-06-09 | ||
| JP2010131841 | 2010-06-09 | ||
| JP2011128179A JP5700665B2 (ja) | 2010-06-09 | 2011-06-08 | 光電変換装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012019208A JP2012019208A (ja) | 2012-01-26 |
| JP2012019208A5 true JP2012019208A5 (https=) | 2014-05-22 |
| JP5700665B2 JP5700665B2 (ja) | 2015-04-15 |
Family
ID=45095240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011128179A Expired - Fee Related JP5700665B2 (ja) | 2010-06-09 | 2011-06-08 | 光電変換装置の作製方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20110303272A1 (https=) |
| JP (1) | JP5700665B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5912404B2 (ja) | 2010-10-29 | 2016-04-27 | 株式会社半導体エネルギー研究所 | 光電変換装置 |
| KR20130136739A (ko) * | 2012-06-05 | 2013-12-13 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
| KR101393743B1 (ko) * | 2012-06-28 | 2014-05-13 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조 방법 |
| EP3718145A4 (en) * | 2017-11-30 | 2021-06-23 | China Triumph International Engineering Co., Ltd. | Thin film device with additional conductive lines and method for producing it |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6254478A (ja) * | 1985-08-24 | 1987-03-10 | Semiconductor Energy Lab Co Ltd | 光電変換装置 |
| JPS6269566A (ja) * | 1985-09-21 | 1987-03-30 | Semiconductor Energy Lab Co Ltd | 光電変換装置作製方法 |
| JPS6284569A (ja) * | 1985-10-08 | 1987-04-18 | Sanyo Electric Co Ltd | 光起電力装置の製造方法 |
| US4981525A (en) * | 1988-02-19 | 1991-01-01 | Sanyo Electric Co., Ltd. | Photovoltaic device |
| WO1992007386A1 (en) * | 1990-10-15 | 1992-04-30 | United Solar Systems Corporation | Monolithic solar cell array and method for its manufacture |
| JPH04336471A (ja) * | 1991-05-13 | 1992-11-24 | Canon Inc | 半導体薄膜のピンホールの除去方法 |
| US6720576B1 (en) * | 1992-09-11 | 2004-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing method and photoelectric conversion device |
| US5385848A (en) * | 1993-09-20 | 1995-01-31 | Iowa Thin Film Technologies, Inc | Method for fabricating an interconnected array of semiconductor devices |
| TW387152B (en) * | 1996-07-24 | 2000-04-11 | Tdk Corp | Solar battery and manufacturing method thereof |
| US7276453B2 (en) * | 2004-08-10 | 2007-10-02 | E.I. Du Pont De Nemours And Company | Methods for forming an undercut region and electronic devices incorporating the same |
| US20070079866A1 (en) * | 2005-10-07 | 2007-04-12 | Applied Materials, Inc. | System and method for making an improved thin film solar cell interconnect |
| TW200849621A (en) * | 2006-12-21 | 2008-12-16 | Helianthos Bv | Method for making solar sub-cells from a solar cell |
| EP1970951A3 (en) * | 2007-03-13 | 2009-05-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
-
2011
- 2011-06-07 US US13/154,990 patent/US20110303272A1/en not_active Abandoned
- 2011-06-08 JP JP2011128179A patent/JP5700665B2/ja not_active Expired - Fee Related
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